Integrated thin-film drive head for thermal ink-jet printer

• US 6,758,552 B1
• Filed: 12/06/1995
• Issued: 07/06/2004
• Est. Priority Date: 12/06/1995
• Status: Expired due to Fees

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Development Co. (HP Inc.)
• Inventors: Figueredo, Domingo A.
• Primary Examiner(s): Barlow, John
• Assistant Examiner(s): BROOKE, MICHAEL S
• Application Number:
  US08/568,209
• Time in Patent Office: 3,135 Days
• Field of Search: 347/58, 347/59, 347/57, 347/53, 346/57, 346/56, 346/54, 346/20, 257/379, 257/350, 257/359
• US Class Current: 347/59
• CPC Class Codes: B41J 2/14129 Layer structure
• CPC Class Codes: B41J 2/1603 of the front shooter type
• CPC Class Codes: B41J 2/1628 dry etching
• CPC Class Codes: B41J 2/1642 thin film formation by CVD [chemical vapor deposition]
• CPC Class Codes: B41J 2/1646 thin film formation by sputtering
• CPC Class Codes: B41J 2202/13 Heads having an integrated circuit
• CPC Class Codes: H01L 27/0738 in combination with resistors only

Abstract

A thin-film ink-jet drive head provides a MOSTFT (metal oxide semiconductor thin-film transistor) transistor, a resistor and the interconnect between the two electrical components, all comprised of the same, multi-functional thin-film layer. Differing portions of the multi-functional thin-film layer function as (1) heating resistors to propel ink droplets from the printhead (2) ink MOSTFT transistors to selectively drive (fire) the resistors, and (3) direct conductive pathways between the drive transistors and the resistors.

Claims

1. A drive head for a thermal ink-jet printhead device comprising:

a transistor;

a heat transducer; and

a multi-functional layer having a first portion that functions as a channel of the transistor and having a second portion that functions as a portion of the heat transducer.

2. The drive head of claim 1 including an ink chamber assembly attached thereto, the ink chamber assembly including an ink barrier and a plate member positioned above the ink barrier, the plate member having an opening for ejecting an ink droplet therethrough.

3. The drive head of claim 2 further including a conformal layer defining a length of the heat transducer, and which conformal layer protects a portion of the heat transducer.

4. The drive head of claim 3 wherein the plate member opening is positioned above the second portion of the multi-functional layer.

5. The drive head of claim 1 wherein a third portion of the multi-functional layer is more conductive than the second portion of the multi-functional layer.

6. The drive head of claim 1 wherein the third portion of the multi-functional layer functions as a conductive pathway between the transistor and the heat transducer.

7. The drive head of claim 6 wherein the first portion of the multi-functional layer includes a region that is doped at a level significantly lower than the second portion.

8. The drive head of claim 6 including a conductive layer positioned above the center region of the first portion and above the third portion such that the center region of the first portion and the third portion are more conductive than the second portion.

9. The drive head of claim 1 wherein the heat transducer is a resistor.

10. The drive head of claim 1, further comprising a gate layer above a center region of the first portion of the multi-functional layer, wherein the gate layer.

11. The drive head of claim 1 wherein the second portion is doped at a level such that the second portion functions as the heat transducer.

12. A drive head for a thermal ink-jet printhead device comprising:

a substrate;

a transistor attached to the substrate;

a resistor attached to the substrate; and

an uninterrupted layer of conductive material inter-connected between and forming at least a part of the transistor and the resistor and

wherein preselected portions of the uninterrupted layer of conductive material are doped at different levels such that a first portion of the layer functions as a channel of the transistor and a second portion functions as part of the resistor.

13. The drive head of claim 12 including an ink chamber assembly, the ink chamber assembly comprising an ink barrier positioned above the uninterrupted layer of conductive material and a plate member positioned above the ink barrier, the plate member having at least one opening positioned above the resistor for ejecting a droplet therethrough.

14. The drive head of claim 12 wherein the uninterrupted layer of conductive material includes a third portion that functions as a conductive pathway between the first portion and the second portion.

15. The drive head of claim 14 including a conductive layer positioned above a center region of the first portion and above the third portion.

16. A method for fabricating a drive head for a thermal ink-jet printhead device comprising the steps of:

providing a substrate;

attaching to the substrate a transistor and a resistor; and

inter-connecting the transistor with an uninterrupted layer of conductive material so that a first portion of the layer functions as a channel of the transistor and a second portion of the layer functions as the resistor.

17. The method of claim 16 wherein the uninterrupted layer is inter-connected to the transistor and to the resistor so that a third portion of the uninterrupted layer is integral with the transistor and the resistor and functions as an inter-connection therebetween.

18. The method of claim 16 including the step of selectively doping portions of the uninterrupted layer of conductive material.

19. The method of claim 18 including the step of forming a conductive layer positioned to contact the gate layer and a portion of the exposed second portion of the multi-functional layer.