Multi-grid ion beam source for generating a highly collimated ion beam

• US 6,759,807 B2
• Filed: 04/04/2002
• Issued: 07/06/2004
• Est. Priority Date: 04/04/2002
• Status: Expired due to Fees

• Current Assignee: Veeco Instruments Incorporated
• Original Assignee: Veeco Instruments Incorporated
• Inventors: Wåhlin, Erik Karl Kristian
• Primary Examiner(s): VU, DAVID HUNG
• Application Number:
  US10/117,004
• Publication Number:
  US 20030193294A1
• Time in Patent Office: 824 Days
• Field of Search: 313/361.1, 313/361.2, 315/111.21, 315/111.31
• US Class Current: 315/111.21
• CPC Class Codes: H01J 27/024 Extraction optics, e.g. grids

Abstract

A multi-grid ion beam source has an extraction grid, an acceleration grid, a focus grid, and a shield grid to produce a highly collimated ion beam. A five grid ion beam source is also disclosed having two shield grids. The extraction grid has a high positive potential and covers a plasma chamber containing plasma. The acceleration grid has a non-positive potential. The focus grid is positioned between the acceleration grid and the shield grid. The combination of the extraction grid and the acceleration grid extracts ions from the plasma. The focus grid acts to change momentum of the ions exiting the acceleration grid, focusing the ions into a more collimated ion beam than previous approaches. In one embodiment, the focus grid has a large positive potential. In another embodiment, the focus grid has a large negative potential.

Claims

1. A grid optics system for extracting ions from a plasma source and propelling the ions toward a target in a substantially collimated ion beam directed along an axis extending between the plasma source and the target, the grid optics system comprising:

an extraction grid spaced downstream from the plasma source along the axis and substantially normal to the axis, the extraction grid having a positive electrical extraction potential;

an acceleration grid spaced downstream from the extraction grid along the axis between the extraction grid and the target and substantially normal to the axis, the acceleration grid having a non-positive electrical acceleration potential, the electrical extraction potential and the electrical acceleration potential operating in combination to extract the ions from the plasma source;

a focus grid spaced downstream from the acceleration grid along and substantially normal to the axis between the acceleration grid and the target to focus the ions exiting the acceleration grid into a substantially collimated ion beam along the axis; and

a shield grid spaced downstream from the focus grid along and substantially normal to the axis between the focus grid and the target to locate a neutralization plane near the shield grid.

2. The grid optics system of claim 1 wherein each of the extraction grid, the acceleration grid, the shield grid, and the focus grid is planar.

3. The grid optics system of claim 1 wherein the focus grid has a negative electrical focus potential.

4. The grid optics system of claim 3 wherein the negative electrical focus potential has a magnitude substantially within the range of two to three times the difference between the electrical extraction potential and the electrical acceleration potential.

5. The grid optics system of claim 1 wherein the focus grid has a positive electrical focus potential.

6. The grid optics system of claim 5 wherein the positive electrical focus potential has a magnitude substantially within the range of 50% to 90% of the difference between the electrical extraction potential and the electrical acceleration potential.

7. The grid optics system of claim 5 wherein the shield grid has a negative electrical shield potential.

8. The grid optics system of claim 1 wherein the focus grid has a tuned grid potential such that an angle of divergence of the substantially collimated ion beam is minimized.

9. The grid optics system of claim 8 wherein the shield grid has an electrical shield potential and the tuned grid potential is determined by fixing the electrical extraction potential, the electrical acceleration potential and the shield potential and by altering the tuned grid potential until the angle of divergence of the substantially collimated ion beam is minimized.

10. The grid optics system of claim 1 wherein the shield grid is a first shield grid and further comprising:

a second shield grid spaced between the acceleration grid and the focus grid.

11. The grid optics system of claim 10 wherein the focus grid has a tuned grid potential such that an angle of divergence of the substantially collimated ion beam is minimized.

12. The grid optics system of claim 11 wherein first shield grid has a first electrical shield potential, the second shield grid has a second electrical shield potential, and the tuned grid potential is determined by fixing the electrical extraction potential, the electrical acceleration potential, the first shield potential and the second shield potential and by altering the tuned grid potential until the angle of divergence of the substantially collimated ion beam is minimized.

13. A method of tuning a focus grid potential in an ion beam source, the ion beam source being capable of generating a substantially collimated ion beam that sends ions toward a target along an axis extending between a plasma source and the target, the method comprising:

providing an extraction grid spaced downstream from the plasma source along the axis and substantially normal to the axis, the extraction grid having a positive electrical extraction potential;

providing an acceleration grid spaced downstream from the extraction grid along the axis between the extraction grid and the target and substantially normal to the axis, the acceleration grid having a non-positive electrical acceleration potential;

providing a focus grid spaced downstream from the acceleration grid along and substantially normal to the axis between the acceleration grid and the target to focus the ions exiting the acceleration grid into a substantially collimated ion beam along the axis, the focus grid having an electrical focus potential;

providing a shield grid spaced downstream from the focus grid along and substantially normal to the axis between the focus grid and the target;

the shield grid having an electrical shield potential;

detecting an angle of divergence of the ion beam; and

altering the electrical focus potential until the detected angle of divergence of the ion beam is minimized.

14. The method of claim 13 wherein the shield grid is a first shield grid having a first electrical shield potential and further comprising:

providing a second shield grid between the acceleration grid and the focus grid along and substantially normal to the axis between the focus grid and the target;

the second shield grid having a second electrical shield potential.

15. An ion beam source for generating a substantially collimated ion beam sending ions toward a target along an axis extending between a plasma source and the target, the ion beam source comprising:

an extraction grid spaced downstream from the plasma source along the axis and substantially normal to the axis, the extraction grid having a positive electrical extraction potential;

an acceleration grid spaced downstream from the extraction grid along the axis between the extraction grid and the target and substantially normal to the axis, the acceleration grid having a non-positive electrical acceleration potential, the electrical extraction potential and the electrical acceleration potential operating in combination to extract the ions from the plasma source;

a focus grid spaced downstream from the acceleration grid along and substantially normal to the axis between the acceleration grid and the target to focus the ions exiting the acceleration grid by changing momentum of the ions along the axis; and

a shield grid spaced downstream from the focus grid along and substantially normal to the axis between the focus grid and the target to locate a neutralization plane near the shield grid.

16. The ion beam source of claim 15 wherein each of the extraction grid, the acceleration grid, the shield grid, and the focus grid is planar.

17. The ion beam source of claim 15 wherein the focus grid has a negative electrical focus potential.

18. The ion beam source of claim 17 wherein the negative electrical focus potential has a magnitude substantially within the range of two to three times the difference between the electrical extraction potential and the electrical acceleration potential.

19. The ion beam source of claim 15 wherein the focus grid has a positive electrical focus potential.

20. The ion beam source of claim 19 wherein the positive electrical focus potential has a magnitude substantially within the range of 50% to 90% of the difference between the electrical extraction potential and the electrical acceleration potential.

21. The ion beam source of claim 19 wherein the shield grid has a negative electrical shield potential.

22. The ion beam source of claim 15 wherein the focus grid has a tuned grid potential such that an angle of divergence of the substantially collimated ion beam is minimized.

23. The ion beam source of claim 22 wherein the shield grid has an electrical shield potential and the tuned grid potential is determined by fixing the electrical extraction potential, the electrical acceleration potential and the shield potential and by altering the tuned grid potential until the angle of divergence of the substantially collimated ion beam is minimized.

24. The ion beam source of claim 15 wherein the shield grid is a first shield grid and further comprising:

a second shield grid spaced between the acceleration grid and the focus grid.

25. The ion beam source of claim 24 wherein the focus grid has a tuned grid potential such that an angle of divergence of the substantially collimated ion beam is minimized.

26. The ion beam source of claim 25 wherein first shield grid has a first electrical shield potential, the second shield grid has a second electrical shield potential, and the tuned grid potential is determined by fixing the electrical extraction potential, the electrical acceleration potential, the first shield potential and the second shield potential and by altering the tuned grid potential until the angle of divergence of the substantially collimated ion beam is minimized.

27. A method of generating a substantially collimated ion beam sending ions toward a target along an axis extending between a plasma source and the target, the method comprising:

applying a positive electrical extraction potential to an extraction grid spaced downstream from the plasma source along the axis and substantially normal to the axis;

applying a non-positive electrical extraction potential to an acceleration grid spaced downstream from the extraction grid along the axis between the extraction grid and the target and substantially normal to the axis, the electrical extraction potential and the electrical acceleration potential operating in combination to extract the ions from the plasma source;

applying an electrical focus potential to a focus grid spaced downstream from the acceleration grid along and substantially normal to the axis between the acceleration grid and the target to focus the ions exiting the acceleration grid by changing momentum of the ions along the axis; and

applying an electrical shield potential to a shield grid spaced downstream from the focus grid along and substantially normal to the axis between the focus grid and the target to locate a neutralization plane near the shield grid.

28. The method of claim 27 wherein each of the extraction grid, the acceleration grid, the shield grid, and the focus grid is planar.

29. The method of claim 27 wherein the operation of applying an electrical focus potential comprises:

applying a negative electrical focus potential to the focus grid.

30. The method of claim 29 wherein the negative electrical focus potential has a magnitude substantially within the range of two to three times the difference between the electrical extraction potential and the electrical acceleration potential.

31. The method of claim 27 wherein the operation of applying an electrical focus potential comprises:

applying a positive electrical focus potential to the focus grid.

32. The method of claim 31 wherein the positive electrical focus potential has a magnitude substantially within the range of 50% to 90% of the difference between the electrical extraction potential and the electrical acceleration potential.

33. The method of claim 27 wherein the operation of applying an electrical shield potential comprises:

applying a negative electrical shield potential.

34. A grid optics system for extracting ions from a plasma source and propelling the ions toward a target in a substantially collimated ion beam directed along an axis extending between the plasma source and the target, the grid optics system comprising:

extracting means for extracting the ions from the plasma;

focusing means for focusing the ions exiting the extracting means by changing momentum of the ions along the axis, the focusing means being positioned between the extracting means and the target; and

shielding means for locating a neutralization plane near the shielding means, the shielding means being positioned between the focusing means and the target.

35. The grid optics system of claim 34 wherein the shielding means is a first shielding means and further comprising:

a second shielding means positioned between the focusing means and the extracting means for shielding the extraction means from backstreaming electrons.