Operating a processing tool in a degraded mode upon detecting a fault

• US 6,763,278 B1
• Filed: 04/26/2002
• Issued: 07/13/2004
• Est. Priority Date: 04/26/2002
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Coss, Elfido Jr., Conboy, Michael R., Allen, Sam H. Jr.
• Primary Examiner(s): Picard, Leo
• Assistant Examiner(s): Frank, Elliot L
• Application Number:
  US10/133,045
• Time in Patent Office: 809 Days
• Field of Search: 700/108, 700/121, 702/183-185
• US Class Current: 700/108
• CPC Class Codes: G05B 19/4184 characterised by fault tolerance, reliability of production system
• CPC Class Codes: G05B 2219/31356 Automatic fault detection and isolation
• CPC Class Codes: G05B 2219/31366 Operate faulty tool in degraded mode
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A method and apparatus is provided for operating a processing tool in a degraded mode upon detecting a fault and in accordance with one or more business rules. The method comprises detecting a fault associated with a processing tool capable of processing one or more workpieces and operating the processing tool in a degraded mode in response to detecting the fault.

Claims

1. A method, comprising:

detecting a fault associated with a processing tool capable of processing one or more workpieces; and

operating the processing tool in a degraded mode in response to detecting the fault and in accordance with one or more business rules.

2. The method of claim 1, wherein detecting the fault comprises detecting at least one of a processing fault and a operational fault associated with the processing tool.

3. The method of claim 1, further comprising detecting a plurality of faults associated with the processing tool.

4. The method of claim 3, wherein operating the processing tool comprises prioritizing the plurality of faults according to a priority scheme.

5. The method of claim 4, wherein prioritizing the faults comprises assigning a higher priority to a fault resulting in a greater functional impact to the processing tool relative to another fault that results in a lesser functional impact to the processing tool.

6. The method of claim 1, wherein operating the processing tool comprises determining one or more functions that the processing tool is capable of performing after an occurrence of the fault.

7. The method of claim 1, wherein operating the processing tool comprises determining one or more tasks to be completed and performing at least one of the tasks based on determining that the processing tool is capable of performing the at least one of the tasks after the occurrence of the fault.

8. The method of claim 1, wherein detecting the fault comprises determining the fault based on comparing operational data received from the processing tool to fault model data.

9. The method of claim 1, wherein detecting the fault comprises:

receiving data associated with the processing tool; and

detecting, using a fault detection unit, the fault associated with the processing tool based on the received data.

10. The method of claim 1, wherein operating the processing tool in accordance with the one or more business rules comprises operating the processing tool in accordance with a business need of an entity.

11. The method of claim 1, Wherein operating the processing tool in accordance with the one or more business rules comprises identifying a product among a plurality of products to process and processing at least a portion of the identified product using the processing tool.

12. An apparatus, comprising:

an interface; and

a control unit communicatively coupled to the interface, the control unit adapted to;

detect an occurrence of a fault in a processing tool capable of processing a workpiece;

determine at least one function that the processing tool is capable of performing after the occurrence of the fault; and

indicate to the processing tool to perform the determined function in accordance with one or more business rules.

13. The apparatus of claim 12, wherein the control unit is adapted to detect at least one of a processing fault and operational fault associated with the processing tool.

14. The apparatus of claim 12, wherein the control unit is adapted to detect a plurality of faults associated with the processing tool.

15. The apparatus of claim 14, wherein the control unit is adapted to prioritize the plurality of faults according to a level of functional impact the plurality of faults have on the processing tool.

16. The apparatus of claim 12, wherein the control unit is adapted to determine the at least one function based on selecting a task that requires the at least one function for completion.

17. The apparatus of claim 16, wherein the control unit is adapted to select the task based on a business rule designating the task as a higher priority than other tasks.

18. The apparatus of claim 12, wherein the control unit is adapted to determine the fault based on comparing operational data received from the processing tool to fault model data.

19. The apparatus of claim 12, wherein the control unit is adapted to:

receive data associated with the processing tool; and

detect, using a fault detection unit, the fault associated with the processing tool based on the received data.

20. The apparatus of claim 12, wherein the control unit is adapted to operate the processing tool in accordance with the one or more business rules that prioritize one or more tasks based on a business need of an entity.

21. An article comprising one or more machine-readable storage media containing instructions that when executed enable a processor to:

detect a fault associated with a processing tool capable of processing one or more workpieces;

determine at least one function that the processing tool is capable of performing based on detected fault; and

cause the processing tool to perform the determined function in accordance with one or more business rules.

22. The article of claim 21, wherein the instructions when executed enable the processor to detect a plurality of faults associated with the processing tool.

23. The article of claim 22, wherein the instructions when executed enable the processor to prioritize the plurality of faults according to a level of functional impact the plurality of faults have on the processing tool.

24. The article of claim 21, wherein the instructions when executed enable the processor to determine the at least one function based on selecting a task that requires the at least one function for completion.

25. The article of claim 24, wherein the instructions when executed enable the processor to select the task based on a business rule designating the task as a higher priority than other tasks.

26. The article of claim 21, wherein the instructions when executed enable the processor to detect at least one of a processing fault and operational fault associated with the processing tool.

27. The article of claim 21, wherein the instructions when executed enable the processor to:

receive data associated with the processing tool; and

detect, using a fault detection unit, the fault associated with the processing tool based on the received data.

29. The system of claim 23 wherein the control unit is communicatively coupled to the processing tool over an advanced process control framework.

28. A system, comprising:

at least one processing tool; and

a control unit communicatively coupled to the processing tool, the control unit adapted to;

detect a fault in the processing tool;

determine at least one function that the processing tool is capable of performing based on the detected fault; and

indicate to the processing tool to perform the determined function in accordance with one or more business rules.

30. An apparatus, comprising:

means for detecting a fault associated with a processing tool capable processing one or more workpieces; and

means for operating the processing tool in a degraded mode in response to detecting the fault and in accordance with one or more business rules.