Stage assembly including a reaction mass assembly

• US 6,757,053 B1
• Filed: 11/16/2000
• Issued: 06/29/2004
• Est. Priority Date: 11/16/2000
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Hazelton, Andrew J., Binnard, Mike
• Primary Examiner(s): Gray, David
• Assistant Examiner(s): ESPLIN, DAVID B
• Application Number:
  US09/714,747
• Time in Patent Office: 1,321 Days
• Field of Search: 355/53, 355/72, 355/75
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
• CPC Class Codes: G03F 7/70766 Reaction force control means, e.g. countermass

Abstract

A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction mass assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y axis relative to the stage base (12). The reaction mass assembly (18) is coupled to the stage mover assembly (16). Uniquely, the reaction mass assembly (18) reduces the reaction forces created by the stage mover assembly (16) in three degrees of freedom that are transferred to the stage base (12). With this design, stage mover assembly (16) has less influence upon the position of the stage base (12). These features allow for more accurate positioning of the device (26) by the stage assembly (10) and better performance of the stage assembly (10).

Claims

1. A stage assembly that is adapted to move a device, the stage assembly comprising:

a stage that retains the device;

a stage base that directly supports the stage;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom;

a reaction mass assembly coupled to the stage mover assembly, the reaction mass assembly reducing the reaction forces in at least two degrees of freedom that are transferred to the stage base; and

a reaction mover assembly that adjusts the position of the reaction mass assembly relative to the stage base along an X axis, along a Y axis and about a Z axis.

2. A stage assembly that is adapted to move a device relative to a stage base, the stage assembly comprising:

a stage adapted to retain the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom;

a reaction mass assembly including an X reaction component and a Y reaction component that are coupled to the stage mover assembly, the X reaction component moving relative to the Y reaction component along an X axis, the X reaction component and the Y reaction component moving concurrently along a Y axis relative to the stage base, the reaction mass assembly being adapted to reduce the reaction forces in at least two degrees of freedom that are transferred to the stage base; and

a mass guide assembly that allows the X reaction component to move relative to the Y reaction component along the X axis and inhibits movement of the X reaction component relative to the Y reaction component along the Y axis.

3. A stage assembly that is adapted to move a device relative to a stage base, the stage assembly comprising:

a stage adapted to retain the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom;

a reaction mass assembly including an X reaction component and a Y reaction component that are coupled to the stage mover assembly, the X reaction component including a pair of spaced apart X reaction masses and the Y reaction component including a pair of spaced apart Y reaction masses, the X reaction component moving relative to the Y reaction component along an X axis, the X reaction component and the Y reaction component moving concurrently along a Y axis relative to the stage base, the reaction mass assembly being adapted to reduce the reaction forces in at least two degrees of freedom that are transferred to the stage base; and

a mass guide assembly that connects the X reaction masses to the Y reaction masses, allows the X reaction masses to move independently relative to the Y reaction masses along the X axis and inhibits movement of the X reaction masses relative to the Y reaction masses along the Y axis.

4. A stage assembly that is adapted to move a device relative to a stage base, the stage assembly comprising:

a stage adapted to retain the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage along an X axis and along a Y axis and generating reaction forces along the X axis and along the Y axis;

a reaction mass assembly coupled to the stage mover assembly, the reaction mass assembly being adapted to reduce the reaction forces along the X axis and along the Y axis, the reaction mass assembly including an X reaction component and a Y reaction component, the X reaction component moving relative to the stage base along the X axis, the X reaction component moving relative to the Y reaction component along the X axis and along the Y axis, and the X reaction component and the Y reaction component move concurrently along the Y axis; and

a reaction mover assembly that adjusts (i) the position of the X reaction component relative to the Y reaction component along the X axis, (ii) the position of the Y reaction component and the X reaction component relative to the stage base along the Y axis, and (iii) the position of the Y reaction component and the X reaction component relative to the stage base along the X axis.

5. A stage assembly that is adapted to move a device relative to a stage base, the stage assembly comprising:

a stage adapted to retain the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage along an X axis and along a Y axis and generating reaction forces along the X axis and along the Y axis;

a reaction mass assembly coupled to the stage mover assembly, the reaction mass assembly being adapted to reduce the reaction forces along the X axis and along the Y axis, the reaction mass assembly including a X reaction component and a Y reaction component, the X reaction component including a first X reaction mass and a second X reaction mass that move independently along the X axis relative to the Y reaction component, the X reaction component moving relative to the stage base along the X axis and along the Y axis, the X reaction component and the Y reaction component moving concurrently along the Y axis, and the Y reaction component including a pair of spaced apart Y reaction masses; and

a mass guide assembly that connects the X reaction masses to the Y reaction masses, allows the X reaction masses to move independently relative to the Y reaction masses along the X axis and inhibits movement of the X reaction masses relative to the Y reaction masses along the Y axis.

6. The stage assembly of claim 5 further comprising a reaction guide assembly that allows the Y reaction masses to move relative to the stage base along the Y axis and inhibits movement of the Y reaction masses along the X axis.

7. A method for making a stage assembly that moves a device relative to a stage base, the method comprising the steps of:

providing a stage that retains the device;

connecting a stage mover assembly to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom; and

coupling a reaction mass assembly to the stage mover assembly, the reaction mass assembly including a first X reaction mass, a second X reaction mass and a reaction frame, the first X reaction mass and the second X reaction mass moving independently along an X axis, the reaction mass assembly reducing the reaction forces in at least two degrees of freedom that are transferred to the stage base, the reaction frame being coupled to the X reaction masses so that the reaction frame moves relative to the stage base along the X axis.

8. The method of claim 7 including the step of providing a reaction mover assembly that adjusts the position of each X reaction mass relative to the reaction frame along the X axis, and adjusts the position of the reaction frame and the X reaction masses relative to the stage base along the Y axis.

9. The method of claim 7 including the step of providing a reaction mass assembly that adjusts the position of the X reaction masses and the reaction frame relative to the stage base along the X axis and along the Y axis.

10. A stage assembly that is adapted to move a device relative to a stage base, the stage assembly comprising:

a stage adapted to retain the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom;

a reaction mass assembly including an X reaction component and a Y reaction component that are coupled to the stage mover assembly, the X reaction component moving relative to the Y reaction component along an X axis, the X reaction component and the Y reaction component moving concurrently along a Y axis relative to the stage base, the reaction mass assembly reducing the reaction forces in at least two degrees of freedom that are transferred to the stage base; and

a reaction mover assembly that adjusts the position of the X reaction component relative to the Y reaction component along the X axis, the reaction mover assembly adjusting the position of the X reaction component and the Y reaction component relative to the stage base along the X axis, the Y axis and about a Z axis.

11. A stage assembly that is adapted to move a device relative to a stage base, the stage assembly comprising:

a stage adapted to retain the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom; and

a reaction mass assembly including an X reaction component and a Y reaction component that are coupled to the stage mover assembly, the X reaction component moving relative to the Y reaction component along an X axis, the X reaction component and the Y reaction component moving concurrently along a Y axis relative to the stage base, the reaction mass assembly being adapted to reduce the reaction forces in at least two degrees of freedom that are transferred to the stage base; and

a reaction mover assembly that adjusts the position of the Y reaction component and the X reaction component relative to the stage base along the X axis, the Y axis and about a Z axis.

12. A stage assembly that is adapted to move a device relative to a stage base, the stage assembly comprising:

a stage adapted to retain the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom; and

a reaction mass assembly including an X reaction component and a Y reaction component that are coupled to the stage mover assembly, the X reaction component including a pair of spaced apart X reaction masses and the Y reaction component including a generally planar shaped reaction base, the X reaction component moving relative to the Y reaction component along an X axis, the X reaction component and the Y reaction component moving concurrently along a Y axis relative to the stage base, the reaction mass assembly being adapted to reduce the reaction forces in at least two degrees of freedom that are transferred to the stage base.

13. A stage assembly that is adapted to move a device relative to a stage base, the stage assembly comprising:

a stage adapted to retain the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom; and

a reaction mass assembly including an X reaction component and a Y reaction component that are coupled to the stage mover assembly, the X reaction component including a pair of spaced apart X reaction masses and the Y reaction component including a reaction frame, the X reaction component moving relative to the Y reaction component along an X axis, the X reaction component and the Y reaction component moving concurrently along a Y axis relative to the stage base, the reaction mass assembly being adapted to reduce the reaction forces in at least two degrees of freedom that are transferred to the stage base.

14. The stage assembly of claim 13 further comprising a mass guide assembly that connects the X reaction masses to the reaction frame, allows the X reaction masses to move independently relative to the reaction frame along the X axis and inhibits movement of the X reaction masses relative to the reaction frame along the Y axis.

15. The stage assembly of claim 14 further comprising a reaction guide assembly that allows the reaction frame to move relative to the stage base along the Y axis and inhibits movement of the reaction frame along the X axis.

16. The stage assembly of claim 14 further comprising a reaction mover assembly that adjusts the position of the X reaction masses relative to the reaction frame along the X axis.

17. The stage assembly of claim 16 wherein the reaction mover assembly adjusts the position of the reaction frame and the X reaction masses relative to the stage base along the Y axis.

18. The stage assembly of claim 14 wherein the reaction frame is adapted to move relative to the stage base along the X axis, along the Y axis and about the Z axis.

19. The stage assembly of claim 18 further comprising a reaction mover assembly that adjusts the position of the X reaction masses relative to the reaction frame along the X axis.

20. The stage assembly of claim 18 further comprising a reaction mover assembly that adjusts the position of the reaction frame and the X reaction masses relative to the stage base along the X axis, along the Y axis and about the Z axis.

21. A stage assembly that is adapted to move a device relative to a stage base, the stage assembly comprising:

a stage adapted to retain the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage along an X axis and along a Y axis and generating reaction forces along the X axis and along the Y axis; and

a reaction mass assembly coupled to the stage mover assembly, the reaction mass assembly being adapted to reduce the reaction forces along the X axis and along the Y axis, the reaction mass assembly including a X reaction component that moves relative to the stage base along the X axis, along the Y axis and about a Z axis.

22. A stage assembly that is adapted to move a device relative to a stage base, the stage assembly comprising:

a stage adapted to retain the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage along an X axis and along a Y axis and generating reaction forces along the X axis and along the Y axis;

a reaction mass assembly coupled to the stage mover assembly, the reaction mass assembly being adapted to reduce the reaction forces along the X axis and along the Y axis, the reaction mass assembly including an X reaction component and a Y reaction component, the X reaction component moving relative to the stage base along the X axis, the X reaction component moving relative to the Y reaction component along the X axis and along the Y axis, and the X reaction component and the Y reaction component move concurrently along the Y axis; and

a reaction mover assembly that adjusts (i) the position of the X reaction component relative to the Y reaction component along the X axis, (ii) the position of the Y reaction component and the X reaction component relative to the stage base along the Y axis, (iii) the position of the Y reaction component and the X reaction component relative to the stage base along the X axis, and (iv) the position of the Y reaction component and the X reaction component relative to the stage base about a Z axis.

23. A stage assembly that is adapted to move a device relative to a stage base, the stage assembly comprising:

a stage adapted to retain the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage along an X axis and along a Y axis and generating reaction forces along the X axis and along the Y axis; and

a reaction mass assembly coupled to the stage mover assembly, the reaction mass assembly being adapted to reduce the reaction forces along the X axis and along the Y axis, the reaction mass assembly including an X reaction component and a Y reaction component, the X reaction component including a first X reaction mass and a second X reaction mass that move independently along the X axis relative to the Y reaction component, the X reaction component moving relative to the stage base along the X axis, the X reaction component moving relative to the Y reaction component along the Y axis, the X reaction component and the Y reaction component moving concurrently along the Y axis, and the Y reaction component including a generally planar shaped reaction base.

24. A stage assembly that is adapted to move a device relative to a stage base, the stage assembly comprising:

a stage adapted to retain the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage along an X axis and along a Y axis and generating reaction forces along the X axis and along the Y axis; and

a reaction mass assembly coupled to the stage mover assembly, the reaction mass assembly being adapted to reduce the reaction forces along the X axis and along the Y axis, the reaction mass assembly including an X reaction component and a Y reaction component, the X reaction component including a first X reaction mass and a second X reaction mass that move independently along the X axis relative to the Y reaction component, the X reaction component moving relative to the stage base along the X axis, the X reaction component moving relative to the Y reaction component along the Y axis, the X reaction component and the Y reaction component moving concurrently along the Y axis, the Y reaction component including a reaction frame.

25. The stage assembly of claim 24 further comprising a mass guide assembly that connects the X reaction masses to the reaction frame, allows the X reaction masses to move independently relative to the reaction frame along the X axis, and inhibits movement of the X reaction masses relative to the reaction frame along the Y axis.

26. The stage assembly of claim 25 further comprising a reaction guide assembly that allows the reaction frame to move relative to the stage base along the Y axis and inhibits movement of the reaction frame along the X axis.

27. The stage assembly of claim 26 further comprising a reaction mover assembly that adjusts the position of the X reaction masses relative to the reaction frame along the X axis.

28. The stage assembly of claim 27 wherein the reaction mover assembly adjusts the position of the reaction frame and the X reaction masses relative to the stage base along the Y axis.

29. The stage assembly of claim 25 wherein the reaction frame is adapted to move relative to the stage base along the X axis, along the Y axis and about the Z axis.

30. The stage assembly of claim 29 further comprising a reaction mover assembly that adjusts the position of the X reaction masses relative to the reaction frame along the X axis.

31. The stage assembly of claim 29 further comprising a reaction mover assembly that adjusts the position of the reaction frame and the X reaction masses relative to the stage base along the X axis, along the Y axis and about the Z axis.

32. A method for making a stage assembly that moves a device relative to a stage base, the method comprising the steps of:

providing a stage that retains the device;

connecting a stage mover assembly to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom;

coupling a reaction mass assembly to the stage mover assembly, the reaction mass assembly including an X reaction component and a Y reaction component, the X reaction component moving relative to the Y reaction component along an X axis, the X reaction component and the Y reaction component move concurrently along a Y axis, the reaction mass assembly reducing the reaction forces in at least two degrees of freedom that are transferred to the stage base; and

adjusting the position of the Y reaction component and the X reaction component relative to the stage base along an X axis and about a Z axis with a reaction mover assembly.

33. A stage assembly that moves a device relative to a stage base, the stage assembly comprising:

a stage that retains the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating a reaction force along a Y axis; and

a reaction mass assembly coupled to the stage mover assembly, the reaction mass assembly including an X reaction component and a Y reaction component, the X reaction component moving relative to the Y reaction component, the reaction components moving along the Y axis to reduce the reaction force along the Y axis that is transferred to the stage base.

34. The stage assembly of claim 33 wherein the stage mover assembly moves the stage along the Y axis directly causing the X reaction component and the Y reaction component to move along the Y axis.

35. The stage assembly of claim 33 wherein the X reaction component moves relative to the stage base with three degrees of freedom.

36. The stage assembly of claim 35 wherein the Y reaction component moves relative to the stage base with three degrees of freedom.

37. The stage assembly of claim 33 wherein the stage mover assembly comprises an X stage mover that moves the stage along the X axis, the X stage mover being coupled to the X reaction component so that movement of the stage by the X stage mover results in movement of the X reaction component along the X axis.

38. The stage assembly of claim 37 wherein the stage mover assembly comprises a Y stage mover that moves the stage along the Y axis, the Y stage mover being coupled to the X reaction component so that movement of the stage by the Y stage mover results in movement of the X reaction component along the Y axis.

39. The stage assembly of claim 33 further comprising a reaction mover assembly that adjusts the position of at least a portion of the reaction mass assembly relative to the stage base with one degree of freedom.

40. The stage assembly of claim 33 further comprising a reaction mover assembly that adjusts the position of at least a portion of the reaction mass assembly relative to the stage base with two degrees of freedom.

41. The stage assembly of claim 33 further comprising a reaction mover assembly that adjusts the position of at least a portion of the reaction mass assembly relative to the stage base with three degrees of freedom.

42. The stage assembly of claim 33 further comprising a reaction mover assembly that adjusts the position of the Y reaction component and the X reaction component relative to the stage base along the Y axis.

43. The stage assembly of claim 33 further comprising a reaction mover assembly that adjusts the position of one of the reaction components relative to the stage base about a Z axis.

44. The stage assembly of claim 33 further comprising a reaction mover assembly that adjusts the position of the X reaction component and the Y reaction component relative to the stage base about a Z axis.

45. The stage assembly of claim 33 wherein the X reaction component includes a first X reaction mass and a second X reaction mass that move independently along the X axis relative to the Y reaction component.

46. The stage assembly of claim 33 further comprising a mass guide assembly that allows the X reaction component to move relative to the Y reaction component along the X axis and inhibits movement of the X reaction component relative to the Y reaction component along the Y axis.

47. The stage assembly of claim 33 wherein the X reaction component includes a pair of spaced apart X reaction masses and the Y reaction component includes a generally planar shaped reaction base.

48. The stage assembly of claim 33 wherein the X reaction component includes a pair of spaced apart X reaction masses and the Y reaction component includes a pair of spaced apart Y reaction masses.

49. The stage assembly of claim 48 further comprising a mass guide assembly that connects the X reaction masses to the Y reaction masses, allows the X reaction masses to move independently relative to the Y reaction masses along the X axis and inhibits movement of the X reaction masses relative to the Y reaction masses along the Y axis.

50. The stage assembly of claim 48 further comprising a reaction guide assembly that allows the Y reaction masses to move relative to the stage base along the Y axis and inhibits movement of the Y reaction masses along the X axis.

51. The stage assembly of claim 48 further comprising a reaction mover assembly that adjusts the position of the X reaction masses relative to the Y reaction masses along the X axis.

52. The stage assembly of claim 51 wherein the reaction mover assembly adjusts the position of the Y reaction masses and the X reaction masses relative to the stage base along the Y axis.

53. The stage assembly of claim 33 wherein the X reaction component includes a pair of spaced apart X reaction masses and the Y reaction component includes a reaction frame.

54. The stage assembly of claim 53 further comprising a mass guide assembly that connects the X reaction masses to the reaction frame, allows the X reaction masses to move independently relative to the reaction frame along the X axis and inhibits movement of the X reaction masses relative to the reaction frame along the Y axis.

55. The stage assembly of claim 54 further comprising a reaction guide assembly that allows the reaction frame to move relative to the stage base along the Y axis and inhibits movement of the reaction frame along the X axis.

56. The stage assembly of claim 54 further comprising a reaction mover assembly that adjusts the position of the X reaction masses relative to the reaction frame along the X axis.

57. The stage assembly of claim 56 wherein the reaction mover assembly adjusts the position of the reaction frame and the X reaction masses relative to the stage base along the Y axis.

58. The stage assembly of claim 54 wherein the reaction frame moves relative to the stage base about the Z axis.

59. The stage assembly of claim 54 further comprising a reaction mover assembly that adjusts the position of the reaction frame and the X reaction masses relative to the stage base about the Z axis.

60. The stage assembly of claim 33 wherein the reaction components move along the Y axis to reduce the reaction force along the Y axis that is transferred to the stage base.

61. The stage assembly of claim 33 wherein the reaction components move concurrently along the Y axis to reduce the reaction force along the Y axis that is transferred to the stage base.

62. An exposure apparatus including the stage assembly of claim 33.

63. A Process for manufacturing a device including the step of utilizing the exposure apparatus according to claim 62.

64. A process for making a wafer on which an image has been formed including the step of utilizing the exposure apparatus according to claim 62.

65. A stage assembly that moves a device relative to a stage base, the stage assembly comprising:

a stage that retains the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces;

a reaction mass assembly coupled to the stage mover assembly, the reaction mass assembly reducing the reaction forces in at least one degree of freedom that is transferred to the stage base, the reaction mass assembly including a Y reaction component and an X reaction component that moves relative to the Y reaction component, one of the reaction components moving about a Z axis relative to the stage base.

66. The stage assembly of claim 65 further comprising a reaction mover assembly that adjusts the position of one of the reaction components relative to the stage base about a Z axis.

67. The stage assembly of claim 65 wherein the X reaction component moves relative to the stage base with three degrees of freedom.

68. The stage assembly of claim 67 wherein the Y reaction component moves relative to the stage base with three degrees of freedom.

69. The stage assembly of claim 65 wherein the stage mover assembly comprises an X stage mover that moves the stage along an X axis, the X stage mover being coupled to the X reaction component so that movement of the stage by the X stage mover results in movement of the X reaction component along the X axis.

70. The stage assembly of claim 69 wherein the stage mover assembly comprises a Y stage mover that moves the stage along a Y axis, the Y stage mover being coupled to the X reaction component so that movement of the stage by the Y stage mover results in movement of the X reaction component along the Y axis.

71. The stage assembly of claim 65 further comprising a reaction mover assembly that adjusts the position of one of the reaction components relative to the stage base with two degrees of freedom.

72. The stage assembly of claim 65 further comprising a reaction mover assembly that adjusts the position of one of the reaction components relative to the stage base with three degrees of freedom.

73. The stage assembly of claim 65 further comprising a reaction mover assembly that adjusts the position of each of the reaction components relative to the stage base with three degrees of freedom.

74. The stage assembly of claim 65 further comprising a reaction mover assembly that adjusts the position of each of the reaction components relative to the stage base about the Z axis.

75. The stage assembly of claim 65 wherein the X reaction component includes a first X reaction mass and a second X reaction mass that move independently along an X axis relative to the Y reaction component.

76. The stage assembly of claim 65 further comprising a mass guide assembly that allows the X reaction component to move relative to the Y reaction component along an X axis and inhibits movement of the X reaction component relative to the Y reaction component along a Y axis.

77. The stage assembly of claim 65 wherein the X reaction component includes a pair of spaced apart X reaction masses and the Y reaction component includes a generally planar shaped reaction base.

78. The stage assembly of claim 65 wherein the X reaction component includes a pair of spaced apart X reaction masses and the Y reaction component includes a pair of spaced apart Y reaction masses.

79. The stage assembly of claim 78 further comprising a mass guide assembly that connects the X reaction masses to the Y reaction masses, allows the X reaction masses to move independently relative to the Y reaction masses along an X axis and inhibits movement of the X reaction masses relative to the Y reaction masses along a Y axis.

80. The stage assembly of claim 78 further comprising a reaction guide assembly that allows the Y reaction masses to move relative to the stage base along a Y axis and inhibits movement of the Y reaction masses along an X axis.

81. The stage assembly of claim 78 further comprising a reaction mover assembly that adjusts the position of the X reaction masses relative to the Y reaction masses along an X axis.

82. The stage assembly of claim 81 wherein the reaction mover assembly adjusts the position of the Y reaction masses and the X reaction masses relative to the stage base along a Y axis.

83. The stage assembly of claim 65 wherein the X reaction component includes a pair of spaced apart X reaction masses and the Y reaction component includes a reaction frame.

84. The stage assembly of claim 83 further comprising a mass guide assembly that connects the X reaction masses to the reaction frame, allows the X reaction masses to move independently relative to the reaction frame along an X axis and inhibits movement of the X reaction masses relative to the reaction frame along a Y axis.

85. The stage assembly of claim 84 further comprising a reaction guide assembly that allows the reaction frame to move relative to the stage base along the Y axis and inhibits movement of the reaction frame along the X axis.

86. The stage assembly of claim 84 further comprising a reaction mover assembly that adjusts the position of the X reaction masses relative to the reaction frame along the X axis.

87. The stage assembly of claim 86 further comprising a reaction mover assembly that adjusts the position of the reaction frame and the X reaction masses relative to the stage base along the Y axis.

88. The stage assembly of claim 84 wherein the reaction frame moves relative to the stage base about the Z axis.

89. The stage assembly of claim 84 further comprising a reaction mover assembly that adjusts the position of the reaction frame and the X reaction masses relative to the stage base about the Z axis.

90. The stage assembly of claim 65 wherein the X reaction component moves relative to the Y reaction component along an X axis, and the reaction components move concurrently in the same direction along a Y axis.

91. The stage assembly of claim 65 wherein the Y reaction component supports at least a portion of the X reaction component.

92. The stage assembly of claim 65 wherein the reaction components move along a Y axis to reduce the reaction force along the Y axis that is transferred to the stage base.

93. The stage assembly of claim 65 wherein the reaction components move concurrently along a Y axis to reduce the reaction force along the Y axis that is transferred to the stage base.

94. An exposure apparatus including the stage assembly of claim 65.

95. A process for manufacturing a device including the step of utilizing the exposure apparatus according to claim 94.

96. A process for making a wafer on which an image has been formed including the step of utilizing the exposure apparatus according to claim 94.

97. A stage assembly that moves a device relative to a stage base, the stage assembly comprising:

a stage that retains the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom; and

a reaction mass assembly including an X reaction component and a Y reaction component that are coupled to the stage mover assembly, the X reaction component moving relative to the Y reaction component, the Y reaction component including a generally planar shaped reaction base, the reaction mass assembly reducing the reaction forces in at least two degrees of freedom that are transferred to the stage base.

98. The stage assembly of claim 97 wherein the stage mover assembly moves the stage along a Y axis directly causing the X reaction component and the Y reaction component to move along the Y axis.

99. The stage assembly of claim 97 wherein one of the reaction components moves relative to the stage base with three degrees of freedom.

100. The stage assembly of claim 97 wherein each of the reaction components moves relative to the stage base with three degrees of freedom.

101. The stage assembly of claim 97 wherein the stage mover assembly comprises an X stage mover that moves the stage along an X axis, the X stage mover being coupled to the X reaction component so that movement of the stage by the X stage mover results in movement of the X reaction component along the X axis.

102. The stage assembly of claim 101 wherein the stage mover assembly comprises a Y stage mover that moves the stage along a Y axis, the Y stage mover being coupled to the X reaction component so that movement of the stage by the Y stage mover results in movement of the X reaction component along the Y axis.

103. The stage assembly of claim 97 further comprising a reaction mover assembly that adjusts the position of at least a portion of the reaction mass assembly relative to the stage base with one degree of freedom.

104. The stage assembly of claim 97 further comprising a reaction mover assembly that adjusts the position of at least a portion of the reaction mass assembly relative to the stage base with two degrees of freedom.

105. The stage assembly of claim 97 further comprising a reaction mover assembly that adjusts the position of at least a portion of the reaction mass assembly relative to the stage base with three degrees of freedom.

106. The stage assembly of claim 97 further comprising a reaction mover assembly that adjusts the position of the Y reaction component and the X reaction component relative to the stage base along the Y axis.

107. The stage assembly of claim 97 further comprising a reaction mover assembly that adjusts the position of one of the reaction components relative to the stage base about a Z axis.

108. The stage assembly of claim 97 further comprising a reaction mover assembly that adjusts the position of the X reaction component and the Y reaction component relative to the stage base about a Z axis.

109. The stage assembly of claim 97 wherein the X reaction component includes a first X reaction mass and a second X reaction mass that move independently along the X axis relative to the Y reaction component.

110. The stage assembly of claim 97 further comprising a mass guide assembly that allows the X reaction component to move relative to the Y reaction component along the X axis and inhibits movement of the X reaction component relative to the Y reaction component along the Y axis.

111. The stage assembly of claim 97 wherein the X reaction component includes a pair of spaced apart X reaction masses.

112. The stage assembly of claim 97 wherein the Y reaction component supports at least a portion of the X reaction component.

113. The stage assembly of claim 97 wherein the X reaction component moves relative to the Y reaction component along an X axis, and the reaction components moves concurrently in the same direction along a Y axis.

114. The stage assembly of claim 113 further comprising a reaction mover assembly that adjusts the position of one of the reaction components relative to the stage base about a Z axis.

115. The stage assembly of claim 97 wherein the reaction components move along a Y axis to reduce the reaction force along the Y axis that is transferred to the stage base.

116. The stage assembly of claim 97 wherein the reaction components move concurrently along a Y axis to reduce the reaction force along the Y axis that is transferred to the stage base.

117. An exposure apparatus including the stage assembly of claim 97.

118. A process for manufacturing a device including the step of utilizing the exposure apparatus according to claim 117.

119. A process for making a wafer on which an image has been formed including the step of utilizing the exposure apparatus according to claim 117.

120. A stage assembly that moves a device relative to a stage base, the stage assembly comprising:

a stage that retains the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom; and

a reaction mass assembly including an X reaction component and a Y reaction component that are coupled to the stage mover assembly, the Y reaction component including a reaction frame, the X reaction component moving relative to the Y reaction component, the reaction mass assembly reducing the reaction forces in at least two degrees of freedom that are transferred to the stage base.

121. The stage assembly of claim 120 wherein the stage mover assembly moves the stage along a Y axis directly causing the X reaction component and the Y reaction component to move along the Y axis.

122. The stage assembly of claim 120 wherein one of the reaction components moves relative to the stage base with three degrees of freedom.

123. The stage assembly of claim 120 wherein each of the reaction components moves relative to the stage base with three degrees of freedom.

124. The stage assembly of claim 120 wherein the stage mover assembly comprises an X stage mover that moves the stage along an X axis, the X stage mover being coupled to the X reaction component so that movement of the stage by the X stage mover results in movement of the X reaction component along the X axis.

125. The stage assembly of claim 124 wherein the stage mover assembly comprises a Y stage mover that moves the stage along a Y axis, the Y stage mover being coupled to the X reaction component so that movement of the stage by the Y stage mover results in movement of the X reaction component along the Y axis.

126. The stage assembly of claim 120 further comprising a reaction mover assembly that adjusts the position of at least a portion of the reaction mass assembly relative to the stage base with two degrees of freedom.

127. The stage assembly of claim 120 further comprising a reaction mover assembly that adjusts the position of at least a portion of the reaction mass assembly relative to the stage base with three degrees of freedom.

128. The stage assembly of claim 120 further comprising a reaction mover assembly that adjusts the position of the Y reaction component and the X reaction component relative to the stage base along the Y axis.

129. The stage assembly of claim 120 further comprising a reaction mover assembly that adjusts the position of one of the reaction components relative to the stage base about a Z axis.

130. The stage assembly of claim 120 further comprising a reaction mover assembly that adjusts the position of the X reaction component and the Y reaction component relative to the stage base about a Z axis.

131. The stage assembly of claim 120 further comprising a mass guide assembly that allows the X reaction component to move relative to the Y reaction component along the X axis and inhibits movement of the X reaction component relative to the Y reaction component along the Y axis.

132. The stage assembly of claim 120 wherein the Y reaction component supports at least a portion of the X reaction component.

133. The stage assembly of claim 120 wherein the X reaction component moves relative to the Y reaction component along an X axis, and the reaction components moving concurrently in the same direction along a Y axis.

134. The stage assembly of claim 120 wherein the X reaction component includes a pair of spaced apart X reaction masses.

135. The stage assembly of claim 120 wherein the reaction components move along a Y axis to reduce the reaction force along the Y axis that is transferred to the stage base.

136. The stage assembly of claim 120 wherein the reaction components move concurrently along a Y axis to reduce the reaction force along the Y axis that is transferred to the stage base.

137. An exposure apparatus including the stage assembly of claim 120.

138. A process for manufacturing a device including the step of utilizing the exposure apparatus according to claim 137.

139. A process for making a wafer on which an image has been formed including the step of utilizing the exposure apparatus according to claim 137.

140. A stage assembly that moves a device relative to a stage base, the stage assembly comprising:

a stage that retains the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom; and

a reaction mass assembly including an X reaction component and a Y reaction component that are coupled to the stage mover assembly, the X reaction component moving relative to the Y reaction component, the Y reaction component supporting at least a portion of the X reaction component, the reaction mass assembly reducing the reaction forces in at least two degrees of freedom that are transferred to the stage base.

141. The stage assembly of claim 140 wherein the stage mover assembly moves the stage along a Y axis directly causing the X reaction component and the Y reaction component to move along the Y axis.

142. The stage assembly of claim 140 wherein the X reaction component moves relative to the stage base with three degrees of freedom.

143. The stage assembly of claim 142 wherein the Y reaction component moves relative to the stage base with three degrees of freedom.

144. The stage assembly of claim 140 wherein the stage mover assembly comprises an X stage mover that moves the stage along the X axis, the X stage mover being coupled to the X reaction component so that movement of the stage by the X stage mover results in movement of the X reaction component along the X axis.

145. The stage assembly of claim 144 wherein the stage mover assembly comprises a Y stage mover that moves the stage along the Y axis, the Y stage mover being coupled to the X reaction component so that movement of the stage by the Y stage mover results in movement of the X reaction component along the Y axis.

146. The stage assembly of claim 140 further comprising a reaction mover assembly that adjusts the position of at least a portion of the reaction mass assembly relative to the stage base with two degrees of freedom.

147. The stage assembly of claim 140 further comprising a reaction mover assembly that adjusts the position of at least a portion of the reaction mass assembly relative to the stage base with three degrees of freedom.

148. The stage assembly of claim 140 further comprising a reaction mover assembly that adjusts the position of the Y reaction component and the X reaction component relative to the stage base along the Y axis.

149. The stage assembly of claim 140 further comprising a reaction mover assembly that adjusts the position of one of the reaction components relative to the stage base about a Z axis.

150. The stage assembly of claim 140 further comprising a reaction mover assembly that adjusts the position of the X reaction component and the Y reaction component relative to the stage base about a Z axis.

151. The stage assembly of claim 140 wherein the X reaction component includes a first X reaction mass and a second X reaction mass that move independently along the X axis relative to the Y reaction component.

152. The stage assembly of claim 140 further comprising a mass guide assembly that allows the X reaction component to move relative to the Y reaction component along the X axis and inhibits movement of the X reaction component relative to the Y reaction component along the Y axis.

153. The stage assembly of claim 140 wherein the X reaction component includes a pair of spaced apart X reaction masses and the Y reaction component includes a generally planar shaped reaction base.

154. The stage assembly of claim 140 wherein the X reaction component includes a pair of spaced apart X reaction masses and the Y reaction component includes a pair of spaced apart Y reaction masses.

155. The stage assembly of claim 154 further comprising a mass guide assembly that connects the X reaction masses to the Y reaction masses, allows the X reaction masses to move independently relative to the Y reaction masses along the X axis and inhibits movement of the X reaction masses relative to the Y reaction masses along the Y axis.

156. The stage assembly of claim 154 further comprising a reaction guide assembly that allows the Y reaction masses to move relative to the stage base along the Y axis and inhibits movement of the Y reaction masses along the X axis.

157. The stage assembly of claim 154 further comprising a reaction mover assembly that adjusts the position of the X reaction masses relative to the Y reaction masses along the X axis.

158. The stage assembly of claim 157 wherein the reaction mover assembly adjusts the position of the Y reaction masses and the X reaction masses relative to the stage base along the Y axis.

159. The stage assembly of claim 140 wherein the X reaction component includes a pair of spaced apart X reaction masses and the Y reaction component includes a reaction frame.

160. The stage assembly of claim 140 wherein the reaction components move along a Y axis to reduce the reaction force along the Y axis that is transferred to the stage base.

161. The stage assembly of claim 140 wherein the reaction components move concurrently along a Y axis to reduce the reaction force along the Y axis that is transferred to the stage base.

162. An exposure apparatus including the stage assembly of claim 140.

163. A process for manufacturing a device including the step of utilizing the exposure apparatus according to claim 162.

164. A process for making a wafer on which an image has been formed including the step of utilizing the exposure apparatus according to claim 162.

165. A method for making a stage assembly that moves a device relative to a stage base, the method comprising the steps of:

retaining the device with a stage;

generating reaction forces by moving the stage with two degrees of freedom with a stage mover assembly;

coupling a reaction mass assembly to the stage mover assembly, the reaction mass assembly including a Y reaction component and an X reaction component that moves relative to the Y reaction component, the reaction mass assembly reducing the reaction forces that are transferred to the stage base; and

adjusting the position of at least one of the reaction components relative to the stage base about a Z axis with a reaction mover assembly.

166. The method of claim 165 wherein the step of generating reaction forces includes the step of providing an X stage mover that moves the stage along an X axis, the X stage mover being coupled to the X reaction component so that movement of stage by the X stage mover results in movement of the X reaction component along the X axis.

167. The method of claim 166 wherein the step of generating reaction forces includes the step of providing a Y stage mover that moves the stage along a Y axis, the Y stage mover being coupled to the X reaction component so that movement of the stage by the Y stage mover results in movement of the X reaction component along the Y axis.

168. The method of claim 165 wherein the step of coupling the reaction mass assembly includes the step of moving the X reaction component and the Y reaction component concurrently in a same direction along a Y axis.

169. The method of claim 165 wherein the step of adjusting the position includes adjusting the position of the X reaction component relative to the Y reaction component along an X axis.

170. The method of claim 165 wherein the step of adjusting the position includes adjusting the position of the Y reaction component and the X reaction component concurrently relative to the stage base along a Y axis.

171. The method of claim 165 wherein the step of adjusting the position includes adjusting the position of the Y reaction component and the X reaction component relative to the stage base along an X axis and about the Z axis.

172. The method of claim 165 wherein the step of adjusting the position includes adjusting the position of the X reaction component relative to the Y reaction component along an X axis, and adjusting the position of the Y reaction component and the X reaction component relative to the stage base along a Y axis.

173. The method of claim 165 wherein the step of coupling a reaction mass assembly includes the step of providing a first X reaction mass and a second X reaction mass that move independently along an X axis.

174. The method of claim 173 wherein the step of coupling a reaction mass assembly includes the step of coupling a reaction frame to the X reaction masses so that the reaction frame moves relative to the stage base along the X axis.

175. The method of claim 174 wherein the step of adjusting the position includes adjusting the position of each X reaction mass relative to the reaction frame along the X axis, and adjusting the position of the reaction frame and the X reaction masses relative to the stage base along the Y axis.

176. The method of claim 174 including the step of adjusting the position of the X reaction masses and the reaction frame relative to the stage base along the X axis and along the Y axis with the reaction mover assembly.

177. The method of claim 165 wherein the step of adjusting the position includes adjusting the position of the reaction mass assembly relative to the stage base along the X axis.

178. The method of claim 165 wherein the step of adjusting the position includes adjusting the position of the reaction mass assembly relative to the stage base along the X axis and along the Y axis.

179. A method for making an exposure apparatus that forms an image on a wafer, the method comprising the steps of:

providing an irradiation apparatus that irradiates the wafer with radiation to form the image on the wafer; and

providing the stage assembly made by the method of claim 165.

180. A method of making a wafer utilizing the exposure apparatus made by the method of claim 179.

181. A method of making a device including at least the exposure process:

wherein the exposure process utilizes the exposure apparatus made by the method of claim 179.