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Substrate transport apparatus, pod and method

  • US 6,758,876 B2
  • Filed: 12/04/2001
  • Issued: 07/06/2004
  • Est. Priority Date: 12/04/2000
  • Status: Expired due to Fees
First Claim
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1. A method for transporting substrates between a plurality of processes, comprising:

  • loading the substrates into a pod from an atmosphere of a first process;

    contacting the substrates to the pod directly or indirectly, the pod having a conductive part so as to enable static charges to be drained from the pod;

    removing at least one contaminant of moisture, particulate substances and chemical substances intermittently or continually so as to expose the substrates to a controlled atmosphere while the substrates are retained in the pod; and

    unloading the substrates from the pod for introduction to a second process.

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