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Pattern generator

  • US 6,747,783 B1
  • Filed: 08/29/2000
  • Issued: 06/08/2004
  • Est. Priority Date: 03/02/1998
  • Status: Expired due to Term
First Claim
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1. An apparatus for creating a pattern on a workpiece sensitive to light radiation, comprisinga source for emitting light in the wavelength range from EUV to IR, a spatial light modulator (SLM) having a multitude of modulating elements (pixels), adapted to being illuminated by said radiation a projection system creating an image of the modulator on the workpiece, an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting said pattern to modulator signals, and feeding said signals to the modulator, a precision mechanical system for positioning at least one of said workpiece and said projection system relative to each other, an electronic control system controlling the position of the workpiece, the feeding of the signals to the modulator and the intensity of the radiation, so that said pattern is printed on the workpiece, where the drive signals and the modulating elements are adapted to create a number of modulation states larger than two.

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