Surface mount package for a micromachined device

• US 6,750,521 B1
• Filed: 10/22/1999
• Issued: 06/15/2004
• Est. Priority Date: 10/22/1999
• Status: Expired due to Term

• Current Assignee: Google LLC (Alphabet Inc.)
• Original Assignee: Delphi Technologies, Inc. (BorgWarner Incorporated)
• Inventors: Sparks, Douglas Ray, Chilcott, Dan W., Borzabadi, Hamid Reza
• Primary Examiner(s): Flynn, Nathan J.
• Assistant Examiner(s): Quinto, Kevin
• Application Number:
  US09/422,723
• Time in Patent Office: 1,698 Days
• Field of Search: 215/414, 215/415, 215/416, 215/417, 215/418, 215/419, 215/420
• US Class Current: 257/414
• CPC Class Codes: B81B 7/007 Interconnections between the MEMS and external electrical signals
• CPC Class Codes: B81B 7/0074 3D packaging, i.e. encapsulation containing one or several MEMS devices arranged in planes non-parallel to the mounting board
• CPC Class Codes: H01L 2224/11 Manufacturing methods

Abstract

A semiconductor device and method by which a device chip with a micromachine is directly surface mounted to a circuit board. A capping chip is bonded to the device chip and encloses the micromachine. The capping chip has a first surface facing the device chip, an oppositely-disposed second surface, and electrical interconnects through the capping chip between the first and second surfaces. The electrical interconnects electrically communicate with runners on the device chip that are electrically connected to the micromachine, thereby providing a signal path from the micromachine to the exterior of the device. The capping chip further includes bond pads for electrical communication with the electrical interconnects. With the bond pads, the capping chip can be surface mounted to a circuit board by reflowing solder bumps formed on the bond pads. Depending on the placement of the bond pads on the capping chip, the semiconductor device can be mounted to the circuit board with the capping chip between the device chip and circuit board, or the semiconductor device can be mounted with one side of the device attached to the circuit board.

Claims

1. A semiconductor device comprising:

a device chip with a micromachine and at least one electrically-conductive runner to the micromachine;

a capping chip enclosing the micromachine on the device chip, the capping chip having a first surface facing the device chip, an oppositely-disposed second surface, and at least one electrical interconnect comprising a conductive via that extends through the capping chip from the first surface to the second surface, tile electrical interconnect electrically communicating with the runner on the device chip;

solder that has been reflowed to electrically connect the conductive via of the capping chip with the runner of the device chip;

a bond pad on the capping chip and electrically communicating with the electrical interconnect through the capping chip; and

solder on the bond pad of tile capping chip, the solder bonding the semiconductor device to a circuit board so that the capping chip is between the device chip and the circuit board.

2. A semiconductor device according to claim 1, wherein the capping chip is bonded to the device chip by solder.

3. A semiconductor device according to claim 1, further comprising a solder ring bonding the semiconductor device to the circuit board, wherein the solder on the bond pad of the capping chip is outside the solder ring at the second surface of the capping chip.

4. A semiconductor device according to claim 1, wherein the capping chip is bonded to the device chip by solder having a liquidus temperature, the semiconductor device further comprising a solder bump on the bond pad of the capping chip, the solder bump being formed of a solder alloy with a liquidus temperature that is lower than the liquidus temperature of the solder bonding the capping chip to the device chip.

5. A semiconductor device according to claim 2, wherein the solder is configured as a ring that completely surrounds the micromachine at the first surface of the capping chip.

6. A semiconductor device according to claim 5, wherein the micromachine is hermetically sealed with the ring between the device and capping chips.

7. A semiconductor device according to claim 5, wherein the conductive via is surrounded by the solder ring at the first surface of the capping chip.

8. A semiconductor device comprising:

a device chip with a micromachine and electrically-conductive runners to the micromachine;

a capping chip encloseing the micromachine on the device chip, the capping chip having a first surface facing the device chip and an oppositely-disposed second surface;

conductive vias extending through the capping chip from the first surface to the second surface;

solder bonding the capping chip to the device chip, the solder being formed of a solder alloy with a liquidus temperature;

first solder bumps electrically connecting the conductive vias to the runners of the device chip, the first solder bumps being formed of a solder alloy with a liquidus temperature;

bond pads on the capping chip and electrically connected to the conductive vias; and

second solder bumps on the bond pads of the capping chip the second solder bumps being formed of a solder alloy with a liquidus temperature that is lower than the liquidus temperature of the first solder bumps and lower than the liquidus temperature of the solder bonding the capping chip to the device chip.

9. semiconductor device according to claim 8, wherein the solder bonding the capping chip to the device chip is configured as a ring that completely surrounds the micromachine at the first surface of the capping chip.

10. A semiconductor device according to claim 8, wherein the second solder bumps bond the semiconductor device to a circuit board so that the capping chip is between the device chip and the circuit board.

11. A semiconductor device according to claim 8, further comprising a metal region on a side of the capping chip between the first and second surfaces of the capping chip, the semiconductor device being bonded to a circuit board so that the metal region is between the capping chip and the circuit board.

12. A semiconductor device according to claim 11, wherein the metal region is electrically connected to at least one of the conductive vias, the device further comprising solder bonding the metal region of the capping chip to the circuit board.

13. A semiconductor device according to claim 11, further comprising a plate attached to tile device chip such that the device chip is between the capping chip and the plate.

14. A semiconductor deice according to claim 13, wherein the metal region is electrically connected to at least one of the conductive vias, the device further comprising solder bonding the metal region and the plate to the circuit board.

15. A semiconductor device according to claim 9, wherein the micromachine is hermetically sealed with the ring between the device and capping chips.

16. A semiconductor device according to claim 9, wherein the conductive vias are surrounded by the ring at the first surface of the capping chip.

17. A semiconductor device according to claim 9, wherein the conductive vias arc outside the ring at the first surface of the capping chip.

18. A semiconductor device comprising:

a device chip with a micromachine and at least one electrically-conductive runner to the micromachine;

a capping chip enclosing the micromachine on the device chip, the capping chip having a first surface facing the device chip, an oppositely-disposed second surface, and at least one electrical interconnect through the capping chip between the first and second surfaces, the electrical interconnect electrically communicating with the runner on the device chip;

a bond pad on the capping chip and electrically communicating with the electrical interconnect through the capping chip; and

a metal region on a side of the capping chip between the first and second surfaces of the capping chip, the semiconductor device being bonded to a circuit board so that the metal region is between the capping chip and the circuit board.

19. A semiconductor device according to claim 18, wherein the metal region electrically communicate with the electrical interconnect, the device further comprising solder bonding the metal region to the circuit board.

20. A semiconductor device according to claim 18, further comprising a plate attached to the device chip such that the device chip is between the capping chip and the plate.

21. A semiconductor device according to claim 20, wherein the metal region electrically communicates with the electrical interconnect, the device further comprising solder bonding the metal region and the plate to the circuit board.

22. A semiconductor device comprising:

a device chip with a micromachine and electrically-conductive runners to the micromachine;

a capping chip enclosing the micromachine on the device chip, the capping chip having a first surface facing the device chip and an oppositely-disposed second surface;

conductive vias through the capping chip between the first and second surfaces;

solder bonding the capping chip to the device chip, the solder being formed of a solder alloy with a liquidus temperature;

first solder bumps electrically connecting the conductive vias to the runners of the device chip, the first solder bumps being formed of a solder alloy with a liquidus temperature;

bond pads on the capping chip and electrically connected to tile conductive vias;

second solder bumps on the bond pads of the capping chip, the second solder bumps being formed of a solder alloy with a liquidus temperature that is lower than the liquidus temperature of the first solder bumps and lower than the liquidus temperature of the solder bonding the capping chip to the device chip; and

a metal region on a side of the capping chip between the first and second surfaces of the capping chip, the semiconductor device being bonded to a circuit board so that the metal region is between the capping chip and the circuit board.

23. A semiconductor device according to claim 22, within the metal region is electrically connected to at least one of the conductive vias, the device further comprising solder bonding the metal region of the capping chip to the circuit board.

24. A semiconductor device according to claim 22, further comprising a plate attached to the device chip such that the device chip is between the capping chip and tile plate.

25. A semiconductor device according to claim 24, wherein the metal region is electrically connected to at least one of the conductive vias, the device further comprising solder bonding the metal region and the plate to the circuit board.