Micromachined tuned-band hot bolometer emitter

• US 6,756,594 B2
• Filed: 01/26/2001
• Issued: 06/29/2004
• Est. Priority Date: 01/28/2000
• Status: Active Grant

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Jones, Eric, George, Thomas, Choi, Daniel S.
• Primary Examiner(s): Hannaher, Constantine
• Application Number:
  US09/771,447
• Publication Number:
  US 20020096492A1
• Time in Patent Office: 1,250 Days
• Field of Search: 250/343
• US Class Current: 250/343
• CPC Class Codes: G01J 5/10 using electric radiation detectors

Abstract

A device for utilizing an optical infrared emitter/detector to sense substances of interest is provided. The infrared emitter/detector comprises a single crystal semiconductor, photonic band gap structure which functions both as an infrared emitter, a narrow-band filter, and as a broad-band infrared bolometer detector to exert wavelength control directly on the active element emitter/detector surface using the periodic symmetry of the photonic band gap structure to produce narrow wavelength “forbidden” optical transmission bands or modes to sense the presence of a specified substance in the environment. A system and method for sensing specific substances using the optical infrared emitter/detector of this invention in a sensor device is also provided. Finally, a method of manufacturing the infrared emitter/detectors of the present invention is also provided.

Claims

1. A sensor engine for producing an electromagnetic emission and detecting a change in the equilibrium temperature of the sensor engine, comprising:

a sensor engine having a temperature and comprising a substrate surface adapted to emit an electromagnetic emission, the substrate surface having emission features disposed thereon, the emission features having a periodic array structure such that the emission features interact with the electromagnetic emission as a photonic bandgap structure filtering the electromagnetic emission to provide the electromagnetic emission with a narrow spectral bandwidth, the sensor engine being made from a material having a non-zero temperature coefficient of resistivity.

2. The sensor engine according to claim 1 wherein the substrate is made of a metallized single-crystal semiconductor.

3. The sensor engine according to claim 1 wherein the substrate is made of single-crystal silicon coated with a metal selected from the group consisting of gold, aluminum and titanium.

4. The sensor engine according to claim 1 wherein the substrate is made of silicon deposited on an insulator.

5. The sensor engine according to claim 4 wherein the insulator is an oxide material.

6. The sensor engine according to claim 1 wherein the emission features have a shape selected from the group consisting of crosses, squares, circles, pyramids and rectangles.

7. The sensor engine according to claim 1 wherein at least two differently shaped emission features are disposed on the substrate surface.

8. The sensor engine according to claim 1 wherein the emission features have a cross-sectional dimension of about 0.1 to 10.0 μ

m.

9. The sensor engine according to claim 1 wherein the emission features have a lattice spacing of about 0.1 to 10.0 μ

m.

10. The sensor engine according to claim 1 wherein the electromagnetic emission has a wavelength of between about 2 to 14 μ

m.

11. The sensor engine according to claim 1 wherein the bandwidth of the electromagnetic emission is about 0.1 to 0.5 μ

m.

12. The sensor engine according to claim 1 wherein the electromagnetic emission is produced by resistively heating the sensor engine.

13. The sensor engine according to claim 12 wherein the temperature of the heated sensor is between about 300 and 550°

C.

14. The sensor engine according to claim 1 wherein the periodic array structure is non-random.

15. A method for producing a sensor engine according to claim 1 utilizing a microelectromechanical process comprising the steps of:

supplying a metallized substrate;

depositing a photoresist on the substrate;

exposing a pattern comprising the emission features having a non-random periodic array structure on the photoresist;

reactive ion etching the substrate to form the emission features such that the emission features interact with the electromagnetic emission as the photonic bandgap structure; and

removing the photoresist.

16. The method according to claim 15 wherein the step of exposing includes forming the pattern by direct write e-beam lithography.

17. The method according to claim 15 wherein the metallized substrate is a single-crystal silicon substrate coated with a metal selected from the group consisting of gold, aluminum and titanium.

18. A gas sensor for detecting the presence of a specific species comprising:

an optical cell in fluid communication with the environment having proximal and distal ends;

a sensor engine fixedly mounted to the proximal end of the optical cell the sensor engine having a temperature and comprising a substrate surface adapted to emit an electromagnetic emission having a flux, the substrate surface having emission features disposed thereon, the emission features having a periodic array structure such that the emission features interact with the electromagnetic emission as a photonic bandgap structure, filtering the electromagnetic emission to provide the electromagnetic emission with a narrow spectral bandwidth, the sensor engine being made from a material having a non-zero temperature coefficient of resistivity;

a power supply in electrical communication with the sensor engine for supplying power to the sensor engine;

a reflector fixedly mounted to the distal end of the optical cell such that the electromagnetic emission travels through the optical cell and is reflected back onto the sensor engine;

a monitor in signal communication with the sensor engine to detect the temperature of the sensor engine and communicate a change in the temperature of the sensor engine to a user.

19. The gas sensor according to claim 18, further comprising a focusing optic mounted to the proximal end of the optical cell, distal to the sensor engine such that the electromagnetic emission emitted from or impinging on the sensor engine is focused by the focusing optic.

20. The gas sensor according to claim 19, wherein the focusing optic is a compound parabolic concentrator.

21. The gas sensor according to claim 18, wherein the substrate is made of a metallized single-crystal semiconductor.

22. The gas sensor according to claim 18, wherein the substrate is made of single-crystal silicon deposited on an insulator.

23. The gas sensor according to claim 18, wherein the emission features have a shape selected from the group consisting of crosses, squares, circles, pyramids and rectangles.

24. The gas sensor according to claim 18, wherein at least two differently shaped emission features are disposed on the substrate surface.

25. The gas sensor according to claim 18, wherein the electromagnetic emission has a wavelength between about 2 and 14 μ

m.

26. The gas sensor according to claim 18, wherein the bandwidth of the electromagnetic emission is between about 0.1 to 0.5 μ

m.

27. The gas sensor according to claim 18, wherein power supply is a battery.

28. The gas sensor according to claim 18, wherein the monitor in part comprises a wheatstone bridge adapted to measure the temperature of the sensor engine.

29. The gas sensor according to claim 18, wherein the monitor in part comprises an audible alarm adapted to communicate a temperature change in the sensor engine to the user.

30. The gas sensor according to claim 18 wherein the optical cell has a length of about 1 to 12 inches.

31. The gas sensor according to claim 18 wherein the electromagnetic emission has a wavelength corresponding to the wavelength of absorption of a species selected from CO, NO and methane.

32. The gas sensor according to claim 18 comprising at least two sensor engines adapted to produce at least two electromagnetic emissions having at least two different wavelengths and wherein the monitor is adapted to independently monitor and compare the temperatures of the at least two sensor engines to determine whether a contaminant is present in the optical cell.

33. The gas sensor according to claim 18 wherein the electromagnetic emission is produced by resistively heating the sensor engine.

34. The gas sensor according to claim 33 wherein the temperature of the heated sensor is between about 300 and 550°

C.

35. The gas sensor according to claim 18 wherein the periodic array structure is non-random.

36. A method of detecting a gas species comprising the steps of:

providing a sensor engine having a temperature and comprising a substrate surface adapted to emit an electromagnetic emission, the substrate surface having emission features disposed thereon, the emission features having a periodic array structure such that the emission features interact with the electromagnetic emission as a photonic bandgap structure, filtering the electromagnetic emission to provide the electromagnetic emission with a narrow spectral bandwidth, the sensor engine being made from a material having a non-zero temperature coefficient of resistivity;

applying power to the sensor engine such that the sensor engine projects the electromagnetic emission having the narrow spectral bandwidth and a flux from the substrate surface across a detection region such that in the presence of a species of interest having an absorption region in the narrow spectral bandwidth of the electromagnetic emission, the flux of the electromagnetic emission is reduced;

reflecting the electromagnetic emission back toward the sensor engine such that it impinges on the sensor engine; and

measuring the temperature of the sensor engine such that a change in the temperature of the sensor engine is communicated to a user.

37. A method according to claim 36 wherein the temperature of the sensor engine depends on the flux of the reflected electromagnetic emission impinging on the sensor engine.