Compliant mechanism and method of forming same

• US 6,747,784 B2
• Filed: 04/22/2002
• Issued: 06/08/2004
• Est. Priority Date: 03/20/2000
• Status: Expired due to Fees

• Current Assignee: Vividon, Inc. (BurstPoint Networks, Inc.), NP Photonics Incorporated
• Original Assignee: NP Photonics Incorporated
• Inventors: Little, Michael, Eaton, William P., Tyrie, Thomas S.
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): Dinh, Jack
• Application Number:
  US10/126,972
• Publication Number:
  US 20020196522A1
• Time in Patent Office: 778 Days
• Field of Search: 359/214, 359/224, 359/290, 359/291, 359/298, 359/811, 359/813, 359/814, 359/824, 359/198, 359/292, 257/254, 356/454, 310/36
• US Class Current: 359/290
• CPC Class Codes: A61K 38/00 Medicinal preparations containing peptides peptides containing beta-lactam rings A61K31/00; cyclic dipeptides not having in their molecule any other peptide link than those which form their ring, e.g. piperazine-2,5-diones, A61K31/00; ergot alkaloids of the cyclic peptide type A61K31/48; containing macromolecular compounds having statistically distributed amino acid units A61K31/74; medicinal preparations containing antigens or antibodies A61K39/00; medicinal preparations characterised by the non-active ingredients, e.g. peptides as drug carriers, A61K47/00
• CPC Class Codes: A61K 39/08 Clostridium, e.g. Clostridium tetani
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 2203/053 Translation according to an axis perpendicular to the substrate
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: C07K 14/33 from Clostridium (G)
• CPC Class Codes: C07K 2319/00 Fusion polypeptide
• CPC Class Codes: G02B 2006/12104 Mirror; Reflectors or the like
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/3572 Magnetic force magnetic forces controlling reflecting elements in general G02B26/085; magneto-optic devices G02F1/09
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3656 the additional structures being micropositioning, with microactuating elements for fine adjustment, or restricting movement, into two dimensions, e.g. cantilevers, beams, tongues or bridges with associated MEMs
• CPC Class Codes: G02B 6/3692 with surface micromachining involving etching, e.g. wet or dry etching steps surface micromachining involving subtractive techniques B81C1/00055
• CPC Class Codes: G02B 6/4226 Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount

Abstract

The present invention provides a compliant mechanism that can be used to make a variety of devices, such as tunable optical devices, that are more reliable, more cost effective, and/or exhibit better performance than prior art devices. In one embodiment, the complaint mechanism includes an island that is suspended from a frame using a compliant member that is attached to the frame and the island. Individual actuators and/or sensor elements may be placed on the island, so that each island may be individually actuated or sensed.

Claims

1. A movable compliant mechanism, comprising:

a support member comprising a top and a bottom;

an elastomer member attached to the bottom of the support member; and

an island member movably supported by the elastomer member.

2. The apparatus of claim 1, wherein the support member comprises a frame.

3. The apparatus of claim 2, wherein the frame surrounds the island member.

4. The apparatus of claim 1, wherein the top of the island member is at least partially reflective.

5. The apparatus of claim 1, wherein the elastomer member has a Young'"'"'s modulus that is smaller than a Young'"'"'s modulus of the island member.

6. The apparatus of claim 1, wherein the elastomer member exhibits substantially linear-elastic behavior over an operational frequency range of the apparatus.

7. The apparatus of claim 1, wherein the island member and the support member comprise the same material.

8. The apparatus of claim 1, wherein the island member and the support member are fabricated from a common wafer.

9. The apparatus of claim 1, wherein a top surface of the island member is substantially level with the top of the support member when the island member is at a neutral position.

10. The apparatus of claim 1, wherein the island member and the support member are separated by a trench.

11. The apparatus of claim 10, wherein a thickness of the elastomer member is greater than or substantially equal to a width of the trench.

12. An actuated mechanism, comprising:

a movable mechanism, comprising;

a support member comprising a top and a bottom,

an elastomer member attached to the bottom of the support member, and an island member movably supported by the elastomer member; and

an actuator configured and positioned to move the island member in response to a control signal.

13. The actuated mechanism of claim 12, wherein the actuator comprises an electrostatic actuator.

14. The actuated mechanism of claim 12, wherein at least a portion of the actuator is attached to the island member.

15. The actuated mechanism of claim 12, wherein the actuator comprises:

at least one electrode positioned on the elastomer member below the island member; and

at least one electrode disposed on an actuator support.

16. The actuated mechanism of claim 15, wherein at least one of the electrodes comprises a three electrode structure.

17. The actuated mechanism of claim 12, wherein the island member and the support member comprise the same material.

18. The actuated mechanism of claim 12, wherein the island member and the support member are fabricated from a common wafer.

19. The actuated mechanism of claim 12, wherein a top surface of the island member is substantially level with the top of the support member when the island member is at a neutral position.

20. The actuated mechanism of claim 12, wherein the actuator is positioned exclusively on a side of the elastomer member opposite the island member.

21. The actuated mechanism of claim 12, wherein the island member comprises voids.

22. The actuated mechanism of claim 12, wherein the island member and the support member are separated by a trench.

23. The actuated mechanism of claim 22, wherein a thickness of the elastomer member is greater than or substantially equal to a width of the trench.