Two-mask trench schottky diode

• US 6,740,951 B2
• Filed: 05/22/2001
• Issued: 05/25/2004
• Est. Priority Date: 05/22/2001
• Status: Active Grant

• Current Assignee: General Semiconductor, Inc. (Vishay Intertechnology Incorporated)
• Original Assignee: General Semiconductor, Inc. (Vishay Intertechnology Incorporated)
• Inventors: Hshieh, Fwu-Iuan, So, Koon Chong, Tsui, Yan Man
• Primary Examiner(s): Hu, Shouxiang
• Application Number:
  US09/862,532
• Publication Number:
  US 20020175342A1
• Time in Patent Office: 1,099 Days
• Field of Search: 257/483-484, 257/109, 257/493, 257/497, 438/570-583
• US Class Current: 257/483
• CPC Class Codes: H01L 27/0814 Diodes only
• CPC Class Codes: H01L 29/407 Recessed field plates, e.g. trench field plates, buried field plates
• CPC Class Codes: H01L 29/66143 Schottky diodes
• CPC Class Codes: H01L 29/872 Schottky diodes
• CPC Class Codes: H01L 29/8725 of the trench MOS barrier type [TMBS]

Abstract

A Schottky rectifier includes a semiconductor structure having first and second opposing faces each extending to define an active semiconductor region and a termination semiconductor region. The semiconductor structure includes a cathode region of the first conductivity type adjacent the first face and a drift region of the first conductivity type adjacent the second face. The drift region has a lower net doping concentration than that of the cathode region. A plurality of trenches extends from the second face into the semiconductor structure and defines a plurality of mesas within the semiconductor structure. At least one of the trenches is located in each of the active and the termination semiconductor regions. A first insulating region is located adjacent the semiconductor structure in the plurality of trenches. A second insulating region electrically isolates the active semiconductor region from the termination semiconductor region. An anode electrode is (a) adjacent to and forms a Schottky rectifying contact with the semiconductor structure at the second face and is (b) adjacent to the first insulating region in the trenches. The anode electrode electrically connects together the plurality of trenches.

Claims

1. A Schottky rectifier, comprising:

a semiconductor structure having first and second opposing faces each extending to define an active semiconductor region and a termination semiconductor region, said semiconductor structure comprising a cathode region of first conductivity type adjacent the first face and a drift region of said first conductivity type adjacent the second face, said drift region having a lower net doping concentration than that of said cathode region;

a plurality of trenches extending from said second face into said semiconductor structure and defining a plurality of mesas within said semiconductor structure, at least one of said trenches being located in each of said active and said termination semiconductor regions;

a first insulating region adjacent said semiconductor structure in said plurality of trenches;

a second insulating region electrically isolating said active semiconductor region to said termination semiconductor region; and

an anode electrode that is adjacent to and forms a Schottky rectifying contact with said semiconductor structure at said second face, said anode electrode being adjacent to said first insulating region in said trenches, and electrically connecting together said plurality of trenches.

2. The Schottky rectifier of claim 1 wherein said first insulating region comprises an oxide.

3. The Schottky rectifier of claim 2 wherein said first insulating region comprises silicon dioxide.

4. The Schottky rectifier of claim 1, wherein said semiconductor is silicon.

5. The Schottky rectifier of claim 1, wherein said first conductivity type is n-type conductivity.

6. The Schottky rectifier of claim 1, wherein said trenches extend into said cathode region.

7. The Schottky rectifier of claim 1, wherein said anode electrode is polysilicon.

8. The Schottky rectifier of claim 7, wherein said polysilicon substantially fills said trenches.

9. The Schottky rectifier of claim 1, wherein said second insulating region is a LOCOS region.

10. The Schottky rectifier of claim 1, wherein said semiconductor structure includes a substrate and an epitaxial semiconductor layer grown thereon.

11. A method of forming a Schottky rectifier, comprising:

forming a semiconductor structure having first and second opposing faces each extending to define an active semiconductor region and a termination semiconductor region, said semiconductor structure comprising a cathode region of first conductivity type adjacent the first face and a drift region of said first conductivity type adjacent the second face, said drift region having a lower net doping concentration than that of said cathode region;

forming a plurality of trenches extending from said second face into said semiconductor structure and defining a plurality of mesas within said semiconductor structure, at least one of said trenches being located in each of said active and said termination semiconductor regions;

forming a first insulating region adjacent said semiconductor structure in said plurality of trenches;

forming a second insulating region electrically isolating said active semiconductor region to said termination semiconductor region; and

forming an anode electrode that is (a) adjacent to and forms a Schottky rectifying contact with said semiconductor structure at said second face and (b) adjacent to said first insulating region in said trenches, said anode electrode electrically connecting together said plurality of trenches.

12. The method of claim 11, further comprising providing a cathode electrode on said first face of said semiconductor structure.

13. The method of claim 11, wherein said step of forming said semiconductor structure comprises providing a semiconductor substrate, said semiconductor substrate corresponding to said cathode region;

and growing an epitaxial semiconductor layer on said substrate, said epitaxial layer corresponding to said drift region.

14. The method of claim 11, wherein said step of forming said trenches comprises the steps of forming a patterned masking layer over the second face of the semiconductor structure etching said trenches through said masking layer.

15. The method of claim 11 wherein said step of forming said anode electrode comprises the step of depositing polysilicon over the first insulating layer.

16. The method of claim 14 wherein said step of forming said anode electrode comprises the step of depositing polysilicon over the first insulating layer.

17. The method of claim 11, wherein said trenches are formed such that they extend into said cathode region.

18. The method of claim 11 wherein said first insulating region comprises an oxide.

19. The method of claim 18 wherein said first insulating region comprises silicon dioxide.

20. The method of claim 11, wherein said semiconductor is silicon.

21. The method of claim 11, wherein said first conductivity type is n-type conductivity.

22. The method of claim 11, wherein said trench extends into said cathode region.

23. The method of claim 11, wherein said anode electrode is polysilicon.

24. The method of claim 23, wherein said polysilicon substantially fills said trenches.

25. The method of claim 11, wherein said second insulating region is a LOCOS region.

26. The method of claim 11, wherein said semiconductor structure includes a substrate and further comprising the step of growing an epitaxial semiconductor layer thereon.