Optical interference type panel and the manufacturing method thereof

• US 6,747,800 B1
• Filed: 03/13/2003
• Issued: 06/08/2004
• Est. Priority Date: 12/27/2002
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Prime View International Company Limited (E Ink Holdings Incorporated)
• Inventors: Lin, Wen-Jian
• Primary Examiner(s): Dang, Hung Xuan
• Assistant Examiner(s): TRA, TUYEN Q
• Application Number:
  US10/249,061
• Publication Number:
  US 20040125455A1
• Time in Patent Office: 453 Days
• Field of Search: 359/237, 359/245, 359/585, 359/586, 359/588, 359/589, 359/590
• US Class Current: 359/585
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A manufacturing method for optical interference type panel is provided. A patterned supporting layer is formed on a transparent substrate, and then a first electrode layer and an optical film are formed sequentially on the supporting layer and the transparent substrate. A sacrificial material layer is formed on the optical layer, and then, a backside exposure process is performed by using the supporting layer as a mask to pattern the sacrificial material layer. A portion of the patterned sacrificial material layer is removed to expose the optical film above the supporting layer to form a sacrificial layer, and then a second electrode layer is formed on the sacrificial layer between the adjacent supporting layers and portion of the optical film. Afterwards, the sacrificial layer is removed.

Claims

1. A manufacturing method for optical interference type panel, comprising:

forming a patterned supporting layer on a transparent substrate;

forming a first electrode layer on the transparent substrate and the supporting layer;

forming an optical film on the first electrode layer;

forming a sacrificial layer on the optical film between the adjacent supporting layers;

forming a second electrode layer on the sacrificial layer between the adjacent supporting layers and the portion of the optical layer; and

removing the sacrificial layer.

2. The manufacturing method for optical interference type panel of claim 1, wherein the supporting layer is made of an opaque material.

3. The manufacturing method for optical interference type panel of claim 2, wherein the supporting layer is made of either an insulation material or a group composed of the high-molecular resin.

4. The manufacturing method for optical interference type panel of claim 1, wherein the sacrificial layer is made of a photo resistant material.

5. The manufacturing method for optical interference type panel of claim 1, wherein a spin on coating method is used to form the sacrificial layer.

6. The manufacturing method for optical interference type panel of claim 1, wherein the sacrificial layer is below the optical film above the supporting layer.

7. The manufacturing method for optical interference type panel of claim 6, wherein after a sacrificial layer is formed on the optical film between the adjacent supporting layers, a slightly O₂ plasma etch for surface treatment is further performed onto the sacrificial layer and the optical film, so as to remove the sacrificial layer on the optical layer above the supporting layer.

8. The manufacturing method for optical interference type panel of claim 1, wherein the first electrode layer is made of a transparent material.

9. The manufacturing method for optical interference type panel of claim 1, wherein the optical film is formed by interleaving a plurality of high-dielectric-constant material layers and low-dielectric-constant material layers.

10. The manufacturing method for optical interference type panel of claim 1, wherein the method for forming the sacrificial layer comprises:

forming a sacrificial material layer on the optical film; and

removing a portion of the sacrificial material layer to expose the optical film above the supporting layer so as to form the sacrificial layer, wherein the sacrificial layer is below the optical layer above the supporting layer.

11. The manufacturing method for optical interference type panel of claim 10, wherein an etching method is used to remove the sacrificial material layer to expose the optical film above the supporting layer so as to form the sacrificial layer.

12. The manufacturing method for optical interference type panel of claim 11, wherein after a sacrificial material layer is formed on the optical film, and before the portion of the sacrificial material layer is removed to expose the optical film above the supporting layer so as to form the sacrificial layer, further comprises a backside exposure process to pattern the sacrificial material layer.

13. The manufacturing method for optical interference type panel of claim 1, wherein the second electrode layer is made of a metal material.

14. The manufacturing method for optical interference type panel of claim 1, wherein the method for removing the sacrificial layer comprises a release process.

15. An optical interference type panel, comprising:

a transparent substrate;

a supporting layer, located on the transparent substrate;

a first electrode, located on the transparent substrate and the supporting layers;

an optical film, located on the first electrode; and

a second electrode, wherein an edge of the second electrode is located on the portion of the optical film above the adjacent supporting layer.

16. The optical interference type panel of claim 15, wherein the supporting layer is made of an opaque material.

17. The optical interference type panel of claim 15, wherein the supporting layer is made of either an insulation material or a group composed of a high-molecular resin.

18. The optical interference type panel of claim 15, wherein the first electrode layer is made of a transparent material.

19. The optical interference type panel of claim 15, wherein the optical film is formed by interleaving a plurality of high-dielectric-constant material layers and low-dielectric-constant material layers.

20. The optical interference type panel of claim 15, wherein the second electrode layer is made of a metal material.