Micromirror actuator

• US 6,747,390 B2
• Filed: 11/19/2001
• Issued: 06/08/2004
• Est. Priority Date: 12/05/2000
• Status: Expired due to Fees

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Park, Jun-hyub, Park, Hae-seok
• Primary Examiner(s): TAMAI, KARL I
• Application Number:
  US09/988,314
• Publication Number:
  US 20020067104A1
• Time in Patent Office: 932 Days
• Field of Search: 310/309, 359/291, 359/221, 359/224, 359/223, 359/225, 385/18, 385/13, 385/16, 335/78, 335/84
• US Class Current: 310/309
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 2203/0154 Torsion bars
• CPC Class Codes: B81B 2203/0346 Grooves not provided for in B81B2203/033 - B81B2203/0338
• CPC Class Codes: B81B 2203/0384 sloped profile
• CPC Class Codes: B81B 2203/04 Electrodes
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/0043 Increasing angular deflection
• CPC Class Codes: B81B 3/0054 For holding or placing an element in a given position
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A micromirror actuator is provided. The micromirror actuator includes a substrate, posts formed to a predetermined height on the substrate and spaced a predetermined distance apart, a torsion bar fixed to the posts, a mirror coupled to the torsion bar, and a groove including an inclined contact surface and formed in the substrate. Here, the inclined contact surface contacts the lower bottom surface of the mirror when the mirror is rotated. The micromirror actuator can be applied to a structure in which a plurality of micromirror actuators are arrayed side-by-side and is capable of precisely and stably maintaining the rotation angle of a mirror, particularly, stably maintaining the inclination angle of the mirror irrespective of an increase in the strength of a magnetic field.

Claims

1. A micromirror actuator comprising:

a substrate;

posts formed to a predetermined height on the substrate and spaced a predetermined distance apart;

a torsion bar fixed to the posts;

a mirror coupled to the torsion bar;

a groove including an inclined contact surface and formed in the substrate, the inclined contact surface contacting a lower, bottom surface of the mirror when the mirror is rotated; and

a magnet for generating forces to drive the mirror taking advantage of an external magnetic field, the magnet formed at one end of the mirror relative to said torsion bar corresponding to the inclined contact surface and a reflective surface on the other end of the mirror, such that when said mirror contacts said inclined contact surface at said one end, said reflective surface reflects light traveling parallel to a plane of said substrate of said other end.

2. The micromirror actuator of claim 1 further comprising;

a clamping electrode for generating electrostatic forces to clamp the mirror, the clamping electrode formed on the inclined contact surface of the groove.

3. The micromirror actuator of claim 1, wherein the torsion bar is formed on the same plane as the mirror and the mirror is formed to rotate about the torsion bar.

4. The micromirror actuator of claim 2, wherein the torsion bar is formed on the same plane as the mirror and the mirror is formed to rotate about the torsion bar.

5. The micromirror actuator of claim 4, wherein a plurality of magnets are arranged on the end of the mirror corresponding to the inclined contact surface.

6. The micromirror actuator of claim 1, wherein a plurality of magnets are arranged on the end of the mirror corresponding to the inclined contact surface.

7. The micromirror actuator of claim 2, wherein the torsion bar is formed on the same plane as the mirror and the mirror is formed to rotate about the torsion bar.

8. The micromirror actuator of claim 2, wherein a plurality of magnets are arranged on the end of the mirror corresponding to the inclined contact surface.