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Micromirror actuator

  • US 6,760,143 B2
  • Filed: 06/18/2002
  • Issued: 07/06/2004
  • Est. Priority Date: 06/23/2001
  • Status: Active Grant
First Claim
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1. A micromirror actuator comprising:

  • a substrate having protrusions;

    spring units elastically supported by the protrusions;

    a micromirror connected to the spring units and operative to rotate;

    trenches formed in the substrate at either side of the protrusions to correspond to a surface of the micromirror; and

    lower electrodes formed in each of the trenches.

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