Compliant mechanism and method of forming same
First Claim
Patent Images
1. A movable compliant mechanism, comprising:
- a support member comprising a top and a bottom;
an elastomer member attached to the bottom of the support member; and
an island member movably supported by the elastomer member.
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Abstract
The present invention provides a compliant mechanism that can be used to make a variety of devices, such as tunable optical devices, that are more reliable, more cost effective, and/or exhibit better performance than prior art devices. In one embodiment, the complaint mechanism includes an island that is suspended from a frame using a compliant member that is attached to the frame and the island. Individual actuators and/or sensor elements may be placed on the island, so that each island may be individually actuated or sensed.
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Citations
23 Claims
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1. A movable compliant mechanism, comprising:
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a support member comprising a top and a bottom;
an elastomer member attached to the bottom of the support member; and
an island member movably supported by the elastomer member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An actuated mechanism, comprising:
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a movable mechanism, comprising;
a support member comprising a top and a bottom, an elastomer member attached to the bottom of the support member, and an island member movably supported by the elastomer member; and
an actuator configured and positioned to move the island member in response to a control signal. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
at least one electrode positioned on the elastomer member below the island member; and
at least one electrode disposed on an actuator support.
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16. The actuated mechanism of claim 15, wherein at least one of the electrodes comprises a three electrode structure.
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17. The actuated mechanism of claim 12, wherein the island member and the support member comprise the same material.
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18. The actuated mechanism of claim 12, wherein the island member and the support member are fabricated from a common wafer.
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19. The actuated mechanism of claim 12, wherein a top surface of the island member is substantially level with the top of the support member when the island member is at a neutral position.
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20. The actuated mechanism of claim 12, wherein the actuator is positioned exclusively on a side of the elastomer member opposite the island member.
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21. The actuated mechanism of claim 12, wherein the island member comprises voids.
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22. The actuated mechanism of claim 12, wherein the island member and the support member are separated by a trench.
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23. The actuated mechanism of claim 22, wherein a thickness of the elastomer member is greater than or substantially equal to a width of the trench.
Specification