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Micromirror

  • US 6,749,308 B1
  • Filed: 03/03/2003
  • Issued: 06/15/2004
  • Est. Priority Date: 12/28/1999
  • Status: Active Grant
First Claim
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1. A micromirror, comprising:

  • at least one support body;

    at least two torsion beams arranged at least approximately in parallel to each other; and

    an at least largely cantilevered mirror surface displaceable from a rest position about at least one torsional axis, the mirror surface connected to the support body by the torsion beams;

    wherein the two torsion beams extend parallel to the torsional axis from one lateral edge of the mirror to the support body.

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