Optical deflector and optical deflector array
First Claim
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1. An optical deflector comprising:
- a movable plate having a reflection surface and an opposite surface opposite to the reflection surface;
a support member including a confronting substrate which confronts the opposite surface of the movable plate;
at least one elastic member having two ends, one end being supported by the support member and the other end being attached to the movable plate, and extending in a first direction extending from the one end to the other end; and
driving member for driving the movable plate to rock with respect to the support member with using a second direction normal to the first direction as a rock axis, the confronting substrate having a contact area which defines a maximum deflection angle of the movable plate and restricts the rocking movement of the movable plate within the maximum deflection angle, and the contact area having a first and a second deflection position with which the movable plate is brought into contact when the driving member applies a driving force to the movable plate.
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Abstract
Movable plates which are supported by an opposite substrate and which include a reflection surface are attached between elastic members in a longitudinal direction as a first direction. The movable plates are rocked with respect to the opposite substrate using a second direction crossing at right angles to the first direction as a rock axis. The opposite substrate is disposed opposite to the surface opposite to the reflection surface of the movable plates, and a first convex portion which contacts the movable plates in a maximum deflection angle of the movable plate is disposed in the opposite substrate. The movable plates are driven by the elastic members so that the plates can rock into first and second deflection positions to contact the first convex portion.
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Citations
18 Claims
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1. An optical deflector comprising:
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a movable plate having a reflection surface and an opposite surface opposite to the reflection surface;
a support member including a confronting substrate which confronts the opposite surface of the movable plate;
at least one elastic member having two ends, one end being supported by the support member and the other end being attached to the movable plate, and extending in a first direction extending from the one end to the other end; and
driving member for driving the movable plate to rock with respect to the support member with using a second direction normal to the first direction as a rock axis, the confronting substrate having a contact area which defines a maximum deflection angle of the movable plate and restricts the rocking movement of the movable plate within the maximum deflection angle, and the contact area having a first and a second deflection position with which the movable plate is brought into contact when the driving member applies a driving force to the movable plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
the first to third contact portions are formed of insulating materials, and further comprising two electrodes insulated from the opposite substrate via the first contact portion are disposed on the opposite substrate. -
8. The optical deflector according to claim 3, wherein the movable plate has a conductive surface in at least one surface,
the first to third contact portions are formed of insulating materials, and further comprising two electrodes insulated from the opposite substrate via the first contact portion are disposed on the opposite substrate. -
9. An optical deflector array wherein a plurality of optical deflectors according to claim 1 are arranged in the second direction parallel to the rock axis.
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10. An optical deflector array wherein a plurality of optical deflectors according to claim 2 are arranged in the second direction parallel to the rock axis.
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11. An optical deflector array wherein a plurality of optical deflectors according to claim 3 are arranged in the second direction parallel to the rock axis.
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12. An optical deflector array wherein a plurality of optical deflectors according to claim 4 are arranged in the second direction parallel to the rock axis.
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13. An optical deflector array wherein a plurality of optical deflectors according to claim 5 are arranged in the second direction parallel to the rock axis.
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14. An optical deflector array wherein a plurality of optical deflectors according to claim 6 are arranged in the second direction parallel to the rock axis.
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15. An optical deflector array wherein a plurality of optical deflectors according to claim 7 are arranged in the second direction parallel to the rock axis.
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16. An optical deflector array wherein a plurality of optical deflectors according to claim 8 are arranged in the second direction parallel to the rock axis.
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17. The optical deflector array according to claim 15, wherein the conductive surfaces of the movable plates are all electrically conductive.
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18. The optical deflector array according to claim 16, wherein the conductive surfaces of the movable plates are all electrically conductive.
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Specification
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Current AssigneeOlympus Corporation
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Original AssigneeOlympus Corporation
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InventorsMurakami, Kenzi, Miyajima, Hiroshi
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Primary Examiner(s)Mack, Ricky
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Application NumberUS10/317,548Publication NumberTime in Patent Office544 DaysField of Search359/290, 359/291, 359/295US Class Current359/291CPC Class CodesG02B 26/0841 the reflecting element bein...
