Fingerprint sensor having a portion of the fluorocarbon polymer physical interface layer amorphized
First Claim
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1. A semiconductor fingerprint sensor device having a physical interface for allowing an external physical stimulus to be input to the semiconductor device, comprising:
- a conductor structure formed with said semiconductor device, said conductor structure functioning to provide an electric field;
a fluorocarbon polymer layer having an amorphous portion, said layer overlying said conductor structure, said layer functioning as a dielectric layer and as said physical interface; and
sensing circuits coupled to said conductor structure for sensing changes in the electric field when said external physical stimulus reacts with said physical interface.
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Abstract
A touch-sensitive semiconductor chip having a physical interface to the environment, where the surface of the physical interface is coated with a fluorocarbon polymer. The polymer is highly scratch resistant and has a characteristic low dielectric constant for providing a low attenuation to electric fields. The polymer can be used instead of conventional passivation layers, thereby allowing a thin, low dielectric constant layer between the object touching the physical interface, and the capacitive sensing circuits underlying the polymer.
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9 Claims
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1. A semiconductor fingerprint sensor device having a physical interface for allowing an external physical stimulus to be input to the semiconductor device, comprising:
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a conductor structure formed with said semiconductor device, said conductor structure functioning to provide an electric field;
a fluorocarbon polymer layer having an amorphous portion, said layer overlying said conductor structure, said layer functioning as a dielectric layer and as said physical interface; and
sensing circuits coupled to said conductor structure for sensing changes in the electric field when said external physical stimulus reacts with said physical interface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification