Piezoelectrically actuated liquid metal switch
First Claim
1. A piezoelectric activated relay comprising:
- a liquid metal channel;
a first and second set of piezoelectric elements, each of said set of piezoelectric elements forming sidewalls to a first and second chamber and each of said chambers being connected to said channel via a first and second conduit respectively;
a first, second and third contact pad equally separated from each other, each of said contact pads having at least a portion within the chamber; and
a moveable conductive liquid within the channel, a first portion of the liquid being wetted to the first of said contact pads and a portion of the liquid wetted to both the second and third of said contact pads;
wherein said chambers and said channel are filled with a fluid and wherein said portion of the liquid wetted to said second and third of said contact pads is moveable toward said portion wetted to the first of said contact pads.
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Accused Products
Abstract
In accordance with the invention, a piezoelectrically actuated relay that switches and latches by means of a liquid metal is disclosed. The relay operates by means of a plurality of shear mode piezoelectric elements used to cause a pressure differential in a pair of fluid chambers. Differential pressure is created in the chambers by contracting and expanding the chambers due to action by the piezoelectric elements. The differential pressure causes the liquid metal drop to overcome the surface tension forces that would hold the bulk of the liquid metal drop in contact with the contact pad or pads near the actuating piezoelectric element. The switch latches by means of surface tension and the liquid metal wetting to the contact pads.
84 Citations
23 Claims
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1. A piezoelectric activated relay comprising:
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a liquid metal channel;
a first and second set of piezoelectric elements, each of said set of piezoelectric elements forming sidewalls to a first and second chamber and each of said chambers being connected to said channel via a first and second conduit respectively;
a first, second and third contact pad equally separated from each other, each of said contact pads having at least a portion within the chamber; and
a moveable conductive liquid within the channel, a first portion of the liquid being wetted to the first of said contact pads and a portion of the liquid wetted to both the second and third of said contact pads;
wherein said chambers and said channel are filled with a fluid and wherein said portion of the liquid wetted to said second and third of said contact pads is moveable toward said portion wetted to the first of said contact pads. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A piezoelectric activated relay comprising:
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a fluid reservoir layer comprising a fluid reservoir;
a piezoelectric layer laminated to said fluid reservoir layer, said piezoelectric layer comprising a first and second set of piezoelectric elements, each of said set of piezoelectric elements forming sidewalls to a first and second chamber and each of said chambers being connected to said channel via a first and second conduit respectively;
a liquid metal channel layer laminated to said piezoelectric layer, said channel layer comprising a liquid metal channel, a first via connecting said channel to the first of said chambers, a second via connecting said channel to the second of said chambers, a first, second and third contact pad equally separated from each other, each of said contact pads having at least a portion within the chamber and a moveable conductive liquid within the channel, a first portion of the liquid being wetted to the first of said of contact pads and a portion of the liquid wetted to both th second and third of said contact pads;
wherein said chambers and said channel are filled with a fluid and wherein said portion of the liquid wetted to said second and third of said contact pads is moveable toward said portion wetted to the first of said contact pads. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification