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Spectroscopic ellipsometry analysis of object coatings during deposition

  • US 6,741,353 B1
  • Filed: 07/19/2002
  • Issued: 05/25/2004
  • Est. Priority Date: 07/20/2001
  • Status: Active Grant
First Claim
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1. A method of monitoring the results of material deposition onto objects comprising the steps of:

  • a) providing a material deposition system including means for causing a beam of electromagnetic radiation to interact with and reflect from a surface of an object placed there within, then enter a detector;

    b) placing a plurality of objects onto which material is to be deposited into said material deposition system, including at least one test object having a surface which is other than substantially flat;

    c) optionally causing said at least one test object to rotate about at least one axis;

    d) causing the material deposition system to deposit material onto the objects including said at least one test object; and

    e) causing electromagnetic radiation to interact with and reflect from the other than substantially flat surface of said test object, and enter the detector.

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