Technique for characterizing the performance of an object positioning apparatus
First Claim
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1. A method of characterizing an object positioning apparatus, the method comprising:
- receiving sensor data;
processing the sensor data to compensate for sensor drift and generate processed sensor data; and
analyzing the processed sensor data to identify a failing component of the object positioning apparatus.
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Abstract
In one embodiment, an object positioning apparatus is characterized by receiving sensor data from a sensor, processing the sensor data to compensate for sensor drift, and analyzing the resulting processed sensor data to determine a characteristic of the apparatus. Compensating for sensor drift cleans up the sensor data so that they may be properly analyzed and compared against known good sensor data, for example.
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Citations
20 Claims
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1. A method of characterizing an object positioning apparatus, the method comprising:
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receiving sensor data;
processing the sensor data to compensate for sensor drift and generate processed sensor data; and
analyzing the processed sensor data to identify a failing component of the object positioning apparatus. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
removing a slope of the sensor data to generate slope-removed data.
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3. The method of claim 1 wherein processing the sensor data comprises:
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obtaining a slope of the sensor data;
obtaining an intercept of the sensor data; and
removing the slope and the intercept from the sensor data to generate slope-removed data.
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4. The method of claim 1 wherein receiving the sensor data comprises:
receiving a data file containing the sensor data.
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5. The method of claim 1 wherein the characteristic is related to vibration on the object positioning apparatus.
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6. The method of claim 1 wherein the object positioning apparatus is part of a system for manufacturing an integrated circuit.
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7. The method of claim 1 wherein the object positioning apparatus positions a semiconductor wafer.
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8. The method of claim 1 wherein the object positioning apparatus positions a mask.
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9. The method of claim 1 wherein the sensor data are from a position sensor of the object positioning apparatus.
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10. A system for characterizing an object positioning apparatus, the system comprising:
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a data module containing sensor data from a sensor;
a processing module configured to process the sensor data to compensate for sensor drift and generate processed sensor data; and
an analysis module configured to allow for identification of a failing component of the object positioning apparatus based on the processed sensor data. - View Dependent Claims (11, 12, 13, 14)
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15. A system comprising:
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means for receiving information from a sensor;
means for processing the information to compensate for sensor drift; and
means for analyzing the processed information to determine a failing component of an object positioning apparatus. - View Dependent Claims (16, 17, 18)
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19. A method of characterizing an object positioning apparatus, the method comprising:
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receiving sensor data;
removing a slope of the sensor data to compensate for sensor drift and to generate slope-removed data;
transforming the slope-removed data from time domain to frequency domain to generate frequency domain data; and
integrating the frequency domain data over a range of frequencies to determine a characteristic of the object positioning apparatus. - View Dependent Claims (20)
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Specification