Application of multi-layer antistatic/antireflective coating to video display screen by sputtering
First Claim
1. A process for forming an antistatic/antireflective coating on an outer surface of a video display screen comprising the steps of:
- sputter-depositing on the outer surface of the video display screen an inner metallic antistatic layer having a precisely controlled thickness within a range of 18-35 nm, wherein a light refractive index of said inner antistatic layer is also precisely controlled within a range of 1.8-2.2; and
sputter-depositing on said inner antistatic layer an outer antireflective layer having a precisely controlled thickness within a range of 110-440 nm, wherein a light refractive index of said outer antireflective layer is also precisely controlled within a range of 1.3-1.47.
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Accused Products
Abstract
A multi-layer antistatic/antireflective coating having high electrical conductivity (103 ohms) and low reflectivity (0.7%) is applied to the outer surface of a video display screen by sputtering. The multi-layer coating includes an inner antistatic layer deposited directly on the video display screen and comprised of ITO, TiO2, etc., having a light refractive index in the range of 1.8-2.2 and a thickness in the range of 18-35 nm. The outer antireflective layer is comprised of SiO2, MgO, etc., having a light refractive index in the range of 1.3-1.47 and a thickness in the range of 110-140 nm. The multi-layer coating is applied using a sputtering apparatus having a dual vacuum chamber, a diffusion pump connected to one of the chambers, and plural vacuum pumps connected to the diffusion pump and to the dual vacuum chamber with various gauges and valves for monitoring and controlling the sputtering operation.
61 Citations
14 Claims
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1. A process for forming an antistatic/antireflective coating on an outer surface of a video display screen comprising the steps of:
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sputter-depositing on the outer surface of the video display screen an inner metallic antistatic layer having a precisely controlled thickness within a range of 18-35 nm, wherein a light refractive index of said inner antistatic layer is also precisely controlled within a range of 1.8-2.2; and
sputter-depositing on said inner antistatic layer an outer antireflective layer having a precisely controlled thickness within a range of 110-440 nm, wherein a light refractive index of said outer antireflective layer is also precisely controlled within a range of 1.3-1.47. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method for sputter depositing an inner antistatic layer and an outer antireflective layer on the surface of a video display screen, said method comprising the steps of:
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providing a first chamber including first and second cathodes respectively comprised of an antistatic material and an antireflective material, wherein said first chamber includes a sealed aperture;
providing a second chamber coupled to said first chamber by means of a valve;
evacuating said second chamber;
connecting a diffusion pump to said second chamber when the pressure in said second chamber and in said diffusion pump reaches a working pressure;
loading a video display screen in the scaled aperture of said first chamber and evacuating said first chamber to the working pressure;
opening the valve to equalize the pressure between said first and second chambers;
directing energetic positive ions on said first cathode for sputter depositing the antistatic material on the video display screen;
directing energetic positive ions on the second cathode for sputter depositing the antireflective material on the antistatic material;
releasing the working pressure from said first and second chambers; and
removing the video display Screen from said first chamber. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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Specification