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Semiconductor manufacturing line monitoring system

  • US 6,757,580 B2
  • Filed: 03/19/2003
  • Issued: 06/29/2004
  • Est. Priority Date: 10/09/2002
  • Status: Expired due to Fees
First Claim
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1. A manufacturing line monitoring system for monitoring a manufacturing line including a plurality of manufacturing apparatuses, the monitoring system comprising:

  • collecting means for collecting information from each of the manufacturing apparatuses;

    first storage means for storing the information collected;

    first preparing means for preparing first information relating to results of manufacturing by each of the manufacturing apparatuses, based on the information stored;

    second preparing means for preparing second information relating to variations in the results of manufacturing, based on the first information;

    current operation information preparing means for preparing current operation information relating to current operation of each of the manufacturing apparatuses;

    first output means for outputting the first information, the second information, the current operation information linking the first information, the second information, and the current operation information with each other; and

    first transferring means for transferring first alarm information based on one of the first information, the second information, and the current operation information, said first output means including means for outputting the first information, the second information, and the current operation information by changing one of color, shape, and pattern to make the first information, the second information, and the current operation information visually recognizable by a user, wherein said first information includes rate of operation and output of products for at least one of said manufacturing apparatuses, said second information is operation history for at least one of said manufacturing apparatuses, and said current operation information is current operation status for at least one of said manufacturing apparatuses. 2.The manufacturing line monitoring system according to claim 1, further comprising third preparing means for preparing third information relating to differences in results between the manufacturing apparatuses based on the first information, wherein the first output means includes means for outputting the first information, the second information, the third information, and the current operation information linking the first information, the second information, the third information, and the current operation information with each other.

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