Gas port sealing for CVD/CVI furnace hearth plates

• US 6,758,909 B2
• Filed: 06/05/2001
• Issued: 07/06/2004
• Est. Priority Date: 06/05/2001
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Miller, Brian J., Jonnalagadda, Rajanikant
• Primary Examiner(s): Lund, Jeffrie R.
• Application Number:
  US09/874,653
• Publication Number:
  US 20020179011A1
• Time in Patent Office: 1,127 Days
• Field of Search: 118/715, 118/724, 118/725, 118/728
• US Class Current: 118/715
• CPC Class Codes: C23C 16/045 Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45563 Gas nozzles
• CPC Class Codes: C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A method and apparatus for sealing gas ports in CVD/CVI furnaces and processes is disclosed. A fluid direction nozzle (160) is positioned between a top lip (101) of a gas inlet port (100) delivering a reactant gas (G) to a furnace compartment (200) in a CVD/CVI furnace (10) and corresponding holes (151) of a CVD/CVI process apparatus such as a hearth plate (150). The fluid direction nozzle 160 reduces leakage of reactant gases (G) and ensures a smooth transition of gas flow direction between the gas inlet port (100) and the corresponding holes (151). CVD/CVI process times are significantly reduced with the use of the reusable/replaceable flow direction nozzles (160).

Claims

1. A gas inlet port assembly for a CVD/CVI furnace having a furnace compartment and a CVD/CVI process apparatus with a plurality of holes, said gas inlet port assembly comprising:

a plurality of gas inlet ports delivering process gas to said furnace compartment; and

a plurality of flow direction nozzles positioned between said holes of said CVD/CVI process apparatus and said gas inlet ports.

2. The gas inlet port assembly according to claim 1, further comprising:

a gas inlet port upper lip respectively provided on each of said gas inlet ports; and

a pair of annular sealing discs respectively provided for each of said flow direction nozzles, said flow direction nozzles sealingly engaging said gas inlet port upper lip with a corresponding hole of said CVD/CVI process apparatus.

3. The gas inlet port assembly according to claim 2, wherein a first sealing disc of said pair of annular sealing discs is positioned adjacent to an outlet side of each flow direction nozzle and a second sealing disc is positioned adjacent to an inlet side of said flow direction nozzle.

4. The gas inlet port assembly according to claim 3, wherein said sealing discs are flexible graphite sealing discs.

5. The gas inlet port assembly according to claim 1, wherein said holes are located in a hearth plate of said CVD/CVI process apparatus, and said holes are chamfered holes formed on a bottom of said hearth plate.

6. The gas inlet port assembly according to claim 1, wherein each of said flow direction nozzles includes:

a gas inlet port sealing portion, said gas inlet port sealing portion extending into said respective gas inlet ports;

a support shoulder; and

a nozzle portion.

7. The gas inlet port assembly according to claim 6, wherein said nozzle portion extends into said holes of said CVD/CVI process apparatus.

8. The gas inlet port assembly according to claim 6, wherein said gas inlet ports include a protective ceramic tubing having an upper edge positioned along an interior diameter of said gas inlet ports, said nozzle portion of said respective flow direction nozzles sealingly engaging the upper edge of said protective ceramic tubing.

9. The gas inlet port assembly according to claim 8, wherein said protective ceramic tubing is mullite tubing.

10. The gas inlet port assembly according to claim 1, wherein said flow direction nozzles are made of graphite.

11. A flow direction nozzle assembly for a CVD/CVI furnace, said flow direction nozzle assembly comprising:

a flow direction nozzle, wherein said flow direction nozzle is an annular shaped collar including

a gas inlet port sealing portion adjacent to a gas inlet of said collar;

a support shoulder extending in a direction away from said gas inlet of said collar; and

a nozzle portion, wherein said gas inlet sealing portion, said nozzle portion and said shoulder portion are formed of an integrally formed, single piece of molded, cast or machined graphite.

12. The flow direction nozzle assembly according to claim 11, wherein said gas inlet port sealing portion surrounds the gas inlet and the nozzle portion surrounds a gas outlet.

13. The flow direction nozzle assembly according to claim 12, further comprising at least one sealing disc.

14. The flow direction nozzle assembly according to claim 13, wherein said at least one sealing disc includes a first sealing disc positioned adjacent to said flow direction nozzle and a second sealing disc positioned adjacent to said gas inlet sealing portion of said flow direction nozzle.

15. The flow direction nozzle assembly according to claim 13, wherein said sealing discs are flexible graphite sealing discs and said flow direction nozzle is made from graphite.

16. The flow direction nozzle assembly according to claim 11, further comprising a chamfered surface along said gas inlet sealing portion.

17. The flow direction nozzle assembly according to claim 16, wherein said support shoulder extends in a direction away from and substantially orthogonal to said nozzle portion of said collar.

18. The flow direction nozzle assembly according to claim 17, further comprising a gas inlet tube, wherein said inlet sealing portion includes a chamfered section surrounding said gas inlet of said collar, and said gas inlet sealing portion is operatively engaged with an outlet of the gas inlet tube.

19. The flow direction nozzle assembly according to claim 16, wherein said gas inlet sealing portion includes a chamfered section surrounding said gas inlet of said collar.