Vibrator, vibratory gyroscope, and vibration adjusting method

• US 6,747,393 B2
• Filed: 06/21/2002
• Issued: 06/08/2004
• Est. Priority Date: 11/26/1996
• Status: Expired due to Term

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: NGK Insulators Limited
• Inventors: Soma, Takao, Kikuchi, Takayuki, Osugi, Yukihisa, Gouji, Shosaku
• Primary Examiner(s): BUDD, MARK OSBORNE
• Application Number:
  US10/177,863
• Publication Number:
  US 20030084723A1
• Time in Patent Office: 718 Days
• Field of Search: 310/316.01, 310/371, 310/330-332, 310/357-359, 310/366-368, 310/370, 735/05
• US Class Current: 310/321
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719

Abstract

A vibrator for a vibratory gyroscope including a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part. The base part and bending-vibration piece are formed to extend substantially in a specified plane. At the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, wherein the resonant arms project from the fixing part. With this arrangement, it is possible to detect a turning angular rate with high accuracy.

Claims

1. A vibrator comprising:

a fixing part arranged in a plane;

a substantially straight base part arranged in said plane and having a first end attached to said fixing part and a second end opposed thereto in the longitudinal direction of said base part;

at least one bending vibration piece arranged in said plane and having a first end attached to a portion of said base part other than said first end of said base part, and a second end distal from said first end in a longitudinal direction of said bending vibration piece, the longitudinal direction of said bending vibration piece intersecting the longitudinal direction of said base part;

at least one pair of resonant arms arranged within said plane and extending from said fixing part, wherein said base part and said bending vibration piece both vibrate in a bending vibration mode substantially within said plane using said first ends thereof, respectively, as their fulcrum, wherein said resonant arms resonate with vibration of said base part, and wherein one of a through hole and a hollow portion is formed through said base part; and

excitation means for exciting vibration of one of said base part and said bending vibration piece in said plane.

2. A vibratory gyroscope for detecting a turning angular rate about an axis of rotation, said vibratory gyroscope comprising:

a vibrator comprising (i) a fixing part arranged in a plane, (ii) a substantially straight base part arranged in said plane and having a first end attached to said fixing part and a second end opposed thereto in the longitudinal direction of said base part, and (iii) at least one bending vibration piece arranged in said plane and having a first end attached to a portion of said base part other than said first end of said base part, and a second end distal from said first end in a longitudinal direction of said bending vibration piece, the longitudinal direction of said bending vibration piece intersecting the longitudinal direction of said base part, wherein said base part and said bending vibration piece both vibrate in a bending vibration mode substantially within said plane using said first ends thereof, respectively, as their fulcrum, and wherein one of a through hole and a hollow portion is formed through at least one of said base part and said bending vibration piece;

excitation means for exciting vibration of one of said base part and said bending vibration piece in said plane; and

detection means for detecting bending vibration of said vibrator generated by Coriolis force within said vibrator as a result of said vibrator being rotated around said axis of rotation;

wherein one of said excitation means and said detection means is positioned on said bending vibration piece.

3. The vibratory gyroscope according to claim 2, wherein said through hole and/or said hollow portion has a lateral width that increases as said through hole and/or said hollow portion extends along the length of said at least one of said base part and said bending vibration piece.

4. The vibratory gyroscope according to claim 2, wherein said through hole and/or said hollow portion has a shape selected from the group consisting of rectangular, triangular, diamond and hexagonal.

5. The vibratory gyroscope according to claim 2, wherein said through hole and/or said hollow portion is formed through said base part, and a lateral width thereof increases as said through hole and/or said hollow portion extends toward said second end of said base part.

6. The vibratory gyroscope according to claim 2, wherein said through hole and/or said hollow portion is formed through said bending vibration piece, and a lateral width thereof increases as said through hole and/or said hollow portion extends toward said second end of said bending vibration piece.

7. A vibrator comprising:

a fixing part arranged in a plane;

a substantially straight base part arranged in said plane and having a first end attached to said fixing part and a second end opposed thereto in the longitudinal direction of said base part;

at least one bending vibration piece arranged in said plane and having a first end attached to a portion of said base part other than said first end of said base part, and a second end distal from said first end in a longitudinal direction of said bending vibration piece, the longitudinal direction of said bending vibration piece intersecting the longitudinal direction of said base part;

wherein said base part and said bending vibration piece both vibrate in a bending vibration mode substantially within said plane using said first ends thereof, respectively, as their fulcrum, and wherein one of a through hole and a hollow portion is formed through at least one of said base part and said bending vibration piece; and

excitation means for exciting vibration of one of said base part and said bending vibration piece in said plane.

8. The vibrator according to claim 7, wherein said through hole and/or said hollow portion has a lateral width that increases as said through hole and/or said hollow portion extends along the length of said at least one of said base part and said bending vibration piece.

9. The vibrator according to claim 7, wherein said through hole and/or said hollow portion has a shape selected from the group consisting of rectangular, triangular, diamond and hexagonal.

10. The vibrator according to claim 7, wherein said through hole and/or said hollow portion is formed through said base part, and a lateral width thereof increases as said through hole and/or said hollow portion extends toward said second end of said base part.

11. The vibrator according to claim 7, wherein said through hole and/or said hollow portion is formed through said bending vibration piece, and a lateral width thereof increases as said through hole and/or said hollow portion extends toward said second end of said bending vibration piece.

12. A vibratory gyroscope for detecting a turning angular rate about an axis of rotation, said vibratory gyroscope comprising:

a vibrator comprising (i) a fixing part arranged in a plane, (ii) a substantially straight base part arranged in said plane and having a first end attached to said fixing part and a second end opposed thereto in the longitudinal direction of said base part, and (iii) at least one bending vibration piece arranged in said plane and having a first end attached to a portion of said base part other than said first end of said base part, and a second end distal from said first end in a longitudinal direction of said bending vibration piece, the longitudinal direction of said bending vibration piece intersecting the longitudinal direction of said base part, wherein said base part and said bending vibration piece both vibrate in a bending vibration mode substantially within said plane using said first ends thereof, respectively, as their fulcrum, and wherein one of a through hole and a hollow portion is formed through said base part;

excitation means for exciting vibration of one of said base part and said bending vibration piece in said plane; and

detection means for detecting bending vibration of said vibrator generated by Coriolis force within said vibrator as a result of said vibrator being rotated around said axis of rotation;

wherein one of said excitation means and said detection means is positioned on said bending vibration piece.

13. The vibratory gyroscope according to claim 12, wherein said through hole and/or said hollow portion has a lateral width that increases as said through hole and/or said hollow portion extends along the length of said base part.

14. The vibratory gyroscope according to claim 12, wherein said through hole and/or said hollow portion has a shape selected from the group consisting of rectangular, triangular, diamond and hexagonal.

15. A vibrator comprising:

a fixing part arranged in a plane;

a substantially straight base part arranged in said plane and having a first end attached to said fixing part and a second end opposed thereto in the longitudinal direction of said base part;

at least one bending vibration piece arranged in said plane and having a first end attached to a portion of said base part other than said first end of said base part, and a second end distal from said first end in a longitudinal direction of said bending vibration piece, the longitudinal direction of said bending vibration piece intersecting the longitudinal direction of said base part;

wherein said base part and said bending vibration piece both vibrate in a bending vibration mode substantially within said plane using said first ends thereof, respectively, as their fulcrum, and wherein one of a through hole and a hollow portion is formed through said base part; and

excitation means for exciting vibration of one of said base part and said bending vibration piece in said plane.

16. The vibrator according to claim 15, wherein said through hole and/or said hollow portion has a lateral width that increases as said through hole and/or said hollow portion extends along the length of said base part.

17. The vibrator according to claim 15, wherein said through hole and/or said hollow portion has a shape selected from the group consisting of rectangular, triangular, diamond and hexagonal.