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Clamshell apparatus with dynamic uniformity control

  • US 6,755,946 B1
  • Filed: 11/30/2001
  • Issued: 06/29/2004
  • Est. Priority Date: 11/30/2001
  • Status: Active Grant
First Claim
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1. An apparatus for engaging a work piece during an electrolytic process, the apparatus comprising:

  • a cup having an interior region and a lip within the interior region arranged such that the lip can support the work piece while the work piece remains within the interior region;

    a first plurality of electrical contacts arranged about the lip for providing electrical current to the work piece via a metal layer thereon;

    a second plurality of electrical contacts, which do not include electrical contacts from the first plurality of electrical contacts, arranged about the lip for measuring electrical resistance through the metal layer on the work piece; and

    a cone having a work piece contact surface that fits within the cup'"'"'s interior and can contact the work piece in a manner that holds the work piece in a fixed position between the work piece contact surface and the lip;

    wherein a first circuit contains the first plurality of electrical contacts and a second circuit, isolated from the first circuit, contains the second plurality of electrical contacts.

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