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Fluid handling devices with diamond-like films

  • US 6,749,813 B1
  • Filed: 03/05/2000
  • Issued: 06/15/2004
  • Est. Priority Date: 03/05/2000
  • Status: Expired due to Term
First Claim
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1. A fluid handling device comprising a substrate and an optically transmissive diamond-like film disposed on at least a portion of the substrate, wherein the film comprises diamond-like glass comprising a dense random covalent system comprising on a hydrogen-free basis at least about 30 atomic percent carbon, at least about 25 atomic percent silicon, and less than or equal to about 45 atomic percent oxygen.

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