Capacitive humidity sensor
First Claim
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1. A capacitive humidity sensor comprising:
- a substrate (10);
a pair of opposed electrodes (31, 32), which are formed on a surface of the substrate (10) in the same plane in isolation from each other, wherein the electrodes are each comb-shaped and have teeth, and the teeth of the electrodes have a generally uniform width (L1) and are interdigitated, and the teeth of one of the electrodes are spaced apart from the teeth of the other electrode by a generally uniform separation distance (L2), and the separation distance (L2) is 5 μ
m when the width (L1) is less than 3 μ
m, and the separation distance (L2) is less than or equal to 5 μ
m when the width (L1) is greater than or equal to 3 μ
m; and
a humidity-sensitive film (50), the capacitance of which changes with humidity, wherein the humidity-sensitive film covers the electrodes and an area between the electrodes, and humidity is detected based on changes in the capacitance between the electrodes in response to the changes in the humidity of surrounding air.
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Abstract
A capacitive humidity sensor includes a pair of opposed electrodes on a substrate. A humidity-sensitive film covers the electrodes. The electrodes are comb-shaped and interdigitated. Humidity is detected based on the capacitance between the pair of electrodes, which changes with changes according to the humidity in the atmosphere. The uniform width of each tooth in the pair of electrodes is L1, and the uniform distance between a tooth of one of the electrodes and a tooth of the other electrode is L2. When L1 is less than 3 micrometers, L2 is 5 micrometers. When L1 is greater than or equal to 3 micrometers, L2 is less than or equal to 5 micrometers.
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Citations
1 Claim
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1. A capacitive humidity sensor comprising:
-
a substrate (10);
a pair of opposed electrodes (31, 32), which are formed on a surface of the substrate (10) in the same plane in isolation from each other, wherein the electrodes are each comb-shaped and have teeth, and the teeth of the electrodes have a generally uniform width (L1) and are interdigitated, and the teeth of one of the electrodes are spaced apart from the teeth of the other electrode by a generally uniform separation distance (L2), and the separation distance (L2) is 5 μ
m when the width (L1) is less than 3 μ
m, and the separation distance (L2) is less than or equal to 5 μ
m when the width (L1) is greater than or equal to 3 μ
m; and
a humidity-sensitive film (50), the capacitance of which changes with humidity, wherein the humidity-sensitive film covers the electrodes and an area between the electrodes, and humidity is detected based on changes in the capacitance between the electrodes in response to the changes in the humidity of surrounding air.
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Specification
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Current AssigneeDENSO Corporation
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Original AssigneeDENSO Corporation
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InventorsToyoda, Inao, Hamamoto, Kazuaki
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Primary Examiner(s)LARKIN, DANIEL SEAN
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Application NumberUS10/298,537Publication NumberTime in Patent Office560 DaysField of Search73/290.1, 73/290.5, 733/350.4, 361/286, 324/664US Class Current73/335.04CPC Class CodesG01N 19/10 Measuring moisture content,...
