Spectroscopic ellipsometry analysis of object coatings during deposition
First Claim
Patent Images
1. A method of monitoring the results of material deposition onto objects comprising the steps of:
- a) providing a material deposition system including means for causing a beam of electromagnetic radiation to interact with and reflect from a surface of an object placed there within, then enter a detector;
b) placing a plurality of objects onto which material is to be deposited into said material deposition system, including at least one test object having a surface which is other than substantially flat;
c) optionally causing said at least one test object to rotate about at least one axis;
d) causing the material deposition system to deposit material onto the objects including said at least one test object; and
e) causing electromagnetic radiation to interact with and reflect from the other than substantially flat surface of said test object, and enter the detector.
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Abstract
Disclosed is methodology for determination of parameters which characterize parameters such as thickness, color or quality of films deposited onto objects of arbitrary shapes, utilizing spectroscopic ellipsometry applied to standard shaped objects.
12 Citations
19 Claims
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1. A method of monitoring the results of material deposition onto objects comprising the steps of:
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a) providing a material deposition system including means for causing a beam of electromagnetic radiation to interact with and reflect from a surface of an object placed there within, then enter a detector;
b) placing a plurality of objects onto which material is to be deposited into said material deposition system, including at least one test object having a surface which is other than substantially flat;
c) optionally causing said at least one test object to rotate about at least one axis;
d) causing the material deposition system to deposit material onto the objects including said at least one test object; and
e) causing electromagnetic radiation to interact with and reflect from the other than substantially flat surface of said test object, and enter the detector. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
cylindrical; and
spherical.
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6. A method of monitoring the results of material deposition onto objects as in claim 2, in which the shape of at least one test object is selected from the group consisting of:
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cylindrical; and
spherical.
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7. A method of monitoring the results of material deposition onto objects as in claim 3, in which the shape of at least one test object is selected from the group consisting of:
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cylindrical; and
spherical.
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8. A method of monitoring the results of material deposition onto objects as in claim 1, in which the material deposited is appropriate to alter a selection from the group consisting of:
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color; and
mechanical;
properties.
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9. A method of monitoring the results of material deposition onto objects as in claim 2, in which the material deposited is appropriate to alter a selection from the group consisting of:
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color; and
mechanical;
properties.
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10. A method of monitoring the results of material deposition onto objects as in claim 3, in which the material deposited is appropriate to alter a selection from the group consisting of:
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color; and
mechanical;
properties.
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11. A method of monitoring the results of material deposition onto objects as in claim 4, in which the material deposited is appropriate to alter a selection from the group consisting of:
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color; and
mechanical;
properties.
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12. A method of monitoring the results of material deposition onto objects as in claim 1, in which the detector outputs information which is used to control the deposition process.
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13. A method of monitoring the results of material deposition onto objects as in claim 2, in which the detector outputs information which is used to control the deposition process.
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14. A method of monitoring the results of material deposition onto objects as in claim 1, in which causing electromagnetic radiation to interact with and reflect from a test object and enter the detector involves reflection from a surface which is other than substantially flat.
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15. A method of monitoring the results of material deposition onto objects as in claim 1, in which causing electromagnetic radiation to interact with and reflect from a test object and enter the detector involves use of an ellipsometer which is sequentially comprised of a source of electromagnetic radiation, a polarizer and optionally a compensator prior to said test object, and optionally a compensator, an analyzer and multiple element detector system positioned to intercept reflected electromagnetic radiation from said test object.
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16. A method of monitoring the results of material deposition onto objects comprising the steps of:
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a) providing a material deposition system including ellipsometer means for causing a beam of electromagnetic radiation to interact with and reflect from an other than substantially flat surface of an object placed there within, and thereafter enter a detector, said ellipsometer sequentially comprising a source of electromagnetic radiation, a polarizer, optionally a compensator, said other than substantially flat surface of said object, optionally a compensator, an analyzer and said detector which is comprised of multiple detector elements;
b) placing a plurality of objects with other than substantially flat surfaces onto which material is to be deposited into said material deposition system, including at least one test object;
c) optionally causing said at least one test object to rotate;
d) causing the material deposition system to deposit material onto the objects including said at least one test object; and
e) causing electromagnetic radiation to pass through said polarizer, interact with and reflect from an other than substantially flat surface of said at least one test object, pass through said analyzer and enter the detector. - View Dependent Claims (17, 18, 19)
color; and
mechanical;
properties.
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19. A method of monitoring the results of material deposition onto objects as in claim 16, in which the shape of at least one test object is selected from the group consisting of:
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cylindrical; and
spherical.
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Specification