Piezoelectrically actuated liquid metal switch

• US 6,756,551 B2
• Filed: 05/09/2002
• Issued: 06/29/2004
• Est. Priority Date: 05/09/2002
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn
• Primary Examiner(s): Enad, Elvin
• Assistant Examiner(s): KLAUS, LISA NHUNG
• Application Number:
  US10/142,076
• Publication Number:
  US 20030209414A1
• Time in Patent Office: 782 Days
• Field of Search: 200/181-286, 200/61.02, 200/600, 310/328
• US Class Current: 200/214
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 2057/006 Micromechanical piezoelectric relay
• CPC Class Codes: H01H 29/24 wherein contact is made and broken between liquid and liquid
• CPC Class Codes: H01H 57/00 Electrostrictive relays; Piezoelectric relays

Abstract

The present invention uses a piezoelectric method to actuate a liquid metal relay. The method described here uses the piezoelectric element in an extension mode to cause the switch actuator to insert into a cavity in the static (i.e. nonmoving) switch contact structure. The cavity has sides and a pad on its end that are wettable by the liquid metal. The cavity is filled with liquid metal. Insertion of the switch actuator into the cavity causes the liquid metal to be displaced outward and come in contact with the contact pad on the switch actuator. The volume of liquid metal is chosen so that when the actuator returns to its rest position, the electrical contact is maintained by surface tension and by wetting of the contact pads on both the static switch contact structure and the actuator.

Claims

1. A piezoelectric activated relay comprising:

an extension mode piezoelectric element;

a switch contact structure forming a cavity;

a first switch contact pad and a second switch contact pad, said first switch contact pads being constructed to line said cavity and said second switch contact pad being adhered to said piezoelectric element; and

a first portion of liquid metal filling said cavity and a second portion of liquid metal adhering to said second contact switch;

wherein said piezoelectric element extends partially into said cavity contacting said liquid metal and wherein said second switch contact pad is positioned on said piezoelectric element in close proximity to said first portion of liquid metal so that actuation of the piezoelectric element causes outward displacement of the first portion of liquid metal causing it to contact the second contact pad and the second portion of liquid metal.

2. The relay of claim 1, wherein said liquid metal is mercury.

3. The relay of claim 1, wherein said liquid metal is an alloy containing gallium.

4. The relay of claim 2, further comprising a cap material positioned atop the relay and a circuit substrate material positioned below the relay.

5. The relay of claim 4, wherein said piezoelectric element is coated on a portion of the piezoelectric element that extends into said cavity, said coating being wettable by the liquid metal.

6. The relay of claim 5, wherein said first and second portions of liquid metal remain in contact with each other and wetted to said first and second switch contacts when said piezoelectric element retracts to a resting position.

7. The relay of claim 6, wherein said first and second portions of liquid metal lose contact with each other when said piezoelectric element retracts from its resting position.

8. A piezoelectric activated relay comprising:

a cap layer;

a piezoelectric layer positioned beneath said cap layer; and

a circuit substrate layer positioned beneath said piezoelectric layer;

wherein said piezoelectric layer comprises an extension mode piezoelectric element;

a switch contact structure forming a cavity;

a first switch contact pad and a second switch contact pad, said first switch contact pads being constructed to line said cavity and said second switch contact pad being adhered to said piezoelectric element; and

a first portion of liquid metal filling said cavity and a second portion of liquid metal adhering to said second contact switch;

wherein said piezoelectric element extends partially into said cavity contacting said liquid metal and wherein said second switch contact pad is positioned on said piezoelectric element in close proximity to said first portion of of liquid metal so that actuation of the piezoelectric element causes outward displacement of the first portion of liquid metal causing it to contact the second contact pad and the second portion of liquid metal.

9. The relay of claim 8, wherein said liquid metal is mercury.

10. The relay of claim 8, wherein said liquid metal is an alloy containing gallium.

11. The relay of claim 9, further comprising a cap material positioned atop the relay and a circuit substrate material positioned below the relay.

12. The relay of claim 11, wherein said piezoelectric element is coated on a portion of the piezoelectric element that extends into said cavity, said coating being wettable by the liquid metal.

13. The relay of claim 12, wherein said first and second portions of liquid metal remain in contact with each other and wetted to said first and second switch contacts when said piezoelectric element retracts to a resting position.

14. The relay of claim 13, wherein said first and second portions of liquid metal lose contact with each other when said piezoelectric element retracts from its resting position.