Method to form a self-aligned CMOS inverter using vertical device integration
First Claim
1. A closely-spaced, vertical NMOS and PMOS transistor pair comprising:
- a substrate comprising silicon implanted oxide wherein an oxide layer is sandwiched between underlying and overlying silicon layers;
a vertical NMOS transistor in said overlying silicon layer, said vertical NMOS transistor comprising;
a drain overlying said oxide layer;
a channel region overlying a part of said drain;
a source overlying said channel region;
a gate trench that exposes a top surface of said drain and a vertical surface of said channel region; and
a gate comprising a polysilicon sidewall spacer adjacent to said vertical surface of said channel region with a gate oxide layer therebetween; and
a vertical PMOS transistor in said overlying silicon layer, said PMOS transistor comprising;
a drain overlying said oxide layer wherein said drain contacts said vertical NMOS transistor drain;
a channel region overlying a part of said drain;
a source overlying said channel region; and
a gate trench that exposes a top surface of said drain and a vertical surface of said channel region;
a gate comprising a polysilicon sidewall spacer adjacent to said vertical surface of said channel region with a gate oxide layer therebetween;
an interlevel dielectric layer overlying said closely spaced, vertical NMOS and PMOS transistor pair, wherein said interlevel dielectric layer has openings that expose said PMOS source and drain and said NMOS source and drain;
a metal silicide layer in said PMOS source and drain and said NMOS source and drain; and
a patterned metal layer overlying said interlevel dielectric layer and said metal silicide layer.
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Abstract
A method to form a closely-spaced, vertical NMOS and PMOS transistor pair in an integrated circuit device is achieved. A substrate comprise silicon implanted oxide (SIMOX) wherein an oxide layer is sandwiched between underlying and overlying silicon layers. Ions are selectively implanted into a first part of the overlying silicon layer to form a drain, channel region, and source for an NMOS transistor. The drain is formed directly overlying the oxide layer, the channel region is formed overlying the drain, and the source is formed overlying the channel region. Ions are selectively implanted into a second part of the overlying silicon layer to form a drain, channel region, and source for a PMOS transistor. The drain is formed directly overlying the oxide layer, the PMOS channel region is formed overlying the drain, and the source is formed overlying the channel region. The PMOS transistor drain is in contact with said NMOS transistor drain. A gate trench is etched through the NMOS and PMOS sources and channel regions. The gate trench terminates at the NMOS and PMOS drains and exposes the sidewalls of the NMOS and PMOS channel regions. A gate oxide layer is formed overlying the NMOS and PMOS channel regions and lining the gate trench. A polysilicon layer is deposited and etched back to form polysilicon sidewalls and to thereby form gates for the closely-spaced, vertical NMOS and PMOS transistor pair.
103 Citations
11 Claims
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1. A closely-spaced, vertical NMOS and PMOS transistor pair comprising:
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a substrate comprising silicon implanted oxide wherein an oxide layer is sandwiched between underlying and overlying silicon layers;
a vertical NMOS transistor in said overlying silicon layer, said vertical NMOS transistor comprising;
a drain overlying said oxide layer;
a channel region overlying a part of said drain;
a source overlying said channel region;
a gate trench that exposes a top surface of said drain and a vertical surface of said channel region; and
a gate comprising a polysilicon sidewall spacer adjacent to said vertical surface of said channel region with a gate oxide layer therebetween; and
a vertical PMOS transistor in said overlying silicon layer, said PMOS transistor comprising;
a drain overlying said oxide layer wherein said drain contacts said vertical NMOS transistor drain;
a channel region overlying a part of said drain;
a source overlying said channel region; and
a gate trench that exposes a top surface of said drain and a vertical surface of said channel region;
a gate comprising a polysilicon sidewall spacer adjacent to said vertical surface of said channel region with a gate oxide layer therebetween;
an interlevel dielectric layer overlying said closely spaced, vertical NMOS and PMOS transistor pair, wherein said interlevel dielectric layer has openings that expose said PMOS source and drain and said NMOS source and drain;
a metal silicide layer in said PMOS source and drain and said NMOS source and drain; and
a patterned metal layer overlying said interlevel dielectric layer and said metal silicide layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification
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- Resources
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Current AssigneeChartered Semiconductor Manufacturing Incorporated (Mamoura Diversified Global Holding PJSC)
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Original AssigneeChartered Semiconductor Manufacturing Incorporated (Mamoura Diversified Global Holding PJSC)
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InventorsLeung, Ying Keung, Ramachandramurthy, Yelehanka, Chan, Lap, Pan, Yang, Quek, Elgin, Lee, James Yong Meng, Zheng, Jia Zhen, Sundaresan, Ravi
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Primary Examiner(s)Flynn, Nathan J.
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Assistant Examiner(s)Mondt, Johannes P.
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Application NumberUS10/242,483Publication NumberTime in Patent Office635 DaysField of Search257/328-332, 257/350-351, 257/E21.632US Class Current257/330CPC Class CodesH01L 21/823885 with a particular manufactu...H01L 21/84 the substrate being other t...H01L 27/1203 the substrate comprising an...H01L 29/66666 Vertical transistors H01L29...
