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Method and apparatus for detecting aberrations in a projection lens utilized for projection optics

  • US 6,753,954 B2
  • Filed: 12/06/2000
  • Issued: 06/22/2004
  • Est. Priority Date: 12/06/2000
  • Status: Active Grant
First Claim
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1. A lens aberration monitor for detecting lens aberrations, said monitor comprising:

  • a mask for transferring a lithographic pattern onto a substrate, and a plurality of sub-resolution features disposed on said mask, said plurality of sub-resolution features arranged so as to form a predetermined pattern on said substrate, said predetermined pattern being utilized to detect lens aberrations, wherein none of said plurality of sub-resolution features are individually imaged on said substrate.

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