Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate

• US 6,750,413 B1
• Filed: 04/25/2003
• Issued: 06/15/2004
• Est. Priority Date: 04/25/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn, Dove, Lewis R
• Primary Examiner(s): Friedhofer, Michael A.
• Application Number:
  US10/423,316
• Time in Patent Office: 417 Days
• Field of Search: 200/182, 200/187-189, 200/209-219, 200/233-236, 310/328, 310/331, 310/348, 310/363, 335/4, 335/47, 335/78, 385/19
• US Class Current: 200/182
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 2061/006 Micromechanical thermal relay
• CPC Class Codes: H01H 29/28 with level of surface of contact liquid displaced by fluid pressure
• CPC Class Codes: H01H 61/02 wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively

Abstract

Channels and cavities in a LIMMS device are formed from a layer of thick film dielectric material deposited on a substrate, which layer is then covered with a thin cover plate of ceramic or perhaps glass. The layer of dielectric material may be patterned using established thick film techniques, and good dimensional control can be achieved. The dielectric layer is itself its own hermetic seal against the substrate, and readily lends itself to the formation of the additional hermetic seal needed between itself and the cover plate. Suitable thick film dielectric materials that may be deposited as a paste and subsequently cured include the KQ 150 and KQ 115 thick film dielectrics from Heraeus and the 4141A/D thick film compositions from DuPont.

Claims

1. An electrical switching assembly comprising:

a first non-conductive substrate having a surface;

a layer of dielectric material deposited upon the surface of the first non-conductive substrate and patterned to create heater cavities, a liquid metal channel and passages connecting the heater cavities to locations along the liquid metal channel;

a second non-conductive substrate having a surface;

a layer of adhesive deposited on the surface of the second non-conductive substrate and patterned to match the pattern of the layer of dielectric material; and

the surfaces of the first and second non-conducting substrates facing each other and being brought into contact through the intervening layer of dielectric material and the layer of adhesive.

2. An electrical switching assembly as in claim 1 wherein at least one of the first and second non-conductive substrates is of glass.

3. An electrical switching assembly as in claim 1 wherein at least one of the first and second non-conductive substrates is of ceramic.

4. An electrical switching assembly as in claim 1 further comprising conductive traces deposited upon the surface of the first non-conductive substrate and beneath the layer of dielectric material.

5. An electrical switching assembly as in claim 1 wherein the perimeter of the second non-conductive substrate lies within the perimeter of the layer of dielectric material and further comprising an hermetic seal formed around the perimeter of the second non-conductive and the layer of dielectric material.

6. An electrical switching assembly as in claim 5 wherein the hermetic seal is of solder.

7. An electrical switching assembly as in claim 1 wherein the hermetic seal is of glass frit.

8. An electrical switching assembly as in claim 1 wherein the layer of dielectric material is deposited with thick film techniques.