Shelf module adapted to store substrate carriers

• US 6,745,908 B2
• Filed: 06/30/2001
• Issued: 06/08/2004
• Est. Priority Date: 06/30/2001
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Elliott, Martin R.
• Primary Examiner(s): Novosad, Jennifer E.
• Application Number:
  US09/895,838
• Publication Number:
  US 20030000898A1
• Time in Patent Office: 1,074 Days
• Field of Search: 211/90.02, 211/187, 211/186, 211/41.18, 211/26, 211/26.2, 211/90.01, 211/90-3-, 211/134, 211/153, 211/190, 211/87.01, 211/40, 312/265.1, 312/265.6, 312/223.2, 312/223.1, 361/683, 361/829, 361/724, 361/807, 361/810, 361/730, 403/408.1, 403/187, 403/188, 403/230, 403/256, 403/257, 414/416.08, 414/939-941, 414/935
• US Class Current: 211/90.04
• CPC Class Codes: H01L 21/67769 Storage means

Abstract

In a first aspect, a shelf module is adapted to store a plurality of substrate carriers. The shelf module includes (1) a plate; and (2) a plurality of shelves attached to the plate at respective elevations, each of the shelves being adapted to store a respective substrate carrier. Also provided are (1) an upper attachment mechanism adapted to attach an upper portion of the plate to a frame of a storage location; and (2) a lower attachment mechanism adapted to attach a lower portion of the plate to the frame of the storage location. At least one of the upper attachment mechanism and the lower attachment mechanism is adjustable so as to allow the plurality of shelves attached to the plate to be aligned to a reference as a unit.

Claims

1. A shelf module adapted to store a plurality of substrate carriers, comprising:

a plate;

a plurality of shelves attached to the plate at respective elevations, each of the shelves being adapted to store a respective substrate carrier;

an upper attachment mechanism located at an upper portion of the plate and adapted to attach the upper portion of the plate to a frame of a storage location; and

a lower attachment mechanism located at a lower portion of the plate and adapted to attach the lower portion of the plate to the frame of the storage location;

wherein one of the upper attachment mechanism and the lower attachment mechanism includes a portion of a gimbal joint, the portion of the gimbal joint being mounted on the plate and being adapted to mate with a corresponding gimbal joint portion provided on the frame of the storage location.

2. The shelf module of claim 1, wherein the other of the upper and lower attachment mechanisms is configured to provide pitch and yaw adjustments to the plate relative to the frame.

3. The shelf module of claim 1, wherein the lower attachment mechanism includes a pair of male spherical posts adapted to adjust the position of the plate relative to the frame of the storage location along respective axes corresponding to the pair of male spherical posts.

4. The shelf module of claim 3, wherein the lower attachment mechanism includes an adjustment housing adapted to be secured to the frame of the storage location and having a pair of apertures for respectively receiving the male spherical posts of the lower attachment mechanism.

5. A shelf module adapted to store a plurality of substrate carriers, comprising:

a plate;

a plurality of shelves attached to the plate at respective elevations, each of the shelves being adapted to store a respective substrate carrier;

an upper attachment mechanism located at an upper portion of the plate and adapted to attach the upper portion of the plate to a frame of a storage location; and

a lower attachment mechanism located at a lower portion of the plate and adapted to attach the lower portion of the plate to the frame of the storage location;

wherein at least one of the upper attachment mechanism and the lower attachment mechanism is adjustable so as to allow the plurality of shelves attached to the plate to be aligned to a reference as a unit; and

wherein one of the upper and lower attachment mechanisms includes a portion of a gimbal joint, the portion of the gimbal joint being mounted on the plate and being adapted to mate with a corresponding gimbal joint portion provided on the frame of the storage location, and the other of the upper and lower attachment mechanisms is configured to provide pitch and yaw adjustments to the plate relative to the frame.

6. A substrate carrier storage location comprising:

a frame; and

a shelf module adapted to store a plurality of substrate carriers, comprising;

a plate secured to the frame; and

a plurality of shelves attached to the plate at respective elevations, each of the shelves being adapted to store a respective substrate carrier;

an upper attachment mechanism located at an upper portion of the plate and adapted to attach the upper portion of the plate to the frame; and

a lower attachment mechanism located at a lower portion of the plate and adapted to attach the lower portion of the plate to the frame;

wherein at least one of the upper attachment mechanism and the lower attachment mechanism is adjustable so as to allow the plurality of shelves attached to the plate to be aligned as a unit; and

wherein one of the upper and lower attachment mechanisms includes a gimbal joint composed of a male gimbal joint portion attached to one of the plate and the frame and a female gimbal joint portion mating with the male gimbal joint portion and attached to the other of the plate and the frame, and the other of the upper and lower attachment mechanisms is configured to provide pitch and yaw adjustments to the plate relative to the frame.

7. A shelf module adapted to store a plurality of substrate carriers, comprising:

a plate;

a plurality of shelves attached to the plate at respective elevations, each of the shelves being adapted to store a respective substrate carrier;

an upper attachment mechanism located at an upper portion of the plate and adapted to attach the upper portion of the plate to a frame of a storage location; and

a lower attachment mechanism located at a lower portion of the plate and adapted to attach the lower portion of the plate to the frame of the storage location;

wherein;

at least one of the upper attachment mechanism and the lower attachment mechanism is adjustable so as to allow the plurality of shelves attached to the plate to be aligned to a reference as a unit; and

the upper attachment mechanism includes a male spherical post which extends downwardly from the upper portion of the plate and has a convex spherical surface adapted to rest on a female spherical seat attached to the frame of the storage location.

8. The shelf module of claim 7, wherein the upper attachment mechanism further includes a mechanism adapted to secure the male spherical post to a block in which the spherical seat is formed.

9. The shelf module of claim 7, wherein the lower attachment mechanism includes a pair of male spherical posts adapted to adjust the position of the plate relative to the frame of the storage location along respective axes corresponding to the pair of male spherical posts.

10. The shelf module of claim 9, wherein the lower attachment mechanism further includes an adjustment housing adapted to be secured to the frame of the storage location and having a pair of apertures for respectively receiving the male spherical posts of the lower attachment mechanism.

11. The shelf module of claim 10, wherein the lower attachment mechanism further includes a pair of subplates adapted to be secured to the adjustment housing and a plurality of fasteners adapted to secure a respective one of the subplates to the adjustment housing adjacent each of the apertures of the adjustment housing.

12. The shelf module of claim 11, wherein each of the subplates has an aperture adapted to receive a respective one of the male spherical posts of the lower attachment mechanism.

13. The shelf module of claim 12, wherein the lower attachment mechanism further includes a pair of female spherical washers, each adapted to rest in a respective pocket formed in the plate and to be in contact with a convex spherical surface of a respective one of the male spherical posts of the lower attachment mechanism.

14. The shelf module of claim 13, wherein the male spherical posts are adapted to be secured to the plate and wherein the lower attachment mechanism further includes a pair of mechanisms each adapted to secure a respective one of the male spherical posts of the lower attachment mechanism to the plate.

15. A shelf module adapted to store a plurality of substrate carriers, comprising:

a plate;

a plurality of shelves attached to the plate at respective elevations, each of the shelves being adapted to store a respective substrate carrier;

an upper attachment mechanism located at an upper portion of the plate and adapted to attach the upper portion of the plate to a frame of a storage location; and

a lower attachment mechanism located at a lower portion of the plate and adapted to attach the lower portion of the plate to the frame of the storage location;

wherein;

at least one of the upper attachment mechanism and the lower attachment mechanism is adjustable so as to allow the plurality of shelves attached to the plate to be aligned to a reference as a unit; and

the lower attachment mechanism includes;

a pair of male spherical posts adapted to adjust the position of the plate relative to the frame of the storage location along respective axes corresponding to the pair of male spherical posts;

an adjustment housing adapted to be secured to the frame of the storage location and having a pair of apertures for respectively receiving the male spherical posts of the lower attachment mechanism; and

a pair of subplates and a plurality of fasteners adapted to secure a respective one of the subplates to the adjustment housing adjacent each of the apertures of the adjustment housing.

16. The shelf module of claim 15, wherein each of the subplates has an aperture adapted to receive a respective one of the male spherical posts of the lower attachment mechanism.

17. The shelf module of claim 16, wherein the lower attachment mechanism further includes a pair of female spherical washers, each adapted to rest in a respective pocket formed in the plate and in contact with a convex spherical surface of a respective one of the male spherical posts of the lower attachment mechanism.

18. The shelf module of claim 17, wherein the male spherical posts are adapted to be secured to the plate and wherein the lower attachment mechanism further includes a pair of mechanisms each adapted to secure a respective one of the male spherical posts of the lower attachment mechanism to the plate.

19. A storage location adapted to store a plurality of substrate carriers, comprising:

a frame;

a plate secured to the frame;

a plurality of shelves attached to the plate at respective elevations, each of the shelves being adapted to store a respective substrate carrier;

an upper attachment mechanism located at an upper portion of the plate and adapted to attach the upper portion of the plate to the frame; and

a lower attachment mechanism located at a lower portion of the plate and adapted to attach the lower portion of the plate to the frame;

wherein one of the upper attachment mechanism and the lower attachment mechanism includes a gimbal joint composed of a male gimbal joint portion attached to one of the plate and the frame and a female gimbal joint portion mating with the male gimbal joint portion and attached to the other of the plate and the frame.

20. The storage location of claim 19, wherein the other of the upper and lower attachment mechanisms is configured to provide pitch and yaw adjustments to the plate relative to the frame.

21. The storage location of claim 19, wherein the other of the upper and lower attachment mechanisms allows the plurality of shelves attached to the plate to be aligned to a reference as a unit.

22. A storage location adapted to store a plurality of substrate carriers, comprising:

a frame;

a plate secured to the frame;

a plurality of shelves attached to the plate at respective elevations, each of the shelves being adapted to store a respective substrate carrier;

an upper attachment mechanism located at an upper portion of the plate and adapted to attach the upper portion of the plate to the frame; and

a lower attachment mechanism located at a lower portion of the plate and adapted to attach the lower portion of the plate to the frame;

wherein;

at least one of the upper attachment mechanism and lower attachment mechanism is adjustable so as to allow the plurality of shelves attached to the plate to be aligned to a reference as a unit; and

the upper attachment mechanism includes a male spherical post in a vertical orientation and the lower attachment mechanism includes a pair of male spherical posts arranged substantially in parallel in a horizontal orientation.

23. The storage location of claim 22, wherein the lower attachment mechanism further includes an adjustment housing which couples the pair of male spherical posts of the lower attachment mechanism to the frame.

24. A method of assembling a storage location adapted to store a plurality of substrate carriers, comprising the method steps of:

providing a shelf module comprising a plate adapted to support a plurality of shelves, each shelf adapted to store a respective substrate carrier;

suspending the plate from a frame of the storage location via an upper attachment mechanism located at an upper portion of the plate;

attaching the suspended plate to the frame at a lower portion of the plate via a lower attachment mechanism located at the lower portion of the plate; and

adjusting a position of the plate relative to the frame by rotating at least one spherical post that is included in one of the upper attachment mechanism and the lower attachment mechanism.

25. The method of claim 24, wherein the adjusting step comprises adjusting a pitch and yaw of the plate relative to the frame.

26. The method of claim 24, wherein the adjusting step includes adjusting a pair of adjustment members at the lower portion of the plate.

27. The method of claim 24, further comprising attaching a plurality of shelves to the plate.

28. The method of claim 27, wherein the plurality of shelves are attached to the plate before, while or after the plate is aligned to the reference.

29. The method of claim 24, wherein the adjusting step is performed so as to align the plate to a reference so that the shelves supported on the plate are aligned to the reference as a unit.

30. The method of claim 29, wherein the reference is a docking station adjacent to the frame.

31. The method of claim 24, further comprising:

locking the shelf module into position.

32. A shelf module adapted to store a plurality of substrate carriers, comprising:

a plate;

a plurality of shelves attached to the plate at respective elevations, each of the shelves being adapted to store a respective substrate carrier; and

a gimbal joint portion secured to the plate and adapted to mate with a complementary gimbal joint portion provided on a frame of a storage location.

33. The shelf module of claim 32, wherein the gimbal joint portion secured to the plate has a downwardly oriented male spherical surface.

34. The shelf module of claim 32, wherein the gimbal joint portion secured to the plate has a downwardly oriented female spherical surface.

35. The shelf module of claim 32, wherein the gimbal joint portion secured to the plate is secured to an upper portion of the plate.

36. The shelf module of claim 32, wherein the gimbal joint portion secured to the plate is secured to a lower portion of the plate.

37. The shelf module of claim 32, further comprising an attachment mechanism coupled to the plate and configured to provide pitch and yaw adjustments to the plate relative to a frame.

38. A method of assembling a storage location adapted to store a plurality of substrate carriers, comprising the method steps of:

providing a plate adapted to support a plurality of shelves, each shelf adapted to store a respective substrate carrier;

supporting the plate on a frame that also supports a robot; and

connecting the plate to the frame via a first attachment mechanism located at an upper portion of the plate and via a second attachment mechanism located at a lower portion of the frame so as to allow adjustment of a position of the plate relative to the frame and thereby align the plurality of shelves, when attached to the plate, to the robot as a unit.

39. The method of claim 38, further comprising:

attaching a plurality of shelves to the plate.

40. The method of claim 39, wherein the attaching step is performed before the plate is supported on the frame.

41. The method of claim 39, wherein the attaching step is performed at a time when the plate is supported on the frame.

42. The method of claim 38, further comprising:

bringing a gimbal joint portion provided on the plate into contact with a gimbal joint portion provided on the frame to form a gimbal joint between the plate and the frame.

43. A storage location adapted to store a plurality of substrate carriers, comprising:

a frame;

a robot supported on the frame and adapted to transport a substrate carrier;

a plate supported on the frame and adjustably connected to the frame via a first attachment mechanism located at an upper portion of the plate and via a second attachment mechanism located at a lower portion of the frame; and

a plurality of shelves attached to the plate at respective elevations, each of the shelves being adapted to store a respective substrate carrier;

wherein the plate is adjustably connected to the frame so as to allow the plurality of shelves attached to the plate to be aligned to the robot as a unit.

44. The storage location of claim 43, wherein the shelves extend away from the plate in a direction parallel to a horizontal direction of movement of the robot.

45. A storage location adapted to store a plurality of substrate carriers, comprising:

a frame;

a robot supported on the frame and adapted to transport a substrate carrier;

a plate supported on the frame and adjustably connected to the frame via a first attachment mechanism located at an upper portion of the plate and via a second attachment mechanism located at a lower portion of the frame; and

at least one shelf attached to the plate and adapted to store a substrate carrier;

wherein the plate is adjustably connected to the frame so as to allow each shelf of the at least one shelf to be aligned to the robot as a unit.