Post-fuse blow corrosion prevention structure for copper fuses

• US 6,746,947 B2
• Filed: 09/25/2002
• Issued: 06/08/2004
• Est. Priority Date: 09/01/1999
• Status: Expired due to Term

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Edelstein, Daniel C., Voldman, Steven H., Daubenspeck, Timothy H., Stamper, Anthony K., Motsiff, William T., Geffken, Robert M.
• Primary Examiner(s): GUERRERO, MARIA F
• Application Number:
  US10/254,277
• Publication Number:
  US 20030116820A1
• Time in Patent Office: 622 Days
• Field of Search: 438/14, 438/17, 438/128, 438/132, 438/215, 438/281, 438/333, 438/382, 438/467, 438/598, 438/601, 438/622, 438/687, 257/529
• US Class Current: 438/601
• CPC Class Codes: H01L 21/76807 for dual damascene structures
• CPC Class Codes: H01L 21/76843 formed in openings in a dielectric
• CPC Class Codes: H01L 21/76877 Filling of holes, grooves or trenches, e.g. vias, with conductive material
• CPC Class Codes: H01L 23/5258 the change of state resulting from the use of an external beam, e.g. laser beam or ion beam
• CPC Class Codes: H01L 28/20 Resistors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/3011 Impedance

Abstract

A structure and method of fabricating a semiconductor corrosion resistant metal fuse line including a refractory liner which can also act as a resistor is disclosed. Fabrication is accomplished using damascene process. The metal structure can be formed on a semiconductor substrate including a first portion including a first layer and a second layer, the first layer having higher resistivity than the second layer, the second layer having horizontal and vertical surfaces that are in contact with the first layer in the first portion, and a second portion coupled to the first portion, the second portion being comprised of the first layer, the first layer not being in contact with the horizontal and vertical surfaces of the second layer in the second portion. The metal structure can be used as a corrosion resistant fuse. The metal structure can also be used as a resistive element. The high voltage tolerant resistor structure allows for usage in mixed-voltage, and mixed signal and analog/digital applications. The resistor element has low capacitance, low skin effect, high linearity, a high melting temperature, and a high critical current to failure. The resistor structure can be formed on the walls of a dielectric trough. The structure can be applied to circuit applications such as an ESD network, an RC-coupled MOSFET, a resistor ballasted MOSFET and others. The resistors can be in series with the MOSFET or other structures.

Claims

1. A method for forming a refractory element barrier to fuse corrosion regrowth, comprising the steps of:

(1) lithographically patterning, etching, depositing a liner, depositing copper and using chemical mechanical polishing (CMP) to form a damascene structure comprising a last metal (LM) wiring level and fuse;

(2) applying a resist and lithographically patterning one or more openings over said fuse;

(3) removing exposed copper using an etchant that is selective to said exposed copper wherein said etchant does not attack said liner;

(4) removing said resist and depositing final passivation films, and completing definition of terminal metal contact holes in final passivation films; and

(5) electrically testing and laser deleting said fuse, wherein said fuse is comprised of at least one of a segment of liner and a segment of copper LM line isolated on at least one side by a “

liner only”

structure.

2. The method according to claim 1, wherein said liner comprises refractory material films.

3. The method according to claim 1, wherein said refractory films comprise at least one of Ta, α

-Ta, TaN, and TaN/Ta.

4. The method according to claim 1, wherein said etchant comprises at least one of aqueous ammonium persulfate and a mixture of dilute sulfuric acid with hydrogen peroxide.

5. A method for forming a refractory element, comprising the steps of:

(1) lithographically patterning, etching, depositing a refractory liner including at least one of Ta, α

-Ta, TaN, and TaN/Ta, depositing copper and chemically mechanically polishing(CMP) to form a damascene structure comprising a last metal (LM) wiring level and fuses;

(2) depositing a barrier nitride layer, over said damascene structure preceded by pretreating with a standard plasma;

(3) patterning, opening up a fuse window, etching said barrier nitride, etching said copper wherein an etchant is selective to said cooper; and

(4) depositing a final passivation oxide/nitride layer, then processing through standard terminal via and laser blowing said fuse wherein said fuse is comprised of at least one of a segment of refractory liner and a segment of copper LM line isolated on at least one side by a “

liner only”

structure.