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Article coated with photocatalyst film, method for preparing the article and sputtering target for use in coating with the film

  • US 6,761,984 B2
  • Filed: 09/23/2002
  • Issued: 07/13/2004
  • Est. Priority Date: 12/21/1999
  • Status: Expired due to Fees
First Claim
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1. A Ti metal sputtering target comprising at least one metal having a sputtering rate for Ar which has at least one kind of energy in the ion energy range of 100 to 2000 eV, being 0.9 to 2.7 times that of Ti, selected from the group of metals consisting of Fe, V, Mo, Nb, Al and Cr in an amount of 0.01 to 10 wt % in terms of the sum of such metals.

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