Electronic techniques for analyte detection

• US 6,746,960 B2
• Filed: 01/18/2002
• Issued: 06/08/2004
• Est. Priority Date: 04/09/1998
• Status: Expired due to Fees

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Goodman, Rodney M.
• Primary Examiner(s): Warden, Jill
• Assistant Examiner(s): SINES, BRIAN J
• Application Number:
  US10/054,550
• Publication Number:
  US 20020098119A1
• Time in Patent Office: 872 Days
• Field of Search: 422/50, 422/83, 422/68.1, 422/88, 422/98, 422/82.01, 422/82.02, 438/689, 438/584, 438/699, 427/58, 427/123, 204/192.1, 204/192.14, 204/192.15, 204/192.17, 204/192.22, 204/192.23, 204/192.25, 204/192.35, 204/192.36, 204/192.37
• US Class Current: 438/689
• CPC Class Codes: G01N 27/126 comprising organic polymers
• CPC Class Codes: G01N 27/128 Microapparatus
• CPC Class Codes: G01N 27/221 by investigating the dielectric properties using microwaves G01N22/00; measuring loss factors or dielectric constants per se G01R27/26
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array

Abstract

Techniques are used to detect and identify analytes. Techniques are used to fabricate and manufacture sensors to detect analytes. An analyte (1810) is sensed by sensors (1820) that output electrical signals in response to the analyte. The electrical signals are preprocessed (1830) by filtering and amplification. In an embodiment, this preprocessing includes adapting the sensor and electronics to the environment in which the analyte exists. The electrical signals are further processed (1840) to classify and identify the analyte, which may be by a neural network.

Claims

1. A method of forming an analyte detection sensor on a substrate, the method comprising:

forming a first conductive layer over the substrate;

forming a first insulating layer over the first conductive layer;

patterning and etching a sensor well in the first conductive layer and in the first insulating layer; and

forming a sensor material in the sensor well, wherein the sensor material has an electrical property that changes in the presence of an analyte, wherein the first insulating layer is not removed during the formation of the analyte detection sensor.

2. The method of claim 1 further comprising:

forming a second conductive layer over the first insulating layer, wherein the second conductive layer is not removed during the formation of the analyte detection sensor.

3. The method of claim 2 further comprising:

forming a passivation layer over the second conductive layer.

4. The method of claim 1 wherein:

the sensor material comprises regions of a nonconductive organic material and a conductive material.

5. The method of claim 1 wherein forming a sensor material in the sensor well further comprises:

applying a fluid to the sensor wall using a jet system.

6. The method of claim 1 wherein the first conductive layer is a metal layer.

7. The method of claim 3 wherein the first conductive layer is formed on a second insulating layer, and the second insulating layer is formed on a polysilicon layer.

8. The method of claim 7 wherein the first and the second insulating layers are oxide layers;

and the first and the second conductive layers are metal layers.

9. The method of claim 7 wherein the passivation layer is a glass layer.

10. The method of claim 1 wherein the first conductive layer is coupled to preprocessing circuitry including an autozeroing amplifier that adapts out low frequency components of output signals from the sensor.

11. A method of forming an array of analyte detection sensors on a substrate, the method comprising:

forming a first conductive layer over the substrate;

forming a first insulating layer over the first conductive layer;

patterning and etching sensor wells in the first conductive layer and in the first insulating layer; and

applying compositions of sensor material in each of the sensor wells to form the sensors, wherein the sensor material has an electrical property that changes in the presence of an analyte, wherein the first insulating layer is not removed during the formation of the analyte detection sensor.

12. The method of claim 11 further comprising:

forming a second conductive layer over the first insulating layer, wherein the second conductive layer is not removed during the formation of the analyte detection sensor.

13. The method of claim 12 further comprising:

forming a passivation layer over the second conductive layer.

14. The method of claim 11 wherein:

the compositions of sensor material in each sensor well comprise regions of nonconductive organic material and conductive material.

15. The method of claim 11 wherein:

the sensor material in each sensor well baying a different composition than the sensor material in every other one of the sensor wells.

16. The method of claim 11 wherein:

the sensor material in a subset of the sensor wells having the same composition of sensor material.