Surgical tool with integrated pressure and flow sensors
First Claim
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1. A surgical tool, comprising:
- (a) a rigid body including a needle shaped portion for passing into tissue and defining a flow channel extending therethrough for passing a flow of fluid through the tool; and
(b) a sensor responsive to a condition in the flow channel and integrally attached to the rigid body wherein the sensor includes a membrane on the rigid body in fluid communication with the flow channel and having a membrane thickness which is less than a thickness of the rigid body wherein the sensor includes at least one resistor formed on the membrane, and wherein the sensor includes at least one resistor formed on the rigid body near the membrane.
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Abstract
A surgical tool with a rigid body including a needle portion for entering tissue includes a fluid flow channel formed therethrough. A sensor is integrally formed on the tool to detect changing conditions (pressure and/or flow) in the channel. The sensor signal may be used to provide feedback control of pumping of fluid through the channel. The tool may be a micromachined silicon tool with the sensor integrally formed thereon from a silicon nitrate membrane and polysilicon resistors. The tool may be an ultrasonically activated cutting tool, which may be bonded to a package at a node thereof.
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Citations
12 Claims
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1. A surgical tool, comprising:
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(a) a rigid body including a needle shaped portion for passing into tissue and defining a flow channel extending therethrough for passing a flow of fluid through the tool; and
(b) a sensor responsive to a condition in the flow channel and integrally attached to the rigid body wherein the sensor includes a membrane on the rigid body in fluid communication with the flow channel and having a membrane thickness which is less than a thickness of the rigid body wherein the sensor includes at least one resistor formed on the membrane, and wherein the sensor includes at least one resistor formed on the rigid body near the membrane. - View Dependent Claims (2, 3)
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4. A micromachined silicon tool, comprising:
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(a) a tool body formed of micromachined silicon and defining a flow channel extending therethrough for passing a flow of fluid through the tool; and
(b) a sensor responsive to a condition in the flow channel and integrally attached to the tool body, wherein the sensor includes a membrane formed on the tool body in fluid communication with the flow channel and having a membrane thickness which is less than a thickness of the tool body, wherein the sensor includes at least one resistor formed on the membrane, and wherein the sensor includes at least one resistor formed on the tool body near the membrane. - View Dependent Claims (5, 6)
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7. A micromachined tool, comprising:
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(a) a tool body having a flow channel extending therethrough for passing a flow of fluid through the tool;
(b) a membrane on the tool body in fluid communication with the flow channel and having a membrane thickness which is less than a thickness of the tool body; and
(c) at least one resistor formed on the membrane; and
(d) at least one resistor formed on the tool body near the membrane. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification