Articulated MEMS electrostatic rotary actuator

• US 6,760,144 B2
• Filed: 12/04/2002
• Issued: 07/06/2004
• Est. Priority Date: 12/05/2001
• Status: Expired due to Term

• Current Assignee: Lumentum Operations, LLC (Lumentum Holdings Inc.)
• Original Assignee: JDS Uniphase Corporation (Lumentum Holdings Inc.)
• Inventors: Mahadevan, Ramaswamy, Wood, Robert, Hill, Edward, Dhuler, Vijayakumar Rudrappa
• Primary Examiner(s): Ben, Loha
• Application Number:
  US10/309,800
• Publication Number:
  US 20040008400A1
• Time in Patent Office: 580 Days
• Field of Search: 359/290, 359/291, 359/295, 359/245, 359/198, 359/223, 310/90, 310/309, 310/36, 216/2, 216/24, 216/33, 257/415, 257/420
• US Class Current: 359/290
• CPC Class Codes: B81B 3/0062 Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A micro-electro-mechanical device designed such that the actuating means are only mechanically coupled to the optical components. The device includes a substrate, a mirror supported above the substrate, and a rotatory actuator also supported above the substrate. The mirror and actuator are mechanically coupled via a torsional coupling hinge such that the mirror can be angled and/or tilted by electrostatically driving the rotatory actuator. Advantageously, the micro-mirrors and actuator are fabricated from the same layer during the micro-machining fabrication process. In one embodiment, the mirror is rotatable about a fixed rotation axis. In another embodiment, the mirror is freely rotatable.

Claims

1. A micro-electro-mechanical device comprising:

a substrate;

a mirror supported above the substrate, the mirror including a first plate having a reflective coating deposited thereon and configured to tilt about a first rotation axis; and

an actuator for controlling a tilt of the first plate, the actuator including a second other plate supported above the substrate, the second plate configured to tilt about a second other rotation axis, the first and second plates being mechanically coupled via a torsional coupling hinge.

2. A micro-electro-mechanical device according to claim 1, wherein the first plate, the second plate, and the torsional coupling hinge are all fabricated from a same layer during a micro-machining fabrication process.

3. A micro-electromechanical device according to claim 1, wherein the actuator comprises an electrostatic actuator.

4. A micro-electro-mechanical device according to claim 1, wherein the first and second plates are suspended above the substrate via torsional hinges.

5. A micro-electro-mechanical device according to claim 4, wherein the torsional hinges comprise a first torsional hinge co-axial with the first axis and a second torsional hinge co-axial with the second axis.

6. A micro-electro-mechanical device according to claim 5, comprising an anchor disposed on the substrate and coupled to the first plate via the first torsional hinge.

7. A micro-electro-mechanical device according to claim 4, wherein the torsional hinges comprise a mirror torsional hinge having a rotation axis at approximately 45 degrees to the first axis.

8. A micro-electro-mechanical device according to claim 1, wherein the first and second axes bisect a length of the first and second plates, respectively.

9. A micro-electro-mechanical device according to claim 1, wherein the first axis bisects a length of the first plate and the second axis is disposed at an end of the second plate.

10. A micro-electro-mechanical device according to claim 1, wherein the first axis is disposed at an end of the first plate and the second axis bisects a length of the second plate.

11. A micro-electro-mechanical device according to claim 1, wherein the first axis is disposed at an end of the first plate and the second axis is disposed at an end of the second plate.

12. A micro-electro-mechanical device according to claim 1, comprising first and second lower electrodes disposed on the substrate below the second plate for tilting the second plate about the second axis.

13. A micro-electro-mechanical device according to claim 12, comprising an upper electrode deposited on the second plate.

14. A micro-electro-mechanical device according to claim 13, wherein at least one of the second plate and the upper electrode comprises a hollow section.

15. A micro-electro-mechanical device according to claim 1, comprising a single lower electrode disposed on the substrate below the second plate for tilting the second plate about the second axis.

16. A micro-electro-mechanical device according to claim 1, wherein a distance from the first axis to an end of the first plate is smaller than a distance from the second axis to an end of the second plate.

17. A micro-electro-mechanical device according to claim 1, wherein the actuator comprises a third plate coupled to the first plate opposite the second plate via another torsional coupling hinge, the third plate supported above the substrate and configured to tilt about a third other rotation axis.

18. A micro-electro-mechanical device according to claim 17, comprising a fulcrum coupled to the substrate and coincident with the first rotation axis.

19. A micro-electro-mechanical device according to claim 1, including addressing circuitry coupled to the substrate to selectively apply power to the actuator.

20. A micro-electro-mechanical device according to claim 1, comprising a plurality of other mirrors supported above the substrate in a linear array, each other mirror including a mirror plate having a reflective coating deposited thereon and configured to tilt about a mirror rotation axis.

21. A micro-electro-mechanical device according to claim 20, wherein each mirror rotation axis is a same fixed rotation axis parallel to the longitudinal axis of the array.

22. A micro-electro-mechanical device according to claim 20, wherein each mirror rotation axis coincides with one of two fixed, parallel, spaced apart rotation axes that are parallel to the longitudinal axis of the array.

23. A micro-electro-mechanical device according to claim 22, comprising a plurality of actuators for moving the plurality of other mirrors, each actuator including an actuator plate supported above the substrate and configured to tilt about an actuator rotation axis, the mirror plates and actuator plates mechanically.

24. A micro-electro-mechanical device according to claim 23, wherein the actuators for adjacent mirrors are staggered on opposite sides of a central region defined by the two fixed, parallel, spaced apart rotation axes.

25. A micro-electro-mechanical device according to claim 1, wherein the device is a piano MEMS having a staggered actuator arrangement.

26. A micro-electro-mechanical device according to claim 1, wherein the mirror is supported by a gimbal via a mirror torsional hinge.

27. A micro-electro-mechanical device according to claim 26, wherein the torsional coupling hinge coupling the first and second plates is a universal coupler.

28. A micro-electro-mechanical device according to claim 27, comprising a second actuator for controlling a tilt of the gimbal, the second actuator including a third plate supported above the substrate, the third plate configured to tilt about a rotation axis perpendicular to the first axis, the gimbal and the third plate being mechanically coupled via a second torsional coupling hinge.

29. A micro-electro-mechanical device according to claim 28, wherein the gimbal is supported above the substrate by a gimbal torsional hinge.

30. A micro-electro-mechanical device according to claim 1, wherein the torsional coupling hinge is a universal coupler.

31. A micro-electro-mechanical device according to claim 30, comprising a second, third and fourth actuator for controlling a tilt of the first mirror, each actuator coupled to the first plate with a separate torsional coupling hinge.

32. A micro-electro-mechanical device according to claim 31, wherein each actuator comprises an electrostatic, rotatory, actuator.

33. A micro-electro-mechanical device according to claim 32, wherein the mirror is freely rotatable.

34. A micro-electro-mechanical device according to claim 1, wherein the torsional coupling hinge is resilient.

35. A micro-electro-mechanical device comprising:

a substrate;

a linear array of mirrors suspended above the substrate, each mirror including a mirror plate with a reflective surface deposited thereon, each mirror plate movable about a fixed rotation axis; and

an actuator for controlling the movement of each mirror, each actuator including an actuator plate suspended above the substrate, the actuator plate configured to move about another fixed rotation axis,

wherein each mirror plate is mechanically coupled to an actuator plate via a torsional spring.

36. A micro-electromechanical device according to claim 35, wherein the actuators have a staggered arrangement with respect to a central longitudinal axis of the linear array.

37. A micro-electro-mechanical device fabricated from a micro-machining process, the device comprising:

a micro-electronic substrate;

a mirror including a first plate having a reflective surface deposited thereon flexibly suspended over the micro-electronic substrate; and

an actuator including a second plate flexibly suspended over the micro-electronic substrate and coupled to the first plate via a flexible joint,

wherein the first plate, the flexible joint, and the second plate are fabricated from a same layer during the micro-machining process.