Method and apparatus for scheduling based on state estimation uncertainties
First Claim
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1. A method for scheduling activities in a manufacturing system, comprising:
- defining a plurality of observed states associated with the manufacturing system;
generating state estimates for the observed slates;
generating uncertainty values for the state estimates;
identifying a plurality of candidate schedules for performing activities in the manufacturing system;
predicting changes to the uncertainty values based on the candidate schedules; and
selecting one of the candidate schedules based on the predicted changes to the uncertainty values.
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Abstract
A method for scheduling activities in a manufacturing system includes defining a plurality of observed states associated with the manufacturing system. State estimates are generated for the observed states. Uncertainty values for the state estimates are generated. A plurality of candidate schedules for performing activities in the manufacturing system is identified. Changes to the uncertainty values are predicted based on the candidate schedules. One of the candidate schedules is selected based on the predicted changes to the uncertainty values.
169 Citations
36 Claims
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1. A method for scheduling activities in a manufacturing system, comprising:
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defining a plurality of observed states associated with the manufacturing system;
generating state estimates for the observed slates;
generating uncertainty values for the state estimates;
identifying a plurality of candidate schedules for performing activities in the manufacturing system;
predicting changes to the uncertainty values based on the candidate schedules; and
selecting one of the candidate schedules based on the predicted changes to the uncertainty values. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
calculating a trace value of the covariance matrix associated with each of the candidate schedules for each step in the candidate schedule;
determining an average trace value for each candidate schedule based on the trace values for the steps in the candidate schedule; and
selecting the candidate schedule having the lowest average trace value.
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5. The method of claim of claim 3, wherein generating the covariance matrix further comprises generating the covariance matrix including the uncertainty values as diagonal terms.
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6. The method of claim of claim 4, wherein generating the covariance matrix further comprises generating the covariance matrix including off-diagonal terns defining interdependency relationships amongst the observed states.
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7. The method of claim 1, wherein identifying the plurality of candidate schedules further comprises:
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scheduling a plurality of processing activities; and
scheduling a plurality of metrology activities associated with a subset of the processing activities, each candidate schedule having a different subset of the processing activities.
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8. The method of claim 1, wherein identifying the plurality of candidate schedules further comprises scheduling a plurality of processing activities, each candidate schedule having a different order for the processing activities.
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9. The method of claim 1, wherein identifying the plurality of candidate schedules further comprises:
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identifying a plurality of processing activities;
identifying a plurality of process tools capable of performing the processing activities; and
generating each candidate schedule having different process tools selected for performing the processing activities.
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10. The method of claim 1, further comprising;
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generating an uncertainty metric associated with each of the candidate schedules based on the predicted changes to the uncertainty values; and
selecting the candidate schedule having the lowest uncertainty metric.
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11. The method of claim 10, wherein each candidate schedule includes a plurality of steps and generating the uncertainty metric further comprises:
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generating a covariance matrix associated with the state vector for each of the candidate schedules for each of the steps, the covariance matrix including the uncertainty values;
calculating a trace value of the covariance matrix associated with each of the candidate schedules for each step in the candidate schedule; and
determining an average trace value for each candidate schedule based on the trace values for the steps in the candidate schedule to generate the uncertainty metric.
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12. The method of claim 1, wherein each candidate schedule includes a priority process activity, and selecting one of the candidate schedules based on the predicted changes to the uncertainty values further comprises selecting the one of the candidate schedules having the lowest uncertainty while performing the priority process activity.
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13. A method for scheduling activities in a manufacturing system, comprising:
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defining a plurality of observed states associated with the manufacturing system;
generating state estimates for the observed states;
generating uncertainty values for the state estimates;
identifying a plurality of candidate process activities in the manufacturing system;
predicting changes to the uncertainty values based on processing each of the candidate process activities first; and
selecting one of the candidate process activities for processing first based on the predicted uncertainty values. - View Dependent Claims (14, 15)
removing the candidate process activity selected for first processing from the plurality of candidate process activities;
predicting changes to the uncertainty values based on processing each of the remaining candidate process activities second; and
selecting one of the remaining candidate process activities for processing second based on the predicted uncertainty values.
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15. The method of claim 14, further comprising iteratively performing the removing, predicting, and selecting steps until a processing order is selected for each of the processing activities.
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16. A method for scheduling activities in a manufacturing system, comprising:
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defining a plurality of observed states associated with the manufacturing system;
generating state estimates for the observed states;
generating uncertainty values for the state estimates;
identifying a plurality of candidate process tools capable of performing a selected process activity;
predicting changes to the uncertainty values based on performing the selected process activity on each of the candidate process tools; and
selecting one of the candidate process tools for performing the selected process activity based on the predicted uncertainty values.
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17. A system for scheduling activities in a manufacturing system, comprising:
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a process controller configured to define a plurality of observed states associated with the manufacturing system, generate state estimates for the observed states, and generate uncertainty values for the state estimates; and
a scheduling controller configured to identity a plurality of candidate schedules for performing activities in the manufacturing system, predict changes to the uncertainty values based on the candidate schedules, and select one of the candidate schedules based on the predicted changes to the uncertainty values. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A system for scheduling activities in a manufacturing system, comprising:
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a process controller configured to define a plurality of observed states associated with the manufacturing system, generate state estimates for the observed slates, and generate uncertainty values for the state estimates; and
a scheduling controller configured to identify a plurality of candidate process activities in the manufacturing system, predict changes to the uncertainty values based on processing each of the candidate process activities first, and select one of the candidate process activities for processing first based on the predicted uncertainty values. - View Dependent Claims (31, 32, 33)
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34. A system for scheduling activities in a manufacturing system, comprising:
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a process controller configured to define a plurality of observed states associated with the manufacturing system, generate state estimates for the observed states, and generate uncertainty values for the state estimates; and
a scheduling controller configured to identify a plurality of candidate process tools capable of performing a selected process activity, predict changes to the uncertainty values based on performing the selected process activity on each of the candidate process tools, and select one of the candidate process tools for performing the selected process activity based on the predicted uncertainty values. - View Dependent Claims (35)
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36. A system for scheduling activities in a manufacturing system, comprising:
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means for defining a plurality of observed states associated with the manufacturing system;
means for generating state estimates for the observed states;
means for generating uncertainty values for the state estimates;
means for identifying a plurality of candidate schedules for performing activities in the manufacturing system;
means for predicting changes to the uncertainty values based on the candidate schedules; and
means for selecting one of the candidate schedules based on the predicted changes to the uncertainty values.
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Specification