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Optical proximity correction serif measurement technique

  • US 6,760,473 B1
  • Filed: 10/10/2000
  • Issued: 07/06/2004
  • Est. Priority Date: 07/12/2000
  • Status: Expired due to Fees
First Claim
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1. A method of determining the relative area of a serif of a feature present on a photomask, said method comprising:

  • identifying a feature having a serif;

    determining an intensity profile for a region of interest encompassing said feature with said serif;

    summing differences between data points on said profile and a constant value to calculate a flux value; and

    calculating a relative area of said serif from said flux value, whereby said relative area is useful for evaluating the quality of said photomask.

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