Pressure sensor with electrically conductive spring bodies for connecting and fixing connector case and pads
First Claim
1. A pressure sensor comprising:
- a housing having a pressure introduction hole;
a pressure sensing element composed of a semiconductor element having piezoresistance effect;
a holder to which said pressure sensing element is fixed;
a connector case;
a pressure sensor body creating a reference pressure chamber with said pressure sensing element and said holder bonded in an airtight manner;
a circuit board having electrode pads mounted on the holder of said pressure sensor body; and
electrically conductive spring bodies having elasticity for connecting connectors fixed to said connector case to said electrode pads.
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Accused Products
Abstract
A pressure sensor 1′ comprising a housing 10′ having a pressure introduction hole 12, a pressure sensing element 22 composed of a semiconductor element having piezoresistance effect, a holder 30 having fixed thereto the pressure sensing element 22, a guide member 98, a seal member 99 and a connector case 70, the pressure sensor element 22 and holder 30 joined in airtight manner to create a reference pressure chamber 72. On the holder 30 of the pressure sensor body is mounted a circuit board 40 having electrode pads, the electrode pads connected to connectors 80 fixed to the connector case 70 via conductive spring bodies 50. The guide member 98 supports holder 30, and in the opening 100 of the guide member 98 is placed the seal member 99.
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Citations
11 Claims
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1. A pressure sensor comprising:
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a housing having a pressure introduction hole;
a pressure sensing element composed of a semiconductor element having piezoresistance effect;
a holder to which said pressure sensing element is fixed;
a connector case;
a pressure sensor body creating a reference pressure chamber with said pressure sensing element and said holder bonded in an airtight manner;
a circuit board having electrode pads mounted on the holder of said pressure sensor body; and
electrically conductive spring bodies having elasticity for connecting connectors fixed to said connector case to said electrode pads. - View Dependent Claims (2, 3, 4, 5, 10, 11)
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6. A pressure sensor comprising:
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a housing having a pressure introduction hole;
a pressure sensing element composed of a semiconductor element having piezoresistance effect;
a holder to which said pressure sensing element is fixed;
a connector case;
a pressure sensor body creating a reference pressure chamber with said pressure sensing element and said holder bonded in an airtight manner;
a circuit board having electrode pads mounted on the holder of said pressure sensor body;
electrically conductive spring bodies having elasticity for connecting connectors fixed to said connector case to said electrode pads; and
a seal member mounted between said pressure sensing element and said housing, the size of said seal member determined so as to adjust the load received by said pressure sensing element. - View Dependent Claims (7, 8, 9)
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Specification