Supercritical solutions for cleaning photoresist and post-etch residue from low-k materials

• US 6,764,552 B1
• Filed: 11/21/2002
• Issued: 07/20/2004
• Est. Priority Date: 04/18/2002
• Status: Expired due to Term

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Shrinivasan, Krishnan, Tipton, Adrianne, Hess, Dennis W., Levitin, Galit, Joyce, Patrick C., Myneni, Satyanarayana
• Primary Examiner(s): Markoff, Alexander
• Application Number:
  US10/303,321
• Time in Patent Office: 607 Days
• Field of Search: 134/2, 134/3, 134/19, 134/25.4, 134/26, 134/28, 134/29, 134/30, 134/34, 134/35, 134/36, 134/41, 134/902, 510/175
• US Class Current: 134/3
• CPC Class Codes: B08B 7/0021 by liquid gases or supercritical fluids
• CPC Class Codes: C11D 2111/22 Electronic devices, e.g. PCBs or semiconductors
• CPC Class Codes: C11D 7/02 Inorganic compounds
• CPC Class Codes: C11D 7/12 Carbonates bicarbonates
• CPC Class Codes: G03F 7/425 containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
• CPC Class Codes: H01L 21/02063 the processing being the formation of vias or contact holes
• CPC Class Codes: H01L 21/02101 only involving supercritical fluids
• CPC Class Codes: H01L 21/31133 by chemical means

Abstract

Disclosed formulations of supercritical solutions are useful in wafer cleaning processes. Supercritical solutions of the invention may be categorized by their chemistry, for example, basic, acidic, oxidative, and fluoride chemistries are used. Such solutions may include supercritical carbon dioxide and at least one reagent dissolved therein to facilitate removal of waste material from wafers, particularly for removing photoresist and post-etch residues from low-k materials. This reagent may include an ammonium carbonate or bicarbonate, and combinations of such reagents. The solution may include one or more co-solvents, chelating agents, surfactants, and anti-corrosion agents as well.

Claims

1. A method of removing waste material from a semiconductor wafer, the method comprising:

(a) receiving the semiconductor wafer in a chamber;

(b) dissolving a reagent into a supercritical solvent to create a supercritical solution; and

(c) providing the supercritical solution to the chamber to thereby contact at least one surface of the wafer and remove at least a portion of the waste material from the semiconductor wafer;

wherein the reagent facilitates removal of the material, and wherein the reagent comprises at least one of an ammonium bicarbonate prepared ahead of time, prior to contact with the supercritical solvent, and an ammonium carbonate prepared ahead of time, prior to contact with the supercritical solvent.

2. The method of claim 1, wherein the supercritical solvent is supercritical carbon dioxide.

3. The method of claim 2, wherein the supercritical solution further comprises a co-solvent that increases the solubility of the reagent in the supercritical carbon dioxide.

4. The method of claim 3, wherein the co-solvent is selected from the group consisting of alcohols, ethers, alkyl halides, alkanes, alkenes, nitriles, amides, aromatic compounds, siloxanes, and combinations thereof.

5. The method of claim 1, wherein the waste material to be removed is selected from the group consisting of photoresists, residues, plasma residues, sputtered metals plasma residue or particles resulting from a wafer process, oxides, and combinations thereof.

6. The method of claim 1, wherein the reagent comprises a tetraalkyl ammonium carbonate or a tetraalkyl ammonium bicarbonate.

7. The method of claim 6, wherein (b) comprises adding the tetraalkyl ammonium bicarbonate or tetraalkyl ammonium carbonate, as a solution in a co-solvent, to the supercritical carbon dioxide in the presence of the semiconductor wafer.

8. The method of claim 7, wherein the co-solvent is an aliphatic alcohol.

9. The method of claim 8, wherein the tetraalkyl ammonium bicarbonate or tetraalkyl ammonium carbonate has a final concentration in the supercritical solution of between about 0.1 and 0.5% by weight.

10. The method of claim 6, wherein the tetraalkyl ammonium carbonate or the tetraalkyl ammonium bicarbonate has a final concentration in the supercritical solution of between about 0.1 and 0.5% by weight.

11. The method of claim 1, wherein the pressure within said chamber is between about 1500 and 5000 psi during (b).

12. The method of claim 1, wherein the temperature within said chamber is maintained at between about 50°

C. and 150°

C. during (b).

13. The method of claim 1, wherein the temperature within said chamber is maintained at about 70°

C. during (b).

14. The method of claim 1, wherein said contact with at least one surface of the wafer is maintained for a period of between about 1 and 60 minutes.

15. The method of claim 1, wherein said contact with at least one surface of the wafer is maintained for a period of between about 5 and 20 minutes.

16. The method of claim 1, further comprising rinsing the semiconductor wafer with at least one of deionized water, an organic solvent, the supercritical solvent, and mixtures thereof after (b).

17. The method of claim 1, wherein the supercritical solution further comprises a chelating agent.

18. The method of claim 17, wherein the chelating agent is selected from the group consisting of EDTA, acetyl acetone, hexafluoroacetyl acetone, catechol, oxalic acid, and biphenol.

19. The method of claim 1, wherein the supercritical solution further comprises an anti-corrosion agent that protects one or more components of the wafer surface from corrosion.

20. The method of claim 19, wherein the anti-corrosion agent is selected from the group consisting of thiophenes, thiols, and gallic acid.

21. The method of claim 1, wherein the supercritical solution further comprises a surfactant that assists in removal of particles from the at least one surface of the wafer.

22. The method of claim 1, wherein the supercritical solution further comprises an oxidant.

23. The method of claim 22, wherein the oxidant is selected from the group consisting of peroxides and peracids.

24. The method of claim 23, wherein the oxidant is hydrogen peroxide.

25. The method of claim 22, wherein the supercritical solution further comprises acetonitrile as a co-solvent for the ammonium carbonate or bicarbonate, and wherein the ammonium carbonate or bicarbonate is a tetraalkylammonium carbonate or a tetraalkylammonium bicarbonate.