Method and system for detecting an arc condition
First Claim
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1. An apparatus comprising:
- a comparator having an input connected to a reference voltage and another input connected to a power source to a test probe for contacting a semiconductor wafer;
a latch having an input connected to an output of said comparator;
enabling means for enabling said latch only in connection with a move of said wafer with respect to said probe; and
signaling means for signaling an arc condition if said output of said latch indicates that said output of said comparator was triggered while said latch is enabled.
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Abstract
A method and apparatus for detecting an arc condition in a semiconductor test system is disclosed. While probes in a semiconductor test system are being moved into or out of contact with a semiconductor wafer, the voltage level of power supplied to selected ones of the probes is monitored. If the voltage level of the power exceeds a level that could cause an arc between the probes and the semiconductor wafer while the wafer is being moved, an indication is generated that an arc condition has been detected.
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Citations
21 Claims
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1. An apparatus comprising:
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a comparator having an input connected to a reference voltage and another input connected to a power source to a test probe for contacting a semiconductor wafer;
a latch having an input connected to an output of said comparator;
enabling means for enabling said latch only in connection with a move of said wafer with respect to said probe; and
signaling means for signaling an arc condition if said output of said latch indicates that said output of said comparator was triggered while said latch is enabled. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 21)
a plurality of said comparators, each having an input connected to said reference voltage and another input connected to a power source to one of a plurality of said test probes; and
a plurality of said latches, each having an input connected to an output of one of said comparators.
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8. The apparatus of claim 1, wherein said another of said inputs of said comparator is indirectly connected to said power source to said test probe.
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9. The apparatus of claim 8, wherein said another of said inputs of said comparator is capacitively connected to said power source to said test probe.
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10. The apparatus of claim 1, wherein
said test probe is disposed on a probe card assembly, and said comparator and said latch are disposed on a substrate that is pluggable into a socket on said probe card assembly. -
21. The method of claim 1 further comprising:
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monitoring voltages on a plurality of power sources to a plurality of said probes; and
if at least one of said voltages exceeds a predetermined threshold during said move of said stage, signaling an arc condition.
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11. An apparatus for testing a semiconductor wafer, said apparatus comprising:
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moving means for moving said wafer into and out of contact with probes of a probe card assembly;
monitoring means for monitoring a voltage level of power supplied to one of said probes;
signaling means for signaling an arc condition if said voltage exceeds a predetermined threshold during a move of said wafer. - View Dependent Claims (12)
said monitoring means further monitors voltage levels of power supplied to a plurality of said probes; and
said signaling means further signals an arc condition if said voltage of power supplied to at least one of said probes exceeds said predetermined threshold.
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13. A method for use in a system for testing a semiconductor wafer, said system comprising a stage for moving said wafer into and out of contact with a plurality of probes, said method comprising:
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monitoring a voltage on a power source to one of said probes; and
if said voltage exceeds a predetermined threshold during a move of said stage, signaling an arc condition. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
receiving an indication that a move of said stage is to take place; and
enabling said output of said result in response to said indication that a move of said stage is to take place.
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17. The method of claim 16, wherein said enabling further comprises:
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receiving an indication that said move has been completed; and
disabling said output of said result in response to said indication that said move has been completed.
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18. The method of claim 13, wherein said signaling an arc condition comprises activating an indicator.
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19. The method of claim 13, wherein said signaling an arc condition comprises lighting a light.
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20. The method of claim 13, wherein said signaling an arc condition comprises sending a message.
Specification