Miniature scanning confocal microscope

• US 6,749,346 B1
• Filed: 04/30/1998
• Issued: 06/15/2004
• Est. Priority Date: 11/07/1995
• Status: Expired due to Fees

• Current Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Original Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Inventors: Dickensheets, David L., Kino, Gordon S.
• Primary Examiner(s): Sanghavi, Hemang
• Application Number:
  US09/070,699
• Time in Patent Office: 2,238 Days
• Field of Search: 359/196-199, 359/212-215, 359/221, 359/223, 359/224, 359/226, 385/18, 385/19, 385/83, 385/49, 385/88-93
• US Class Current: 385/88
• CPC Class Codes: G02B 2006/12104 Mirror; Reflectors or the like
• CPC Class Codes: G02B 21/0028 specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
• CPC Class Codes: G02B 21/0048 scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
• CPC Class Codes: G02B 21/006 focusing arrangements; selection of the plane to be imaged
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/241 Light guide terminations
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841

Abstract

A scanning optical microscope which includes an optical fiber which serves as a point source of light and for collecting reflected light is disclosed. A lens for focusing the light from the optical fiber onto an image plane and for gathering light reflected form the image plane and focusing it into the optical fiber is also disclosed, together with a scanning mechanism for scanning the light to scan a field of view.

Claims

1. A hybrid optical steering system comprising:

a first substrate body defined by an upper surface and a lower surface and formed with at least one cavity including an upper cavity formed on the upper surface of the substrate body and a primary optical path for accommodating the passage of a light beam aligned in a predetermined orientation with the upper cavity;

a second substrate body defined by an upper surface and a lower surface, said second substrate body having a lower cavity formed on its upper surface, said lower cavity having a predetermined alignment with respect to the upper cavity;

a suspended bridge spanning the primary optical path at a juncture between the primary optical path and the upper cavity;

a beam steering assembly having a steerable element positioned substantially adjacent the upper cavity for controllably directing the light beam through at least a portion of the first substrate body; and

a hinge for flexibly anchoring the beam steering assembly to the suspended bridge wherein the beam steering assembly has at least one reflective surface and is rotated towards the upper cavity so that an impinging beam of light emanating from the primary optical path is controllable deflected in a direction generally from the upper cavity to the lower cavity and an impinging beam of light entering from the lower cavity is controllably deflected in a direction generally from the lower cavity to the upper cavity towards the primary optical path.

2. The optical apparatus according to claim 1 further comprising:

a secondary optical element for accommodating a beam of light disposed within the lower cavity of the second substrate body; and

means for aligning the secondary optical element within the lower cavity so that

(i) the secondary optical element is substantially centered in the lower cavity and

(ii) the optical axis of the secondary optical element is aligned at a predetermined angle with respect to the lower surface of the first substrate body.

3. The optical apparatus according to claim 2 wherein the secondary optical element is selected from the group consisting of optical fibers, refractive optical elements, reflective optical elements, phase optical elements, light detectors, beam splitters, lasers, light emitting diodes, incandescent light sources, fluorescent light sources, natural light sources, and plasma light sources.