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Angular velocity sensor

  • US 6,742,390 B2
  • Filed: 01/10/2003
  • Issued: 06/01/2004
  • Est. Priority Date: 01/10/2002
  • Status: Active Grant
First Claim
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1. An angular velocity sensor comprising:

  • a substrate;

    four mass members which face the substrate with a gap between each of the four mass members and the substrate, the four mass members being arranged along a Y-axis direction when X, Y, and Z axes that are perpendicular to each other are defined;

    retaining beams which connect the four mass members such that the four mass members can move in the X-axis direction;

    a fixing member disposed between the substrate and the retaining beams to fix the retaining beams to the substrate;

    a vibration generator which vibrates at least one of the four mass members in the X-axis direction so that each of the adjacent mass members vibrate in opposite phases; and

    an angular velocity detector which detects an angular velocity on the basis of displacements of two of the four mass members which are disposed symmetrically about a central position in the Y-axis direction when the two mass members disposed symmetrically about the central position move in at least one of the Y and Z-axis directions by the angular velocity.

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