Liquid metal, latching relay with face contact

• US 6,762,378 B1
• Filed: 04/14/2003
• Issued: 07/13/2004
• Est. Priority Date: 04/14/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn
• Primary Examiner(s): Barrera, Ramon M.
• Application Number:
  US10/413,195
• Time in Patent Office: 456 Days
• Field of Search: 335/47-52, 335/57, 335/58, 200/182, 200/187, 200/188, 200/189, 200/209, 200/210, 200/214, 200/235, 200/236
• US Class Current: 200/182
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 1/08 wetted with mercury
• CPC Class Codes: H01H 2001/0042 Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 2057/006 Micromechanical piezoelectric relay
• CPC Class Codes: H01H 57/00 Electrostrictive relays; Piezoelectric relays

Abstract

An electrical relay using conducting liquid in the switching mechanism. Two electrical contacts are held a small distance apart. The facing surfaces of the contacts each support a droplet of a conducting liquid, such as a liquid metal. A piezoelectric actuator is energized to reduce the gap between the electrical contacts, causing the two liquid metal droplets to coalesce and form an electrical circuit. The piezoelectric actuator is then de-energized and the electrical contacts return to their starting positions. The liquid metal droplets remain coalesced because of surface tension. The electrical circuit is broken by energizing a piezoelectric actuator to increase the gap between the electrical contacts and break the surface tension bond between the liquid metal droplets. The droplets remain separated when the piezoelectric actuator is de-energized because there is insufficient liquid metal to bridge the gap between the contacts. The relay is amenable to manufacture by micro-machining techniques.

Claims

1. An electrical relay, comprising:

a first electrical contact, having a wettable surface;

a first conducting liquid droplet in wetted contact with the first electrical contact;

a second electrical contact, spaced from the first electrical contact and having a wettable surface facing the wettable surface of the first electrical contact;

a second conducting liquid droplet in wetted contact with the second electrical contact; and

a first actuator in a rest position, coupled to the first electrical contact and operable to move the first electrical contact towards the second electrical contact, to cause the first and second conducting liquid droplets to coalesce and complete an electrical circuit between the first and second electrical contacts, and away from the second electrical contact, to cause the first and second conducting liquid droplets to separate and break the electrical circuit.

2. An electrical relay in accordance with claim 1, wherein the first actuator is a piezoelectric actuator.

3. An electrical relay in accordance with claim 1, wherein the first and second conducting liquid droplets are liquid metal droplets.

4. An electrical relay in accordance with claim 1, wherein the volumes of the first and second conducting liquid droplets are such that coalesced droplets remain coalesced when the actuator is returned to its rest position, and separated droplets remain separated when the actuator is returned to its rest position.

5. An electrical relay in accordance with claim 1, wherein the wettable surfaces of the first and second electrical contacts are stepped.

6. An electrical relay in accordance with claim 1, further comprising a second actuator, coupled to the second electrical contact and operable to move the second electrical contact towards the first electrical contact, to cause the first and second conducting liquid droplets to coalesce and complete an electrical circuit, and away from the first electrical contact, to cause the first and second conducting liquid droplets to separate and break the electrical circuit.

7. An electrical relay in accordance with claim 6, wherein the second actuator is a piezoelectric actuator.

8. An electrical relay in accordance with claim 6, further comprising:

a circuit substrate supporting electrical connections to the first and second actuators and the first and second electrical contacts;

a cap layer; and

a switching layer positioned between the circuit substrate and the cap layer and having a cavity formed therein;

wherein the first and second actuators and the first and second electrical contacts are positioned within the cavity formed in the switching layer.

9. An electrical relay in accordance with claim 8, wherein at least one of the electrical connections to the first and second electrical contacts passes through the circuit substrate and terminates in a solder ball.

10. An electrical relay in accordance with claim 8, wherein at least one of the electrical connections to the first and second electrical contacts is a trace deposited on the surface of the circuit substrate.

11. An electrical relay in accordance with claim 8, wherein at least one the electrical connections to the first and second electrical contacts terminates at an edge of the switching layer.

12. An electrical relay in accordance with claim 8, manufactured by a method of micro-machining.

13. A method for switching an electrical circuit between a first contact and a second contact in a relay, the first contact supporting a first conducting liquid droplet and the second contact supporting a second conducting liquid droplet, the method comprising:

if the electrical circuit is to be completed;

energizing a first actuator to move the first contact and second contact closer together so that the first and second conducting liquid droplets coalesce to complete the electrical circuit; and

if the electrical circuit is to be broken;

energizing the first actuator to move the first contact and the second contact farther apart so that the first and second conducting liquid droplets are separated to break the electrical circuit.

14. A method for switching an electrical circuit between a first contact and a second contact in a relay, the first contact supporting a first conducting liquid droplet and the second contact supporting a second conducting liquid droplet, the method comprising:

if the electrical circuit is to be completed;

energizing a first actuator to move the first contact and second contact closer together so that the first and second conducting liquid droplets coalesce to complete the electrical circuit; and

if the electrical circuit is to be broken;

energizing a second actuator to move the first contact and the second contact farther apart so that the first and second conducting liquid droplets are separated to break the electrical circuit.

15. A method in accordance with claim 14, wherein the first actuator is attached to the first contact and the second actuator is attached to the second contact, further comprising:

if the electrical circuit is to be completed;

energizing the second actuator to move the first contact and second contact closer together so that the first and second conducting liquid droplets coalesce to complete the electrical circuit; and

if the electrical circuit is to be broken;

energizing the first actuator to move the first contact and the second contact farther apart so that the first and second conducting liquid droplets are separated to break the electrical circuit.

16. A method in accordance with claim 14, further comprising:

if the electrical circuit is to be completed;

de-energizing the first actuator after the conducting liquid droplets coalesce; and

if the electrical circuit is to be broken;

de-energizing the second actuator after the conducting liquid droplets separate.

17. A method in accordance with claim 14, wherein the first actuator is a piezoelectric actuator and wherein energizing the first actuator comprises applying an electrical voltage across the piezoelectric actuator.

18. A method in accordance with claim 14, wherein the first actuator is a magnetorestrictive actuator and wherein energizing the first actuator comprises applying an electrical voltage to generate an electromagnetic field across the magnetorestrictive actuator.