Defect knowledge library

• US 6,744,266 B2
• Filed: 07/13/2001
• Issued: 06/01/2004
• Est. Priority Date: 10/02/2000
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Dor, Amos, Radzinski, Maya
• Primary Examiner(s): Niebling, John F.
• Assistant Examiner(s): STEVENSON, ANDRE C
• Application Number:
  US09/905,609
• Publication Number:
  US 20020072162A1
• Time in Patent Office: 1,054 Days
• Field of Search: 438/14, 364/578, 324/751
• US Class Current: 324/754.22
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

A method and associated apparatus for creating a defect knowledge library containing case study information of wafer defects on semiconductor wafers. The method comprises creating a database entry that contains a case study of a specific defect including defect information that comprises one or more defect images and storing the database entry for subsequent access. The database entries are stored on a server and are accessible by a plurality of clients.

Claims

1. A method of creating a defect knowledge library comprising:

creating a database entry comprising a case study of a specific defect including defect information that comprises one or more defect images; and

storing the database entry for subsequent access.

2. The method of claim 1, wherein said database entry is stored in a server.

3. The method of claim 2, further comprising:

supplying information for said case study to said server from at least one client.

4. The method of claim 1, wherein the step of creating the case history comprises:

selecting defect information from at least one metrology tool.

5. The method of claim 4 wherein the metrology tool comprises a scanning electron microscope.

6. The method of claim 1 wherein the step of creating the case study comprises:

providing a cause of the specific defect; and

storing the cause within said database entry.

7. The method of claim 6 wherein said database entry is stored in a server that is coupled to at least one client and the cause is provided by the at least one client.

8. The method of claim 6 wherein the step of creating the case study further comprises:

providing a solution to the cause of the specific defect; and

storing the solution within said database entry.

9. The method of claim 8 wherein said database entry is stored in a server that is coupled to at least one client and the solution is provided by the at least one client.

10. The method of claim 1 where said database entry comprises a classification code for said specific defect.

11. The method of claim 1 wherein said creating the case study step comprises:

entering defect information using a data organization template.

12. The method of claim 1 wherein said creating the case study step comprises:

selecting said one or more defect images from an image gallery.

13. A method of creating a defect knowledge library that is stored in a server and accessible from a plurality of clients comprising:

gathering defect information, causes of one or more defects in said defect information and solutions to mitigating the one or more defects at one or more of said clients;

coupling the defect information, causes and solutions to the server;

organizing the defect information, causes and solutions in a plurality of database entries; and

enabling database entries created by a first client to be accessed by a second client.

14. The method of claim 13 wherein aid enabling step comprises:

restricting access by said second client to sensitive information within said database entries of said first client.

15. The method of claim 13 further comprising:

remotely editing the defect information, causes and solutions stored on the server using a client.

16. The method of claim 15 wherein the editing step further comprises:

establishing security authorization levels to restrict editing privileges of the plurality of clients.

17. The method of claim 13 wherein the defect information comprises at least one image of the defect.

18. The method of claim 13 further comprising:

accessing the server from the plurality of clients via a browser interface.

19. The method of claim 13 wherein the plurality of clients are coupled to the server via the Internet, a local area network or a wide area network.

20. The method of claim 13 wherein the defect information, causes and solutions form a plurality of case studies for specific defects.

21. The method of claim 20 wherein said plurality of case studies are searchable by the clients.

22. A defect knowledge library comprising:

a client tier, supported by a plurality of clients, for providing remote access to a defect knowledge library database;

a middle tier, supported by a server, for providing database access control for each client that is coupled to the client tier; and

a data tier comprising the defect knowledge library database that is accessible by each client in the plurality of clients via the middle tier.