Apparatus for adjusting the resonance frequency of a microelectromechanical (MEMS) resonator using tensile/compressive strain and applications therefor

• US 6,747,389 B2
• Filed: 06/11/2001
• Issued: 06/08/2004
• Est. Priority Date: 06/11/2001
• Status: Expired due to Term

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Berlin, Andy, Ma, Qing
• Primary Examiner(s): Dougherty, Thomas M.
• Assistant Examiner(s): ADDISON, KAREN B
• Application Number:
  US09/883,036
• Publication Number:
  US 20020190603A1
• Time in Patent Office: 1,093 Days
• Field of Search: 310/328, 310/309-310, 333/186
• US Class Current: 310/309
• CPC Class Codes: H03H 9/24 Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive

Abstract

A method for varying the resonance frequency of a resonator beam is disclosed. The method comprises first manufacturing a resonator beam having a first end and a second end. The resonator beam is suspended above a substrate by the first end and the second end. At least one end of the resonator beam is connected to an actuator that applies an actuation force to the resonator beam to apply tensile strain or compressive strain onto said resonator beam. By varying the amount of actuation force, the resonance frequency of the resonator beam may be tuned. Additionally, by varying the magnitude and direction of the actuation force, the resonator beam may be used as a temperature sensor or a temperature compensated resonator.

Claims

1. A method comprising:

providing a resonator beam having a first end and a second end, the resonator beam suspended above a substrate by the first end and the second end;

providing a lever arm, the lever arm being connected to a pivot and to the first end of the resonator beam; and

using an actuator to apply an actuation force to the lever arm to apply strain onto the resonator beam, wherein the positions on the lever arm where the first end of the resonator beam is connected and where the actuation force is applied are on the same side of the pivot.

2. The method of claim 1 wherein the actuator is a comb structure.

3. The method of claim 1 wherein the actuator is a ratchet wheel.

4. The method of claim 1 wherein the actuator is a ratchet wedge.

5. The method of claim 1 wherein the actuator is a large coefficient of thermal expansion heater.

6. The method of claim 1 wherein the actuator is a ratcheting shaft.

7. The method of claim 1 wherein the actuator is an expansion bar that provides the actuation force proportional to a temperature.

8. The method of claim 1 wherein the actuation force supplied by the actuator is proportional to a temperature.

9. The method of claim 8 wherein a tensile strain is applied to the resonator beam as the temperature increases.

10. The method of claim 8 wherein a compressive strain is applied to the resonator beam as the temperature increases.

11. The method of claim 2 wherein the comb structure exerts force on a curved beam that in turn transmits force onto the lever arm.

12. The method of claim 1 further comprising connecting the second end of the resonator beam to a second lever arm and using the second lever arm in concert with the first lever arm to apply a strain to the resonator beam.

13. The method of claim 12 the actuator applies the actuation force to both the lever arm and the second lever arm.

14. The method of claim 12 wherein the lever arm and the second lever arm rotate about the pivot to proportionally modify the amount of strain applied to the resonator beam.

15. A method comprising:

providing a resonator beam having a first end and a second end, the resonator beam suspended above a substrate by the first end and the second end;

applying an actuation force to at least one of the first end and the second end, the actuation force creating a temperature-dependent compressive strain in the resonator beam.

16. The method of claim 15 wherein the actuation force is proportional to a temperature.

17. The method of claim 15 wherein applying the actuation force comprises using an actuator, wherein the actuator is a large coefficient of thermal expansion heater.

18. The method of claim 15 wherein applying the actuation force comprises using an actuator, wherein the actuator is an expansion bar that provides the actuation force proportional to a temperature.

19. The method of claim 15 wherein a compressive strain is applied to the resonator beam as the temperature increases.

20. A method comprising:

providing a resonator beam having a first end and a second end, the resonator beam suspended above a substrate by the first end and the second end;

providing a lever arm, the lover arm being connected to a pivot and to the first end of the resonator beam; and

using an actuator to apply an actuation force to the lever arm to apply strain onto the resonator beam, wherein the positions on the lever arm where the first end of the resonator beam is connected and where the actuation force is applied are on opposite sides of the pivot.

21. The method of claim 20 wherein the actuator is a comb structure.

22. The method of claim 20 wherein the actuator is a ratchet wheel.

23. The method of claim 20 wherein the actuator is a ratchet wedge.

24. The method of claim 20 wherein the actuator is a large coefficient of thermal expansion heater.

25. The method of claim 20 wherein the actuator is a ratcheting shaft.

26. The method of claim 20 wherein the actuator is an expansion bar that provides the actuation force proportional to a temperature.

27. The method of claim 20 wherein the actuation force supplied by the actuator is proportional to a temperature.

28. The method of claim 20 wherein a tensile strain is applied to the resonator beam as the temperature increases.

29. The method of claim 20 wherein a compressive strain is applied to the resonator beam as the temperature increases.

30. The method of claim 21 wherein the comb structure exerts force on a curved beam that in turn transmits force onto the lever arm.

31. The method of claim 20 furthher comprising connecting the second end of the resonator beam to a second lever arm and using the second lever arm in concert with the first lever arm to apply a strain to the resonator beam.

32. The method of claim 31 wherein the actuator applies the actuation force to both the lever arm and the second lever arm.

33. The method of claim 31 wherein the lever arm and the second lever arm rotate about the pivot to proportionally modify the amount of strain applied to the resonator beam.