Micromirror actuator
First Claim
Patent Images
1. A micromirror actuator comprising:
- a substrate having protrusions;
spring units elastically supported by the protrusions;
a micromirror connected to the spring units and operative to rotate;
trenches formed in the substrate at either side of the protrusions to correspond to a surface of the micromirror; and
lower electrodes formed in each of the trenches.
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Abstract
A micromirror actuator includes: a substrate; spring units elastically supported by protrusion formed on the substrate; a micromirror connected to the spring units and formed to be capable of rotating; trenches formed in the substrate at either side of the protrusions to correspond to the surface of the micromirror; and lower electrodes formed in each of the trenches. Accordingly, it is possible to expand the range of the driving angle of the micromirror with the use of a lower voltage.
17 Citations
8 Claims
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1. A micromirror actuator comprising:
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a substrate having protrusions;
spring units elastically supported by the protrusions;
a micromirror connected to the spring units and operative to rotate;
trenches formed in the substrate at either side of the protrusions to correspond to a surface of the micromirror; and
lower electrodes formed in each of the trenches. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A micromirror actuator comprising:
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a substrate having protrusions on its upper main surface;
spring units elastically supported by the protrusion;
a micromirror connected to the spring units and operative to rotate;
trenches formed in the main upper surface of the substrate at either side of the protrusions to correspond to a surface of the micromirror; and
lower electrodes formed in each of the trenches.
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Specification