Microgyroscope with integrated vibratory element
First Claim
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1. A method comprising:
- forming a first section of a microgyroscope having a first portion of a post and a first plurality of capacitors from a first substrate;
forming a second section of the microgyroscope having a second portion of the post and a second plurality of capacitors from a second substrate; and
attaching the first portion of the post to the second portion of the post; and
aligning the first plurality of capacitors to the second plurality of capacitors, such that the first plurality of capacitors are electrically isolated from the second plurality of capacitors.
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Abstract
A microgyroscope having a suspended vertical post uses the Coriolis force to detect the rotation rate. The microgyroscope consists of a single vertical post which is the rotation rate sensing element. The vertical post is formed from the same silicon wafers as the rest of the microgyroscope. A first portion of the vertical post and the clover-leaf structure are made from a first silicon wafer. A second portion of the vertical post and the baseplate are made from a second silicon wafer. The two portions are then bonded together to from the clover-leaf gyroscope with an integrated post structure.
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Citations
19 Claims
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1. A method comprising:
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forming a first section of a microgyroscope having a first portion of a post and a first plurality of capacitors from a first substrate;
forming a second section of the microgyroscope having a second portion of the post and a second plurality of capacitors from a second substrate; and
attaching the first portion of the post to the second portion of the post; and
aligning the first plurality of capacitors to the second plurality of capacitors, such that the first plurality of capacitors are electrically isolated from the second plurality of capacitors. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A microgyroscope comprising:
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a post comprising first and second portions, the first portion being formed from a first substrate, the second portion being formed from a second substrate, the first portion of the post being bonded to the second portion;
a first plurality of capacitors formed from the first substrate; and
a baseplate formed from the second substrate, the first plurality of capacitors being bonded to the baseplate formed from the second substrate, at least one of the first plurality of capacitors and the baseplate being operative to provide electrostatic actuation of the post. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification