Flexible integrated monolithic circuit

• US 6,762,510 B2
• Filed: 05/08/2002
• Issued: 07/13/2004
• Est. Priority Date: 05/08/2001
• Status: Expired due to Term

• Current Assignee: Koninklijke Philips Electronics N.V. (Koninklijke Philips N.V.)
• Original Assignee: Koninklijke Philips Electronics N.V. (Koninklijke Philips N.V.)
• Inventors: Burnus, Michael, Schaefer, Martin, Dekker, Ronald, Michielsen, Theodorus Martinus, Pohlmann, Hauke, Maas, Henricus Godefridus Rafael, Gakis, Andreas, Schnitt, Wolfgang, Fock, Johann-Heinrich
• Primary Examiner(s): QUACH, TUAN N
• Application Number:
  US10/140,663
• Publication Number:
  US 20030057525A1
• Time in Patent Office: 797 Days
• Field of Search: 257/759, 257/787, 257/788, 257/791, 257/792, 257/793
• US Class Current: 257/787
• CPC Class Codes: H01L 2221/6835 used as a support during build up manufacturing of active devices
• CPC Class Codes: H01L 2221/68359 used as a support during manufacture of interconnect decals or build up layers
• CPC Class Codes: H01L 2221/68368 used in a transfer process involving at least two transfer steps, i.e. including an intermediate handle substrate
• CPC Class Codes: H01L 23/49855 for flat-cards, e.g. credit cards cards per se G06K19/00
• CPC Class Codes: H01L 23/5388 for flat cards, e.g. credit cards cards per se G06K19/00
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/12044 OLED

Abstract

A flexible monolithic integrated circuit which is essentially formed from flexible circuit elements, connecting elements between the flexible circuit elements, and a flexible coating which comprises at least one layer of a coating material comprising a polymer, is suitable as a small and convenient integrated circuit for electronic devices on flexible data carriers for the logistic tracking of objects and persons.

The invention also relates to a method of manufacturing a flexible integrated monolithic circuit whereby integrated monolithic circuit elements and connecting elements are formed in and on a semiconductor substrate, the main surface of the integrated circuit elements facing away from the semiconductor substrate are coated with a polymer resin, and the semiconductor substrate is removed. The method is based on conventional process steps in semiconductor technology and leads to a flexible integrated monolithic circuit in a small number of process steps.

Claims

1. A flexible monolithic integrated circuit comprising:

flexible circuit elements, connecting elements between the flexible circuit elements, and a flexible coating covering the flexible circuit elements and connecting elements which comprises at least one layer of a layer material comprising a polymer, wherein the flexible coating acts as a passivating layer, a planarizing layer, and a mechanical support for the flexible circuit elements and the connecting elements.

2. A flexible monolithic integrated circuit as claimed in claim 1, characterized in that the polymer is chosen from the group of polyimide, polycarbonate, fluorocarbon, polysulphon, epoxide, phenol, melamine, polyester, and silicon resins or their co-polymers.

3. A flexible monolithic integrated circuit as claimed in claim 1, characterized in that the polymer is chosen from the group of polyimide resins.

4. A flexible monolithic integrated circuit as claimed in claim 1, characterized in that the coating material comprises a reinforcement material.

5. A flexible monolithic integrated circuit as claimed in claim 1, characterized in that the coating material comprises a thermally conductive filler material.

6. A flexible monolithic integrated circuit as claimed in claim 1, characterized in that the coating material comprises an electrically conductive filler material.

7. A flexible monolithic integrated circuit as claimed in claim 1, characterized in that the coating material comprises a pigment.

8. A flexible monolithic integrated circuit as claimed in claim 1, characterized in that the coating comprises a field plate.

9. A flexible monolithic integrated circuit as claimed in claim 1, characterized in that the coating comprises a first layer on a first surface and a second layer on a second surface of the flexible integrated monolithic circuit.

10. A flexible monolithic integrated circuit as claimed in claim 1, characterized in that the flexible coating is provided with flexible circuit elements on both its mutually opposed main surfaces.