×

Microfabrication methods and devices

  • US 6,752,966 B1
  • Filed: 09/01/2000
  • Issued: 06/22/2004
  • Est. Priority Date: 09/10/1999
  • Status: Expired due to Term
First Claim
Patent Images

1. A method of manufacturing a microfabricated channel network, comprising:

  • providing a first planar substrate having a first surface;

    depositing a first polymer layer on the first surfice of the first substrate;

    removing a first portion of the polymer layer to expose an area of the first surface of the first substrate, rcmoval of the first portion of the polymer layer providing one or more grooves in the polymer layer that correspond to a desired channel pattern; and

    overlaying a second planar substrate layer on the polymer layer to seal the one or more grooves in the polymer layer as one or more channels in the desired channel pattern.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×