Spin transistor magnetic random access memory device

• US 6,753,562 B1
• Filed: 03/27/2003
• Issued: 06/22/2004
• Est. Priority Date: 03/27/2003
• Status: Active Grant

• Current Assignee: Sharp Laboratories of America Incorporated (Hon Hai Precision Industry Co., Ltd.)
• Original Assignee: Sharp Laboratories of America Incorporated (Hon Hai Precision Industry Co., Ltd.)
• Inventors: Tang, Jinke, Sakiyama, Keizo, Hsu, Sheng Teng
• Primary Examiner(s): Abraham, Fetsum
• Application Number:
  US10/401,203
• Time in Patent Office: 453 Days
• Field of Search: 257/295, 257/183, 257/192
• US Class Current: 257/295
• CPC Class Codes: G11C 11/16 using elements in which the storage effect is based on magnetic spin effect
• CPC Class Codes: G11C 11/5607 using magnetic storage elements
• CPC Class Codes: H01L 29/66984 Devices using spin polarized carriers
• CPC Class Codes: H10B 61/22 of the field-effect transistor [FET] type

Abstract

A spin transistor employing the ferromagnetic semiconductor/semiconductor heterojunction is disclosed. The ferromagnetic semiconductor layers form heterojunctions directly on the source and drain of a regular field effect transistor. Using room temperature ferromagnetic semiconductor materials such as iron doped titanium oxide, the spin transistor can have improved spin injection efficiency due to the conductance matching of the ferromagnetic semiconductor with the semiconductor source and drain. The spin transistor further comprises writing plates to modify the magnetic polarization of the ferromagnetic layers to provide memory states. The spin transistor can be used as a memory cell in a magnetic random access memory with potentially large memory signal by utilizing the magnetic moment induced resistivity change.

Claims

1. A spin transistor device comprising

a field effect transistor comprising a gate controlled conduction channel disposed between a source and a drain;

and

two ferromagnetic semiconductor layers forming heterojunctions directly with the source and drain of the field effect transistor.

2. A device as in claim 1 wherein the ferromagnetic semiconductor material is room temperature ferromagnetic semiconductor.

3. A device as in claim 1 wherein the ferromagnetic semiconductor layer material is an iron doped titanium oxide compound.

4. A device as in claim 1 further comprising

a first wiring layer provided on the first ferromagnetic semiconductor layer; and

a second wiring layer provided on the second ferromagnetic semiconductor layer.

5. A device as in claim 1 further comprising a plurality of conductive write lines for carrying a write current, the conductive write lines adapted to supply a magnetic field to the ferromagnetic semiconductor layers.

6. A device as in claim 1 wherein the source and drain of the field effect transistor are doped to a surface carrier concentration of higher than 10²⁰ cm⁻

3.

7. A device as in claim 1 wherein the thickness of the source and drain regions is less than 100 nm.

8. A device as in claim 1 wherein the channel between the source and drain of the field effect transistor is less than 150 nm.

9. A device as in claim 1 further comprising

a plurality of salicide regions at the interfaces of the ferromagnetic semiconductor layers with the source and drain of the field effect transistor.

10. A device as in claim 9 wherein the salicide is selected from a group consisting of titanium silicide, cobalt silicide, nickel silicide.

11. A device as in claim 1 wherein the semiconductor layer material is a III-V group compound semiconductor.

12. A device as in claim 11 wherein the III-V group compound semiconductor is selected from a group consisting of InSb, InAs, GaAs, or InAsP.

13. A device as in claim 1 wherein the semiconductor layer material is a IV group semiconductor.

14. A device as in claim 13 wherein the IV group semiconductor is one of Si or Ge.

15. A magnetic memory for storing a data state comprising a memory cell comprising

a field effect transistor comprising a gate controlled conduction channel disposed between a source and a drain;

two ferromagnetic semiconductor layers forming heterojunctions directly with the source and drain of the field effect transistor; and

a plurality of conductive write lines for carrying a write current, the conductive write lines adapted to supply a magnetic field to the ferromagnetic semiconductor layers.

16. A magnetic memory as in claim 15 wherein the memory cell is arranged in plurality in a matrix state.